{"title":"Aspect ratios, sizes, and etch rates in photostructurable glass-ceramic","authors":"J. Stillman, J. Judy, H. Helvajian","doi":"10.1117/12.761895","DOIUrl":"https://doi.org/10.1117/12.761895","url":null,"abstract":"Photostructurable glass-ceramics (PSGCs), although not yet widely used, are well suited to many micro-optical and micromechanical applications. Their appeal stems from the combination of the physical properties of glass-ceramics with the excellent three-dimensional shaping control that can be achieved by laser-patterning a transparent photostructurable material. The PSGCs are both mechanically and thermally robust. Exposure with a focused 355-nm pulsed laser beam initiates a cascade of reactions that ends in crystallization of a different phase of the glass-ceramic. The crystal-rich phase etches chemically much faster than the original crystal-free phase. In this experiment, we examined the dependence of the chemical etch rate on the aspect ratios and sizes of structures made from Foturan, a commercially available PSGC. We fabricated several types of test structures in 1-mm-thick Foturan samples. We tested the initial and long-term etch behavior of Foturan etched in 5% HF as a function of the size of the etched structure. An aspect ratio of 100 for a 10-μm-wide trench etched through a 1000-μm-thick sample was achieved.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"154 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122940389","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Hybrid polymer fabrication process for electro-enzymatic glucose sensor","authors":"J. Patel, B. Kaminska, B. Gray, B. Gates","doi":"10.1117/12.762111","DOIUrl":"https://doi.org/10.1117/12.762111","url":null,"abstract":"We present a novel self-aligned and hybrid polymer fabrication process for an electro-enzymatic glucose sensor. The self-aligned fabrication process is performed using polydimethylsiloxane (PDMS) as a process substrate material, SU-8 as a sensor structural material, and gold as an electrode material. PDMS has many advantages as a process substrate over conventional substrates such as bare silicon or glass. During the fabrication process, SU-8 has good adhesion to the PDMS. However, after completion of all fabrication steps, the SU-8 based sensors can be easily peeled-off from the PDMS. The PDMS is prepared on a glass handle wafer, and is reusable for many process cycles. Such an SU-8 release technique from a PDMS substrate has never been proposed before. The novel process is employed to realize a glucose sensor with active and reference gold electrodes that are sandwiched between two SU-8 layers with contact pad openings and the active area opening to the top SU-8 layer. The enzyme glucose oxidase is immobilized within the confined active area opening to provide an active electrode sensing surface. After successful fabrication using the hybrid process, the overall thickness of the sensors is measured between 166.15 μm and 210.15 μm. The sensor area and the electrode area are 2mm x 3mm and 2mm x 2mm respectively. The resulting glucose sensors are mechanically flexible. A linear response is observed for the glucose sensors, typically between 50mg/dl and 600mg/dl glucose concentrations.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115209760","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Schaulin, J. Knobbe, H. Neumann, K. Seidl, L. Kleinmann, U. Schelinski, M. Scholles, Hans-Jörg Schönherr, H. Lakner
{"title":"MEMS-based optoelectronic system for distance measurement applicable for panorama cameras","authors":"M. Schaulin, J. Knobbe, H. Neumann, K. Seidl, L. Kleinmann, U. Schelinski, M. Scholles, Hans-Jörg Schönherr, H. Lakner","doi":"10.1117/12.763166","DOIUrl":"https://doi.org/10.1117/12.763166","url":null,"abstract":"Photogrammetric imaging and measurement techniques are widely used for capturing three-dimensional scenes in sciences and arts. Traditional approaches performing extensive calculations on multiple images are more and more replaced by higher integrated and faster operating measurement devices. This paper presents a MEMS-based system for distance measurement that can be integrated into a commercially available panorama camera and will add three-dimensional measuring capabilities. This combination is very suitable to displace the current procedural manner using different instruments to acquire three-dimensional data on the one hand and texture on the other hand. The data acquisition is simplified and extensive calibration and data transformations is no longer needed. Thereby the accurate allocation between texture and distance data is firmed by design. This work outlines the optical concept to couple both measuring systems into one optical path. While texture is captured line wise, the distance is acquired sequentially. Integration of both functionalities into one housing and one optical system design requires miniaturized components for deflection of the measurement beam. One solution is to use a resonant MEMS scanning mirror. The paper describes the resulting optical setup in detail. The integrated construction principle induces special requirements for the LIDAR distance measuring method used here. In order to ensure eye safety, the measuring light beam is limited to low power signals. The contribution also will present an approach for processing low level signals and performing high measuring rates.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114185935","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Joe Brown, M. Lutz, A. Partridge, P. Gupta, E. Radza
{"title":"MEMS as low-cost high-volume semiconductor solutions: it's all in the packaging and assembly","authors":"Joe Brown, M. Lutz, A. Partridge, P. Gupta, E. Radza","doi":"10.1117/12.778250","DOIUrl":"https://doi.org/10.1117/12.778250","url":null,"abstract":"Micro-electromechanical (MEMS) oscillators are now in production and shipping in quantity. Early development of micro mechanical devices provided the understanding that metal beams could be fabricated and they would resonate as a time reference. The issues of performance and price have prevented silicon entry into the quartz dominated market until recent developments in semiconductor processing and assembly. Today MEMS oscillators are the world's smallest programmable precision oscillators and are displacing quartz technology in the +/- 50 ppm accuracy spec. New oscillators extend the technology with spread spectrum, voltage control, and improved jitter performance. New ultra-thin packaging, made possible by the small encapsulated MEMS resonators, provides the word's thinnest precision oscillators.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114187915","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Reliability testing and analysis of safing and arming devices for army fuzes","authors":"J. Zunino, D. Skelton, C. Robinson","doi":"10.1117/12.765221","DOIUrl":"https://doi.org/10.1117/12.765221","url":null,"abstract":"To address the lack of micro-electro-mechanical systems (MEMS) reliability data as well as a standardized methodology for assessing reliability, the Metallic Materials Technology Branch at Picatinny Arsenal has initiated a MEMS Reliability Assessment Program. This lack of data has been identified as a barrier to the utilization the MEMS in DOD systems. Of particular concern are the impacts of long-term storage and environmental exposure on the reliability of devices. Specific objectives of the Metallic Materials Technology Branch (MMTB) program include: • Identify MEMS devices to be utilized in weapon systems. • Determine the relevant categories of MEMS materials, technologies and designs in these applications • Assess the operational environments in which the military MEMS device may be utilized. • Analyze the compatibility of MEMS devices with energetic and other hazardous materials. • Identify physics of failure, failure mechanisms and failure rates. • Develop accelerated test protocols for assessing the reliability of MEMS according to the categories. • Develop of reliability models for these devices. • Conduct testing and modeling on representative devices of interest to Army and DoD. • Develop of a methodology and capability for conducting independent assessments of reliability that cannot be obtained from private industry. In support of this effort, some testing has been performed on prototype mechanical Safety and Arming (S&A) devices for the 25-mm XM25 Air Burst Weapon. The objective is to test the S&A as a representative device for the identification of potential failure modes and effects for devices of the same class. Information derived from this testing will be used to develop standardized test protocols, formulate reliability models and establish design criteria and to identify critical parameters in support of the S&A development effort. To date, Environmental Stress Screening (ESS) tests have been performed on samples of the device. Along with the ESS testing, a failure modes and effects analysis has been developed and reliability modeling is under way.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130753113","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
C. Brenan, Tom B. Morrison, Douglas Roberts, J. Hurley
{"title":"A nanofluidic system for massively parallel PCR","authors":"C. Brenan, Tom B. Morrison, Douglas Roberts, J. Hurley","doi":"10.1117/12.772243","DOIUrl":"https://doi.org/10.1117/12.772243","url":null,"abstract":"Massively parallel nanofluidic systems are lab-on-a-chip devices where solution phase biochemical and biological analyses are implemented in high density arrays of nanoliter holes micro-machined in a thin platen. Polymer coatings make the interior surfaces of the holes hydrophilic and the exterior surface of the platen hydrophobic for precise and accurate self-metered loading of liquids into each hole without cross-contamination. We have created a \"nanoplate\" based on this concept, equivalent in performance to standard microtiter plates, having 3072 thirty-three nanoliter holes in a stainless steel platen the dimensions of a microscope slide. We report on the performance of this device for PCR-based single nucleotide polymorphism (SNP) genotyping or quantitative measurement of gene expression by real-time PCR in applications ranging from plant and animal diagnostics, agricultural genetics and human disease research.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"6886 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131272515","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
K. Morzinski, D. Gavel, A. Norton, D. Dillon, M. Reinig
{"title":"Characterizing MEMS deformable mirrors for open-loop operation: high-resolution measurements of thin-plate behavior","authors":"K. Morzinski, D. Gavel, A. Norton, D. Dillon, M. Reinig","doi":"10.1117/12.773555","DOIUrl":"https://doi.org/10.1117/12.773555","url":null,"abstract":"New concepts for astronomical adaptive optics are enabled by use of micro-electrical mechanical systems (MEMS) deformable mirrors (DMs). Unlike traditional DMs now used in astronomical AO systems, MEMS devices are smaller, less expensive, and exhibit extraordinarily repeatable actuation. Consequently, MEMS technology allows for novel configurations, such as multi-object AO, that require open-loop control of multiple DMs. At the UCO/Lick Observatory Laboratory for Adaptive Optics we are pursuing this concept in part by creating a phaseto- voltage model for the MEMS DM. We model the surface deflection approximately by the thin-plate equation. Using this modeling technique, we have achieved open-loop control accuracy in the laboratory to ~13-30 nm surface rms in response to ~1-3 μm peak-to-valley commands, respectively. Next, high-resolution measurements of the displacement between actuator posts are compared to the homogeneous solution of the thin-plate equation, to verify the model's validity. These measurements show that the thin-plate equation seems a plausible approach to modeling deformations of the top surface down to lateral scales of a tenth actuator spacing. Finally, in order to determine the physical lower limit to which our model can be expected to be accurate, we conducted a set of hysteresis experiments with a MEMS. We detect only a sub-nanometer amount of hysteresis of 0.6±0.3 nm surface over a 160-volt loop. This complements our previous stability and position repeatability measurements, showing that MEMS DMs actuate to sub-nanometer precision and are hence controllable in open-loop.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"62 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121681180","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Experimental study of electrical breakdown in MEMS devices with micrometer scale gaps","authors":"P. Carazzetti, Philippe Renaud, Herbert Shea","doi":"10.1117/12.763195","DOIUrl":"https://doi.org/10.1117/12.763195","url":null,"abstract":"We present an experimental study of the DC breakdown voltage of MEMS interdigitated aluminum electrodes with gaps ranging from 10 to 500 μm. Unlike most research on MEMS electrodes, that was done at atmospheric pressure, our work has focused on the effect of gas pressure and gas type on the breakdown voltage. A main goal was to identify geometries that favor the creation of low-voltage discharges. Helium, argon and nitrogen pressure was varied from 102 to 8.104 Pa (1 to 800 mbar). The breakdown voltage was plotted as a function of the Paschen reduced variable Pred = p·g. For higher values of pressure, p or gap, d (high Pred), classical Paschen scaling was observed. For lower values of Pred however, significant deviations were seen, particularly at low pressures. We attribute these differences not to field emission, but to the scale of the mean free path (which explains the higher than predicted voltages), and to the many length scales effectively present in our planar geometry (on-chip and even off-chip, that lead to the superposition of several Paschen curves). Guidelines are proposed for low-pressure operation of MEMS to avoid or to encourage breakdown.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"22 11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114164675","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Reduced order thermal modeling of a one-dimensional electrothermally actuated micromirror device","authors":"S. Pal, K. Jia, S. Maley, Huikai Xie","doi":"10.1117/12.769590","DOIUrl":"https://doi.org/10.1117/12.769590","url":null,"abstract":"A reduced order thermal model of a one-dimensional (1D) electrothermally actuated micromirror device is reported. Thermal bimorphs with integrated Pt resistors are used for generating the angular rotation. Neglecting the temperature variation perpendicular to the length of the bimorphs, a 2D finite element thermal model with 4647 nodes is built. The accuracy of the model is verified by comparing the simulation results with thermal imaging data. Using a Krylov subspace based algorithm, a reduced order model is extracted from the finite element model. Results obtained from a reduced model with order ≥ 5 agree well with finite element results. Hence, a reduced order thermal model that saves computation time and resources without compromising the computation accuracy has been demonstrated.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116078074","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Yun, Jonghyeong Song, S. An, I. Yeo, Yoon-sun Choi, Yeong-Gyu Lee, H. Park, K. Han, Haengseok Yang, V. Yurlov, I. Shyshkin, A. Lapchuk, H. Kim, Jaewook Jang, J. Kyoung, Jeong-Suong Yang, S. Yoon, Changsu Park, Jongpil Cheong, Y. Hwang, K. Woo, S. Ryu, Seungwoo Lee, C. Koh, Young-Jong Baek, Dae-Yun Bae, Hyunkee Lee, Jaehoon Lee, Y. Ryu, H. Hwang, C. Yang, O. Lim, D. Park, S. An, J. Bae, S. Cho, B. Go, Seok-Kee Hong, H. Jung, Sangjin Kim, K. Lee, Jihyun Park, Juhwan Yang, G. Byun, S. Byun, Youngji Cho, Chun-Dong Kim, Jooho Kim, Sunki Kim, S. Lee, Wha-Sup Lee, K. Oh, Sun-Wi Oh, W. Shin, ByungKi Song, E. Bourim
{"title":"A novel diffractive micro-optical modulator for mobile display applications","authors":"S. Yun, Jonghyeong Song, S. An, I. Yeo, Yoon-sun Choi, Yeong-Gyu Lee, H. Park, K. Han, Haengseok Yang, V. Yurlov, I. Shyshkin, A. Lapchuk, H. Kim, Jaewook Jang, J. Kyoung, Jeong-Suong Yang, S. Yoon, Changsu Park, Jongpil Cheong, Y. Hwang, K. Woo, S. Ryu, Seungwoo Lee, C. Koh, Young-Jong Baek, Dae-Yun Bae, Hyunkee Lee, Jaehoon Lee, Y. Ryu, H. Hwang, C. Yang, O. Lim, D. Park, S. An, J. Bae, S. Cho, B. Go, Seok-Kee Hong, H. Jung, Sangjin Kim, K. Lee, Jihyun Park, Juhwan Yang, G. Byun, S. Byun, Youngji Cho, Chun-Dong Kim, Jooho Kim, Sunki Kim, S. Lee, Wha-Sup Lee, K. Oh, Sun-Wi Oh, W. Shin, ByungKi Song, E. Bourim","doi":"10.1117/12.762568","DOIUrl":"https://doi.org/10.1117/12.762568","url":null,"abstract":"A diffractive optical modulator has been fabricated based on a micromachining process. Novel properties of its fast response time and dynamics were fully understood and demonstrated for the strong potentials in embedded mobile laser display. Bridged thin film piezo-actuators with so called open mirror diffraction structure has been designed. Optical level package also was achieved to successfully prove its display application qualities. Display circuits and driving logic were developed to finally confirm the single-panel laser display at a 240Hz VGA (640×480). With its efficiency of more than 75% and 13cc volume optical engine with the MEMS-based VGA resolution SOM showed 7 lm brightness at a 1.5W electrical power consumption. Detailed design principle, fabrication, packaging and performances of the invented SOM are described.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115451174","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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