SPIE MOEMS-MEMS最新文献

Analysis of surface-tension-driven blood flow using spectral domain optical coherence tomography 使用光谱域光学相干断层扫描分析表面张力驱动的血流

SPIE MOEMS-MEMS Pub Date : 2008-03-01 DOI: 10.1117/12.764709

Yeh-Chan Ahn, S. Cito, I. Katakis, J. Pallarés, Zhongping Chen

引用次数: 1

Latex immunoagglutination assay for bovine viral diarrhea virus utilizing forward light scattering in a microfluidic device 利用前向光散射的微流控装置对牛病毒性腹泻病毒进行乳胶免疫凝集试验

SPIE MOEMS-MEMS Pub Date : 2008-03-01 DOI: 10.1117/12.761341

Brian C. Heinze, J. Song, Jin-Hee Han, Jeong‐Yeol Yoon

引用次数: 2

Nonlinear plate equation analysis for the design of large stroke deformable mirror 大行程变形镜设计的非线性板方程分析

SPIE MOEMS-MEMS Pub Date : 2008-02-27 DOI: 10.1117/12.766873

Oscar A. Azucena, B. Fernández, J. Kubby

引用次数: 4

A novel fabrication technology for anti-reflex wafer-level vacuum packaged microscanning mirrors 一种新型的防反射晶圆级真空封装微扫描镜制造技术

SPIE MOEMS-MEMS Pub Date : 2008-02-26 DOI: 10.1117/12.760941

M. Oldsen, U. Hofmann, H. Quenzer, J. Janes, C. Stolte, K. Gruber, M. Ites, F. Sörensen, B. Wagner

{"title":"A novel fabrication technology for anti-reflex wafer-level vacuum packaged microscanning mirrors","authors":"M. Oldsen, U. Hofmann, H. Quenzer, J. Janes, C. Stolte, K. Gruber, M. Ites, F. Sörensen, B. Wagner","doi":"10.1117/12.760941","DOIUrl":"https://doi.org/10.1117/12.760941","url":null,"abstract":"The use of microscanning mirrors in mobile laser projection systems demands for robust fabrication technologies. Dust, change in humidity and temperature can only be tolerated if the fragile devices are enclosed in a hermetic package. A novel fabrication process is presented based on two 30 micron thick epitaxially deposited silicon layers and a buried interconnection layer. This technology allows the fabrication of stacked combdrives for electrostatic mirror actuation and lateral feedthroughs needed for hermetic encapsulation with standard wafer bonding processes. High display resolution requires large scan angles of the mirror plate. Therefore, a fabrication technology for structured glass wafers is presented to provide deep cavities for large mirror plate movements. A solution for effective laser spot reflex suppression is presented based on a static tilt of the mirror plate in relation to the glass cover wafer during eutectic bonding. By doing so, the reflex generated at the glass surfaces is shifted out of the image area. The cavity pressure of packaged devices has been measured showing the necessity of a getter layer in order to provide cavity pressures below 1 mbar. The performance of a packaged device with integrated getter layer has been evaluated. A driving amplitude of only 6 V is needed to achieve scan angles of above 50 deg. White light interferometric measurements showed excellent planarity of the mirror plate with a radius of curvature of about 18 m.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"296 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114056490","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

Electrodeposition of Au for self-assembling 3D microstructures 电沉积用于自组装三维微结构的Au

SPIE MOEMS-MEMS Pub Date : 2008-02-26 DOI: 10.1117/12.763341

M. Kiziroglou, A. Goswami Mukherjee, R. Moseley, P. Taylor, S. Pranonsatit, A. Holmes, E. Yeatman

{"title":"Electrodeposition of Au for self-assembling 3D microstructures","authors":"M. Kiziroglou, A. Goswami Mukherjee, R. Moseley, P. Taylor, S. Pranonsatit, A. Holmes, E. Yeatman","doi":"10.1117/12.763341","DOIUrl":"https://doi.org/10.1117/12.763341","url":null,"abstract":"Rotation of structures fabricated by planar processing into out-of-plane orientations can be used to greatly increase the 3-dimensionality of microstructures. Previously this has been achieved by a self-assembly process based on surface tension in meltable hinges. An important application is in fabricating vertical inductors on silicon, to reduce the substrate coupling and thus increase quality factor and self-resonance frequency. Previous processes have used copper tracks, and Pb-Sn hinges. However, the use of Cu limits potential applications because of oxidation, since the final structure is not embedded. Moreover, a substitute hinge material is also required, as a result of legislative restrictions on Pb use. In this paper, Au is used as an alternative to Cu for the fabrication of self-assembled 3D inductors. A process has been developed to overcome photoresist deterioration problems due to the alkaline nature of Au electro-deposition solutions. Furthermore, pure Sn is used instead of Pb-Sn as the hinge material. A Ni metal layer is introduced between the Au coils and the Sn hinge to prevent inter-diffusion and formation of eutectic Au-Sn compounds. Finally a gold capping technique is proposed to protect the Sn hinge from oxidation during hinge reflow. The fabrication techniques developed here are compatible with post-processing on active CMOS circuits, and can be adopted for other MEMS applications.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131487682","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching 在单步湿法各向异性蚀刻中具有圆形凹角和锋利凸角的微结构

SPIE MOEMS-MEMS Pub Date : 2008-02-26 DOI: 10.1117/12.765475

P. Pal, Kazuo Sato, M. Gosálvez, M. Shikida

引用次数: 1

Compact modeling of inertial and rarefaction effects on quality factor of MEMS torsional structures in continuum to molecular flows under low operating frequencies 低工作频率下分子流对连续介质中MEMS扭转结构品质因子的惯性和稀薄影响的紧凑建模

SPIE MOEMS-MEMS Pub Date : 2008-02-22 DOI: 10.1117/12.769137

R. Pratap, A. Pandey

引用次数: 0

Wafer-level vacuum packaged resonant micro-scanning mirrors for compact laser projection displays 用于紧凑型激光投影显示器的晶圆级真空封装谐振微扫描镜

SPIE MOEMS-MEMS Pub Date : 2008-02-21 DOI: 10.1117/12.763433

U. Hofmann, M. Oldsen, H. Quenzer, J. Janes, M. Heller, M. Weiss, G. Fakas, L. Ratzmann, E. Marchetti, F. D'Ascoli, M. Melani, L. Bacciarelli, E. Volpi, F. Battini, L. Mostardini, F. Sechi, M. De Marinis, B. Wagner

{"title":"Wafer-level vacuum packaged resonant micro-scanning mirrors for compact laser projection displays","authors":"U. Hofmann, M. Oldsen, H. Quenzer, J. Janes, M. Heller, M. Weiss, G. Fakas, L. Ratzmann, E. Marchetti, F. D'Ascoli, M. Melani, L. Bacciarelli, E. Volpi, F. Battini, L. Mostardini, F. Sechi, M. De Marinis, B. Wagner","doi":"10.1117/12.763433","DOIUrl":"https://doi.org/10.1117/12.763433","url":null,"abstract":"Scanning laser projection using resonant actuated MEMS scanning mirrors is expected to overcome the current limitation of small display size of mobile devices like cell phones, digital cameras and PDAs. Recent progress in the development of compact modulated RGB laser sources enables to set up very small laser projection systems that become attractive not only for consumer products but also for automotive applications like head-up and dash-board displays. Within the last years continuous progress was made in increasing MEMS scanner performance. However, only little is reported on how mass-produceability of these devices and stable functionality even under harsh environmental conditions can be guaranteed. Automotive application requires stable MEMS scanner operation over a wide temperature range from -40° to +85°Celsius. Therefore, hermetic packaging of electrostatically actuated MEMS scanning mirrors becomes essential to protect the sensitive device against particle contamination and condensing moisture. This paper reports on design, fabrication and test of a resonant actuated two-dimensional micro scanning mirror that is hermetically sealed on wafer level. With resonant frequencies of 30kHz and 1kHz, an achievable Theta-D-product of 13mm.deg and low dynamic deformation <20nm RMS it targets Lissajous projection with SVGA-resolution. Inevitable reflexes at the vacuum package surface can be seperated from the projection field by permanent inclination of the micromirror.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124509780","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 48

Controlled assembly of gold nanoparticles using De Novo designed polypeptide scaffolds 利用De Novo设计的多肽支架控制金纳米颗粒的组装

SPIE MOEMS-MEMS Pub Date : 2008-02-20 DOI: 10.1117/12.775806

D. Aili, H. Han, K. Enander, L. Baltzer, B. Liedberg

引用次数: 1

A mechanistic model for adsorption-induced change in resonance response of submicron cantilevers 亚微米悬臂梁吸附引起共振响应变化的机理模型

SPIE MOEMS-MEMS Pub Date : 2008-02-20 DOI: 10.1117/12.760913

H. Sadeghian, J. Goosen, A. Bossche, F. van Keulen

{"title":"A mechanistic model for adsorption-induced change in resonance response of submicron cantilevers","authors":"H. Sadeghian, J. Goosen, A. Bossche, F. van Keulen","doi":"10.1117/12.760913","DOIUrl":"https://doi.org/10.1117/12.760913","url":null,"abstract":"Submicron cantilever structures have been demonstrated to be extremely versatile sensors and have potential applications in physics, chemistry and biology. The basic principle in submicron cantilever sensors is the measurement of the resonance frequency shift due to the added mass of the molecules bound to the cantilever surface. This paper presents a theoretical model to predict the resonance frequency shift due to molecular adsorption on submicron cantilevers. The influence of the mechanical properties of the adsorbed molecules bound to the upper and lower surface on the resonance frequency has been studied. For various materials, the ratio between the thicknesses of the adsorbed layer and the cantilever where either stiffness or added mass is dominant will be determined. The critical ratio (which contribution of effect cancel each others) between the thickness of the adsorbed layer and the cantilever and ratio between stiffness and density of adsorbed layer and cantilever have been determined. The calculations show the added mass and stiffness how contribute to the resonant behavior. This model gives insight into the decoupling of both opposite effects and is expected to be useful for the optimal design of resonators with high sensitivity to molecular adsorption based on either stiffness or mass effects.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114602314","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4