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2014 International Conference on Optical MEMS and Nanophotonics最新文献

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Simulation of electric field distribution in CMOS single photon avalanche diodes at breakdown voltage 击穿电压下CMOS单光子雪崩二极管的电场分布模拟
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924586
Jau-Yang Wu, Sheng-Di Lin
{"title":"Simulation of electric field distribution in CMOS single photon avalanche diodes at breakdown voltage","authors":"Jau-Yang Wu, Sheng-Di Lin","doi":"10.1109/OMN.2014.6924586","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924586","url":null,"abstract":"We simulate the electric field distribution in single-photon avalanche diodes (SPADs) fabricated by CMOS 0.25-μm high-voltage technology to explain the observed non-uniform 2-D photo-count mapping. The cause of non-uniform electric field distribution at the breakdown voltage is discussed with the aid of simulation. A method for improving the electric field uniformity is also proposed accordingly.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116468059","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Self-locking Optoelectronic Tweezers for micro-particle manipulation 用于微粒子操作的自锁光电镊子
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924540
Yajiang Yang, Y. Mao, C. O. Chui, P. Chiou
{"title":"Self-locking Optoelectronic Tweezers for micro-particle manipulation","authors":"Yajiang Yang, Y. Mao, C. O. Chui, P. Chiou","doi":"10.1109/OMN.2014.6924540","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924540","url":null,"abstract":"We presented a novel Self-Locking Optoelectronic Tweezers (SLOT) for micro-particle manipulation. DEP force generated from ring-shape electrodes is utilized for micro-particle self-locking followed by selectively single particle releasing with lateral phototransistor-based optoelectronic tweezers. Single particle locking and releasing function were demonstrated.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"66 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133573515","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Miniature fiber facet atomic force microscope using photonic crystal sensors 使用光子晶体传感器的微型光纤面原子力显微镜
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924510
A. Gellineau, Yu-po Wong, Andrew Wang, M. Butte, O. Solgaard
{"title":"Miniature fiber facet atomic force microscope using photonic crystal sensors","authors":"A. Gellineau, Yu-po Wong, Andrew Wang, M. Butte, O. Solgaard","doi":"10.1109/OMN.2014.6924510","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924510","url":null,"abstract":"A miniaturized Atomic Force Microscope is fabricated on the facet of an optical fiber. Photonic crystal mirrors are integrated into the fabrication creating a Fabry Perot sensor for sensitive force measurements that verify the probe's ability to resolve forces down to 8 pN/Hz0.5. This AFM form factor enables a path towards in-vivo, high-bandwidth and non-contact AFM imaging.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122198811","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Microphotonics in satellite payloads and platforms 卫星有效载荷和平台中的微光子学
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924518
I. Mckenzie, N. Karafolas, P. van Loock
{"title":"Microphotonics in satellite payloads and platforms","authors":"I. Mckenzie, N. Karafolas, P. van Loock","doi":"10.1109/OMN.2014.6924518","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924518","url":null,"abstract":"The European Space Agency has a comprehensive R&D program to develop microphotonic solutions for use is spacecraft engineering. This covers predominantly microphotonic devices and MOEMS to be used as the core devices of microwave-photonic equipment for Telecommunication Satellite Payloads such any Frequency Generation Unit, Frequency Conversion Unit, Switch and Beam Forming. Similar solutions are considered for equipment to be used in satellite platforms such as interrogation units for fiber optic temperature and strain sensors and miniature fiber optic gyroscopes and inertial measurement units.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125448352","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Fabrication and characterization of microring resonators in titanium diffused lithium niobate 钛扩散铌酸锂微环谐振腔的制备与表征
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924535
Siew Shawn Yohanes, Deng Jun, S. Saha, S. Hussain, M. Tsang, A. Danner
{"title":"Fabrication and characterization of microring resonators in titanium diffused lithium niobate","authors":"Siew Shawn Yohanes, Deng Jun, S. Saha, S. Hussain, M. Tsang, A. Danner","doi":"10.1109/OMN.2014.6924535","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924535","url":null,"abstract":"Large microring resonators provide high confinement and small free spectral range. When sufficiently large, both microwave and optical photons can be confined by the structure, allowing microwave-optical coupling. Lithium niobate is an ideal candidate as it has high electro-optic and nonlinear coefficients. Electro-optic modulation of microring resonators allows dynamic and real-time tuning of the free-spectral range of the microring, making such a device useful for microwave photonics and quantum optics applications. We fabricate and characterize microring resonators in titanium diffused lithium niobate.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"68 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125536417","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Optical feedback control of resonant fibre scanners 谐振光纤扫描仪的光反馈控制
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924609
M. Mokhtar, R. Syms
{"title":"Optical feedback control of resonant fibre scanners","authors":"M. Mokhtar, R. Syms","doi":"10.1109/OMN.2014.6924609","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924609","url":null,"abstract":"Intermittent reflection from an annular mirror surrounding the imaging lens is proposed as a method of providing feedback in a resonant fibre optical scanner. A phase locked loop and a proportional controller can then be used to adjust the drive frequency and amplitude. The system is demonstrated using a piezoelectrically actuated dual numerical aperture confocal resonant fibre scanner.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129481362","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly 整体镀镍微结构及其在微镜和微装配中的应用
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924611
Y. Chiu, W.-C Lai, Chun-Hao Chang, Chun-Po Chang, Ching-Hung Chen, Chih-Hsiang Lai, W. Hsu
{"title":"Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly","authors":"Y. Chiu, W.-C Lai, Chun-Hao Chang, Chun-Po Chang, Ching-Hung Chen, Chih-Hsiang Lai, W. Hsu","doi":"10.1109/OMN.2014.6924611","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924611","url":null,"abstract":"This paper presents micro mirrors and micro assembly mechanisms fabricated by monolithic nickel electroplating. Multiple nickel structural layers were electroplated and patterned with copper as the sacrificial material. A novel side latch design was proposed and demonstrated for 3D micro assembly of micro mirrors by simple push operation of micro probes. Micro mirrors was assembled in about 15 sec in laboratory tests. The resonance frequency of the scanning mode of a stand-alone micro mirror was measured to be 4.753 kHz with a quality factor of about 470.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129220371","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Simultaneous two-wavelength readout for thermo-mechanical MEMS detectors 同时双波长读出热机械MEMS探测器
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924576
U. Adiyan, F. Çivitci, R. B. Erarslan, O. Ferhanoğlu, H. Torun, H. Urey
{"title":"Simultaneous two-wavelength readout for thermo-mechanical MEMS detectors","authors":"U. Adiyan, F. Çivitci, R. B. Erarslan, O. Ferhanoğlu, H. Torun, H. Urey","doi":"10.1109/OMN.2014.6924576","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924576","url":null,"abstract":"We proposed a novel two-wavelength optical readout for grating based thermo-mechanical MEMS arrays by using two color LEDS butt-coupled to a multi-mode fiber, which provides spatial auto-registration of two different color images on a single camera. The -1st diffraction orders of the different colors are simultaneously monitored with different channels (R and G) of the RGB camera. The sensitivity of the MEMS array is improved by using the channel data with higher sensitivity for each MEMS detector under a thermal load.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"69 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121376884","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Development of portable microscope with tunable working distance by using dielectric liquid lens 介质液体透镜可调工作距离便携式显微镜的研制
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924567
K. Liao, Wei-Jung Wang, R. Luo, H. Tsai, J. Yeh
{"title":"Development of portable microscope with tunable working distance by using dielectric liquid lens","authors":"K. Liao, Wei-Jung Wang, R. Luo, H. Tsai, J. Yeh","doi":"10.1109/OMN.2014.6924567","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924567","url":null,"abstract":"This paper presents the development of a portable microscope with dielectric liquid lens. This device provides the tunable working distance from 7.6 mm to 6.7 mm by adjusting the voltage of dielectric liquid lens. The liquid lens's response time is about 200 ms and electric power consumption about 0.32 mW.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115340952","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
50μm gap 8×8 pixels deformable mirror fabricated by membrane transfer process 采用膜转移工艺制备50μm间隙8×8像素变形镜
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924577
T. Wu, T. Sasaki, M. Akiyama, K. Hane
{"title":"50μm gap 8×8 pixels deformable mirror fabricated by membrane transfer process","authors":"T. Wu, T. Sasaki, M. Akiyama, K. Hane","doi":"10.1109/OMN.2014.6924577","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924577","url":null,"abstract":"We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. A 50μm air gap is generated a large between the mirror membrane and the electrode to get a large stroke. A DM with a 4mm×4mm mirror membrane and 8×8 underlying electrode array a is fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"66 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130686072","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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