High performance label-free biosensing by all dielectric metamaterial

This work presents high performance label-free biosensor by using an all dielectric metamaterial. The all dielectric metamaterial consists of nanohole arrays in rectangular lattice on a thin silicon substrate. The nanohole arrays were fabricated by using e-beam lithography and silicon reactive ion etching. The all dielectric metamaterial biosensor shows high sensitivity and high figure-of-merit of 21. This device can offer new opportunity for biosensing with high performance and reusability.