IEEE Transactions on Instrumentation and Measurement最新文献_第7页

A Variable Reluctance-Based Planar Dual-Coil Angle Sensor With Enhanced Linearity 线性度更高的基于可变磁阻的平面双线圈角度传感器

IF 5.6 2区工程技术

IEEE Transactions on Instrumentation and Measurement Pub Date : 2024-11-01 DOI: 10.1109/TIM.2024.3451596

Anil Kumar Appukuttan Nair Syamala Amma;P.P. Narayanan;Jeshma Thalapil Vaheeda;Sreenath Vijayakumar

{"title":"A Variable Reluctance-Based Planar Dual-Coil Angle Sensor With Enhanced Linearity","authors":"Anil Kumar Appukuttan Nair Syamala Amma;P.P. Narayanan;Jeshma Thalapil Vaheeda;Sreenath Vijayakumar","doi":"10.1109/TIM.2024.3451596","DOIUrl":"https://doi.org/10.1109/TIM.2024.3451596","url":null,"abstract":"An easy-to-fabricate, full circle range (0°–360°), planar coil-based variable reluctance (VR) angle transducer with enhanced linearity is presented in this article. The proposed sensor system aims to mitigate the limitations of the existing VR angle sensors, particularly their limited accuracy and nonlinearity, resulting from the inherent sensor output characteristics. By carefully designing the coil geometry to achieve uniform flux distribution and implementing a simple semicircular-shaped rotor, the sensor system offers enhanced performance and linearity. The proposed sensor employs a semicircular-shaped rotor plate (RP) placed between two printed circuit board (PCBs) with four coils each. These coils are strategically designed to ensure a linear variation of inductance with respect to the RP position, resulting in improved linearity in the sensor output. After validating the sensor design through analytical methods and finite-element analysis (FEA), a suitable algorithm was developed for accurately estimating the rotor angle. A sensor prototype was manufactured to evaluate the performance of the sensor system. The prototype showed an excellent linearity with a worst case error of 0.31% and a resolution of 0.11°. The sensor shows negligible sensitivity to axial misalignment of the shaft and the presence of external magnetic objects, highlighting the practical usefulness of the system.","PeriodicalId":13341,"journal":{"name":"IEEE Transactions on Instrumentation and Measurement","volume":"73 ","pages":"1-8"},"PeriodicalIF":5.6,"publicationDate":"2024-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142595032","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Impedance-Matching Analysis of Wideband Harmonic Disturbance Generator for Railway Train-Network System 铁路列车网络系统宽带谐波干扰发生器的阻抗匹配分析

IF 5.6 2区工程技术

IEEE Transactions on Instrumentation and Measurement Pub Date : 2024-11-01 DOI: 10.1109/TIM.2024.3481591

Xiangyang Yang;Haitao Hu;Donghua Xiao;Haidong Tao;Yitong Song;Zhengyou He

{"title":"Impedance-Matching Analysis of Wideband Harmonic Disturbance Generator for Railway Train-Network System","authors":"Xiangyang Yang;Haitao Hu;Donghua Xiao;Haidong Tao;Yitong Song;Zhengyou He","doi":"10.1109/TIM.2024.3481591","DOIUrl":"https://doi.org/10.1109/TIM.2024.3481591","url":null,"abstract":"Accurate impedance measurements of the train and traction network are crucial for small-signal stability analysis of railway train-network system (RTNS). Although impedance measurement methods for four-quadrant converters (4QCs) in electric trains based on harmonic voltage disturbance injection have been proposed, few studies have investigated the impact of integrating a harmonic generator on RTNS stability. To address this issue, this article proposes a wideband harmonic disturbance generator (WHDG) and evaluates its impact on RTNS stability. The WHDG primarily comprises the back-to-back converter-based cascaded H-bridge (CHB) structure and a wideband coupling transformer. This generator can produce multifrequency perturbations with uniformly distributed spectrum energy. Subsequently, an accurate output impedance model is established based on the detailed topology and parameters of the WHDG. The model accounts for the impact of the dc impedance of the front-stage rectifier on the post-stage inverter. The close alignment between the modeling and simulation results demonstrates the accuracy of the deduced impedance model. Furthermore, an impedance-matching analysis of the RTNS with integrated WHDG is performed, indicating that the internal impedance of the WHDG weakens the stability of the tested RTNS. Finally, the effectiveness of the proposed WHDG is validated via a hardware-in-the-loop (HIL) experimental platform, and the impedance-matching analysis results are verified.","PeriodicalId":13341,"journal":{"name":"IEEE Transactions on Instrumentation and Measurement","volume":"73 ","pages":"1-14"},"PeriodicalIF":5.6,"publicationDate":"2024-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142595836","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Electromagnetic Excitation for Blade Vibration Analysis in Static Conditions: Theoretical Insights and Experimental Evaluation 静态条件下用于叶片振动分析的电磁激励：理论见解与实验评估

IF 5.6 2区工程技术

IEEE Transactions on Instrumentation and Measurement Pub Date : 2024-11-01 DOI: 10.1109/TIM.2024.3488153

Mohammed Lamine Mekhalfia;Pavel Procházka;Radislav Smid;Philip Bonello;Peter Russhard;Dušan Maturkanič;Mohamed Elsayed Mohamed;Eder Batista Tchawou Tchuisseu

{"title":"Electromagnetic Excitation for Blade Vibration Analysis in Static Conditions: Theoretical Insights and Experimental Evaluation","authors":"Mohammed Lamine Mekhalfia;Pavel Procházka;Radislav Smid;Philip Bonello;Peter Russhard;Dušan Maturkanič;Mohamed Elsayed Mohamed;Eder Batista Tchawou Tchuisseu","doi":"10.1109/TIM.2024.3488153","DOIUrl":"https://doi.org/10.1109/TIM.2024.3488153","url":null,"abstract":"Blade vibration testing is crucial for understanding the dynamic behavior of rotating machinery. This article presents a theoretical analysis and experimental validation of electromagnetic excitation for blade vibration testing in static conditions. The study focuses on investigating the effect of electromagnets on static blades to establish a theoretical foundation. The Timoshenko beam theory is utilized to analyze the vibration parameters, including amplitude and frequency while considering associated uncertainties. The theoretical analysis is complemented by numerical modeling using the finite-element method and experimental measurements employing laser Doppler vibrometer (LDV). The results demonstrate the effectiveness of electromagnetic excitation in generating controlled vibrations in static blades. These findings provide valuable insights and serve as a basis for subsequent investigations into the behavior of blades during rotation. The mathematical model’s frequency estimation error was approximately 4% compared to numerical results, and the numerical amplitude results differed by 6.4% from the experimental measurements. These contributions enhance the understanding and design of blade vibration monitoring systems in rotating machinery and provide valuable information on the blade’s dynamic parameters for the calibration of blade tip timing (BTT) systems.","PeriodicalId":13341,"journal":{"name":"IEEE Transactions on Instrumentation and Measurement","volume":"73 ","pages":"1-8"},"PeriodicalIF":5.6,"publicationDate":"2024-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142672061","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Dense Condition-Driven Diffusion Network for Infrared Small Target Detection 用于红外小目标探测的密集条件驱动扩散网络

IF 5.6 2区工程技术

IEEE Transactions on Instrumentation and Measurement Pub Date : 2024-11-01 DOI: 10.1109/TIM.2024.3488145

Linfeng Li;Yucheng Song;Tian Tian;Jinwen Tian

{"title":"Dense Condition-Driven Diffusion Network for Infrared Small Target Detection","authors":"Linfeng Li;Yucheng Song;Tian Tian;Jinwen Tian","doi":"10.1109/TIM.2024.3488145","DOIUrl":"https://doi.org/10.1109/TIM.2024.3488145","url":null,"abstract":"Infrared small target detection (IRSTD) is important in military and civilian applications. In recent years, numerous methods based on convolutional neural networks (CNNs) have already been explored in the field of IRSTD. However, due to the mismatch between the network’s receptive field and the size of the target, conventional CNN-based methods struggle to fully differentiate between the background and the small target and are prone to losing the small target in deeper layers. A dense condition-driven diffusion network (DCDNet) based on the conditional diffusion model is proposed to address the IRSTD task. The diffusion model can easily fit the distribution of infrared background images, thereby isolating the small targets from the distribution. Extracted features from original images are used as conditions to guide the diffusion model in gradually transforming Gaussian noise into the target image. A dense conditioning module is introduced to provide richer guidance to the diffusion model. This module incorporates multiscale information from the conditional image into the diffusion model. Multiple samplings can reduce the amplitude of background noise to enhance the target. Comprehensive experiments performed on two public datasets demonstrate the proposed method’s effectiveness and superiority over other comparative methods in terms of probability of detection (\u0000<inline-formula> <tex-math>$P_{d}$ </tex-math></inline-formula>\u0000), intersection over union (IoU), and signal-to-clutter ratio gain (SCRG).","PeriodicalId":13341,"journal":{"name":"IEEE Transactions on Instrumentation and Measurement","volume":"73 ","pages":"1-13"},"PeriodicalIF":5.6,"publicationDate":"2024-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142600213","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Dictionary Learning Method for Cyclostationarity Maximization and Its Application to Bearing Fault Feature Extraction 循环最大化的字典学习法及其在轴承故障特征提取中的应用

IF 5.6 2区工程技术

IEEE Transactions on Instrumentation and Measurement Pub Date : 2024-11-01 DOI: 10.1109/TIM.2024.3484531

Weihao Zhang;Cai Yi;Lei Yan;Qi Liu;Qiuyang Zhou;Pengfei He;Le Ran;Yunzhi Lin

{"title":"Dictionary Learning Method for Cyclostationarity Maximization and Its Application to Bearing Fault Feature Extraction","authors":"Weihao Zhang;Cai Yi;Lei Yan;Qi Liu;Qiuyang Zhou;Pengfei He;Le Ran;Yunzhi Lin","doi":"10.1109/TIM.2024.3484531","DOIUrl":"https://doi.org/10.1109/TIM.2024.3484531","url":null,"abstract":"It has been demonstrated that fast convolutional sparse dictionary learning (FCSDL) is a useful instrument for diagnosing rolling bearing faults and can recover rolling bearing fault shocks unaffected by random slippage. However, although FCSDL is not impacted by random fluctuations and can rapidly reconstruct fault shock without truncating the signal, its performance for repetitive fault shock reconstruction is not optimal when dealing with strong noise vibration signals. Therefore, this article proposes cyclostationary convolutional sparse dictionary learning (CCSDL), which is guided by fault features (cyclostationarity) to achieve the greatest signal reconstruction performance. First, the proposed method is based on the rotation frequency, and various frequency-band-covering components in the vibration signal are reconstructed successively. In the meanwhile, the harmonic significance index (HSI), which can indicate the cyclostationarity of the fault shock, evaluates the fault characteristics of each reconstruction result and finally obtains the most significant reconstruction result. Compared with FCSDL and variational mode decomposition (VMD), the proposed method performs far superior in signal reconstruction when processing low SNR vibration data.","PeriodicalId":13341,"journal":{"name":"IEEE Transactions on Instrumentation and Measurement","volume":"73 ","pages":"1-13"},"PeriodicalIF":5.6,"publicationDate":"2024-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142595849","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Radio Frequency Fingerprinting for WiFi Devices Using Oscillator Drifts 利用振荡器漂移对 WiFi 设备进行无线电频率指纹识别

IF 5.6 2区工程技术

IEEE Transactions on Instrumentation and Measurement Pub Date : 2024-11-01 DOI: 10.1109/TIM.2024.3485452

Chaozheng Xue;Tao Li;Yongzhao Li;Yuhan Ruan;Rui Zhang;Octavia A. Dobre

引用次数: 0

Optical Fiber-Coupled Waveguide Grating Chip Sensor Fabricated by Ultraviolet Nanoimprint Lithography 利用紫外纳米压印光刻技术制造光纤耦合波导光栅芯片传感器

IF 5.6 2区工程技术

IEEE Transactions on Instrumentation and Measurement Pub Date : 2024-11-01 DOI: 10.1109/TIM.2024.3485400

Qiaoling Chen;Jianxin Cui;Zengling Ran;Xiu He;Xiaoxue Ruan;Shengyi Qiu;Yanbo Xiao;Qingqiang Zhu;Fei Zhang;Gaoli Xiao;Ziqiang Chen;Jiahui Yu;Yuan Gong

{"title":"Optical Fiber-Coupled Waveguide Grating Chip Sensor Fabricated by Ultraviolet Nanoimprint Lithography","authors":"Qiaoling Chen;Jianxin Cui;Zengling Ran;Xiu He;Xiaoxue Ruan;Shengyi Qiu;Yanbo Xiao;Qingqiang Zhu;Fei Zhang;Gaoli Xiao;Ziqiang Chen;Jiahui Yu;Yuan Gong","doi":"10.1109/TIM.2024.3485400","DOIUrl":"https://doi.org/10.1109/TIM.2024.3485400","url":null,"abstract":"A novel optical fiber-coupled waveguide grating chip device based on Fano resonance effect is proposed and demonstrated for the first time, to the best of our knowledge. It is fabricated by ultraviolet nanoimprint lithography (UV-NIL), with the advantages of low-cost and easy mass production. Such a device can perform multifunctional sensing such as refractive index (RI) and pressure because the variations of the effective RI of the guide mode and the grating period will cause the resonant wavelength shifts under the change of external parameters. Through experimental verification, a RI sensitivity of 59.29 nm/RIU and a pressure sensitivity of 0.89 nm/MPa, a copper ion concentration detection sensitivity of 3.40 pm/\u0000<inline-formula> <tex-math>$mu $ </tex-math></inline-formula>\u0000M are achieved, respectively. Furthermore, the chip sensing function is realized, and each arrayed sensing unit is interrogated through optical fiber scanning. This kind of optical fiber-coupled waveguide grating chip sensor can not only realize array sensing but also measure various physical and chemical parameters. It could find important applications in biochemical and industrial fields.","PeriodicalId":13341,"journal":{"name":"IEEE Transactions on Instrumentation and Measurement","volume":"73 ","pages":"1-9"},"PeriodicalIF":5.6,"publicationDate":"2024-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142636358","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Needle Segmentation Using GAN: Restoring Thin Instrument Visibility in Robotic Ultrasound 使用 GAN 进行针头分割：恢复机器人超声波中薄型器械的可见性

IF 5.6 2区工程技术

IEEE Transactions on Instrumentation and Measurement Pub Date : 2024-10-31 DOI: 10.1109/TIM.2024.3451569

Zhongliang Jiang;Xuesong Li;Xiangyu Chu;Angelos Karlas;Yuan Bi;Yingsheng Cheng;K. W. Samuel Au;Nassir Navab

{"title":"Needle Segmentation Using GAN: Restoring Thin Instrument Visibility in Robotic Ultrasound","authors":"Zhongliang Jiang;Xuesong Li;Xiangyu Chu;Angelos Karlas;Yuan Bi;Yingsheng Cheng;K. W. Samuel Au;Nassir Navab","doi":"10.1109/TIM.2024.3451569","DOIUrl":"https://doi.org/10.1109/TIM.2024.3451569","url":null,"abstract":"Ultrasound-guided percutaneous needle insertion is a standard procedure employed in both biopsy and ablation in clinical practices. However, due to the complex interaction between tissue and instrument, the needle may deviate from the in-plane view, resulting in a lack of close monitoring of the percutaneous needle. To address this challenge, we introduce a robot-assisted ultrasound (US) imaging system designed to seamlessly monitor the insertion process and autonomously restore the visibility of the inserted instrument when misalignment happens. To this end, the adversarial structure is presented to encourage the generation of segmentation masks that align consistently with the ground truth in high-order space. This study also systematically investigates the effects on segmentation performance by exploring various training loss functions and their combinations. When misalignment between the probe and the percutaneous needle is detected, the robot is triggered to perform transverse searching to optimize the positional and rotational adjustment to restore needle visibility. The experimental results on ex-vivo porcine samples demonstrate that the proposed method can precisely segment the percutaneous needle (with a tip error of \u0000<inline-formula> <tex-math>$0.37pm 0.29$ </tex-math></inline-formula>\u0000 mm and an angle error of \u0000<inline-formula> <tex-math>$1.19pm 0.29$ </tex-math></inline-formula>\u0000°). Furthermore, the needle appearance can be successfully restored under the repositioned probe pose in all 45 trials, with repositioning errors of \u0000<inline-formula> <tex-math>$1.51pm 0.95~text {mm}$ </tex-math></inline-formula>\u0000 and \u0000<inline-formula> <tex-math>$1.25pm 0.79$ </tex-math></inline-formula>\u0000°.","PeriodicalId":13341,"journal":{"name":"IEEE Transactions on Instrumentation and Measurement","volume":"73 ","pages":"1-11"},"PeriodicalIF":5.6,"publicationDate":"2024-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142587573","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

An Evidential-Enhanced Tri-Branch Consistency Learning Method for Semi-Supervised Medical Image Segmentation 一种用于半监督医学图像分割的证据增强型三分支一致性学习方法

IF 5.6 2区工程技术

IEEE Transactions on Instrumentation and Measurement Pub Date : 2024-10-30 DOI: 10.1109/TIM.2024.3488143

Zhenxi Zhang;Heng Zhou;Xiaoran Shi;Ran Ran;Chunna Tian;Feng Zhou

{"title":"An Evidential-Enhanced Tri-Branch Consistency Learning Method for Semi-Supervised Medical Image Segmentation","authors":"Zhenxi Zhang;Heng Zhou;Xiaoran Shi;Ran Ran;Chunna Tian;Feng Zhou","doi":"10.1109/TIM.2024.3488143","DOIUrl":"https://doi.org/10.1109/TIM.2024.3488143","url":null,"abstract":"The semi-supervised segmentation presents a promising approach for large-scale medical image analysis, effectively reducing annotation burdens while achieving comparable performance. This methodology holds substantial potential for streamlining the segmentation process and enhancing its feasibility within clinical settings for translational investigations. While cross-supervised training, based on distinct co-training subnetworks, has become a prevalent paradigm for this task, addressing critical issues, such as predication disagreement and label-noise suppression requires further attention and progress in cross-supervised training. In this article, we introduce an evidential tri-branch consistency learning framework (ETC-Net) for semi-supervised medical image segmentation. ETC-Net employs three branches: an evidential conservative branch (ECB), an evidential progressive branch (EPB), and an evidential fusion branch (EFB). The first two branches exhibit complementary characteristics, allowing them to address prediction diversity and enhance training stability. We also integrate uncertainty estimation from the evidential learning into cross-supervised training, mitigating the negative impact of erroneous supervision signals. In addition, the EFB capitalizes on the complementary attributes of the first two branches and leverages an evidence-based Dempster-Shafer fusion strategy, supervised by more reliable and accurate pseudolabels of unlabeled data. Extensive experiments conducted on LA, Pancreas-CT, and automated cardiac diagnosis challenge (ACDC) datasets demonstrate that ETC-Net surpasses other state-of-the-art methods for semi-supervised segmentation. The code will be made available in the near future at: \u0000<uri>https://github.com/Medsemiseg</uri>\u0000.","PeriodicalId":13341,"journal":{"name":"IEEE Transactions on Instrumentation and Measurement","volume":"73 ","pages":"1-13"},"PeriodicalIF":5.6,"publicationDate":"2024-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142636330","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Liquid Hydrogen Temperature Cryostage for Ice-Assisted Electron-Beam Lithography 用于冰辅助电子束光刻技术的液氢温度低温恒温器

IF 5.6 2区工程技术

IEEE Transactions on Instrumentation and Measurement Pub Date : 2024-10-30 DOI: 10.1109/TIM.2024.3485441

Rui Zheng;Limin Qi;Sizhuo Li;Zhihua Gan;Ding Zhao;Min Qiu

{"title":"Liquid Hydrogen Temperature Cryostage for Ice-Assisted Electron-Beam Lithography","authors":"Rui Zheng;Limin Qi;Sizhuo Li;Zhihua Gan;Ding Zhao;Min Qiu","doi":"10.1109/TIM.2024.3485441","DOIUrl":"https://doi.org/10.1109/TIM.2024.3485441","url":null,"abstract":"Liquid nitrogen (LN2) typically acts as a coolant in ice-assisted electron-beam lithography (iEBL) systems, so that the cryostage temperature cannot be lower than 77 K. To condense more gaseous precursors, such as carbon dioxide (CO2) in a high vacuum environment, a cooling system that does not rely on LN2 is necessary. In this article, we integrate a Gifford-McMahon (GM) cryocooler into the iEBL system, which can cool down samples from room temperature to 21 K in 2.25 h. The cold head and sample holder reach minimum temperatures of \u0000<inline-formula> <tex-math>$5.37~pm ~0.012$ </tex-math></inline-formula>\u0000 K and \u0000<inline-formula> <tex-math>$19.14~pm ~0.009$ </tex-math></inline-formula>\u0000 K, respectively, which lies within the temperature zone of liquid hydrogen. Furthermore, a gas-gap isolation system and discrete rotary valve are employed to minimize the vibration effects on the scanning electron microscope (SEM), with the vibration being limited to about 30 nm. Finally, CO2 has been investigated as the precursor, revealing itself as the second positive resist in iEBL, with a critical dose one order of magnitude less than water ice. Gold nanostructures are also successfully fabricated using such a resist. Our system achieves the lowest temperature in iEBL system to date, substantially expanding the range of precursors that can be used in iEBL.","PeriodicalId":13341,"journal":{"name":"IEEE Transactions on Instrumentation and Measurement","volume":"73 ","pages":"1-4"},"PeriodicalIF":5.6,"publicationDate":"2024-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142595876","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0