使用光子晶体传感器的微型光纤面原子力显微镜

2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI:10.1109/OMN.2014.6924510

A. Gellineau, Yu-po Wong, Andrew Wang, M. Butte, O. Solgaard

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引用次数: 3

摘要

在光纤表面制备了小型化的原子力显微镜。光子晶体反射镜集成到制造中，创建了用于敏感力测量的法布里·珀罗传感器，验证了探测器分解力的能力，力低至8 pN/Hz0.5。这种AFM的外形因素为实现体内、高带宽和非接触式AFM成像提供了途径。

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Miniature fiber facet atomic force microscope using photonic crystal sensors

A miniaturized Atomic Force Microscope is fabricated on the facet of an optical fiber. Photonic crystal mirrors are integrated into the fabrication creating a Fabry Perot sensor for sensitive force measurements that verify the probe's ability to resolve forces down to 8 pN/Hz0.5. This AFM form factor enables a path towards in-vivo, high-bandwidth and non-contact AFM imaging.

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2014 International Conference on Optical MEMS and Nanophotonics

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