{"title":"基于亚波长光栅氮化硅膜的可调谐滤光片","authors":"Yue Wang, D. Stellinga, T. Krauss","doi":"10.1109/OMN.2014.6924515","DOIUrl":null,"url":null,"abstract":"We report the use of 500 nm thick silicon nitride membrane as a high reflective broad-band filter in the orange-red spectral range. The membrane is patterned into a high contrast grating with 560 nm period to act as a high-reflectivity mirror. Using electrostatic tuning, we have achieved a tunable filter based on a Fabry-Pérot cavity architecture. By applying 9 V to the MEMs device, we observe a 13 nm wavelength shift of a peak centred at 630 nm.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"46 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Tunable optical filters based on silicon nitride mem-branes with subwavelength gratings\",\"authors\":\"Yue Wang, D. Stellinga, T. Krauss\",\"doi\":\"10.1109/OMN.2014.6924515\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report the use of 500 nm thick silicon nitride membrane as a high reflective broad-band filter in the orange-red spectral range. The membrane is patterned into a high contrast grating with 560 nm period to act as a high-reflectivity mirror. Using electrostatic tuning, we have achieved a tunable filter based on a Fabry-Pérot cavity architecture. By applying 9 V to the MEMs device, we observe a 13 nm wavelength shift of a peak centred at 630 nm.\",\"PeriodicalId\":161791,\"journal\":{\"name\":\"2014 International Conference on Optical MEMS and Nanophotonics\",\"volume\":\"46 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-10-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 International Conference on Optical MEMS and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN.2014.6924515\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2014.6924515","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Tunable optical filters based on silicon nitride mem-branes with subwavelength gratings
We report the use of 500 nm thick silicon nitride membrane as a high reflective broad-band filter in the orange-red spectral range. The membrane is patterned into a high contrast grating with 560 nm period to act as a high-reflectivity mirror. Using electrostatic tuning, we have achieved a tunable filter based on a Fabry-Pérot cavity architecture. By applying 9 V to the MEMs device, we observe a 13 nm wavelength shift of a peak centred at 630 nm.
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