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Spiral zone plate imaging for soft x-ray microscopy 软x射线显微镜的螺旋带板成像
SPIE MOEMS-MEMS Pub Date : 2008-02-19 DOI: 10.1117/12.769892
A. Sakdinawat, Yanwei Liu
{"title":"Spiral zone plate imaging for soft x-ray microscopy","authors":"A. Sakdinawat, Yanwei Liu","doi":"10.1117/12.769892","DOIUrl":"https://doi.org/10.1117/12.769892","url":null,"abstract":"Phase sensitive x-ray microscopy techniques are important in the study of samples that exhibit phase contrast. One way to detect these phase effects is to optically implement the radial Hilbert transform by using spiral zone plates (SZPs), resulting in the imaging of the amplitude and phase gradient in a sample. This is similar to differential interference contrast imaging in light microscopy. Soft x-ray microscopy using a SZP as a single element objective lens was demonstrated through the imaging of a 1 μm circular aperture at a wavelength of 2.73 nm. A regular zone plate, a charge 1 SZP, and a charge 2 SZP were fabricated on a silicon nitride membrane using electron beam lithography. The negative e-beam resist hydrogen silsesquioxane (HSQ) was used for patterning, and the zone plates were electroplated with nickel. These zone plates were then used as the imaging optic in a soft x-ray microscopy setup.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"30 3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131827464","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of nondestructive testing/evaluation methodology for MEMS MEMS无损检测/评估方法的开发
SPIE MOEMS-MEMS Pub Date : 2008-02-18 DOI: 10.1117/12.759659
J. Zunino, D. Skelton, R. Marinis, A. Klempner, P. Hefti, R. Pryputniewicz
{"title":"Development of nondestructive testing/evaluation methodology for MEMS","authors":"J. Zunino, D. Skelton, R. Marinis, A. Klempner, P. Hefti, R. Pryputniewicz","doi":"10.1117/12.759659","DOIUrl":"https://doi.org/10.1117/12.759659","url":null,"abstract":"Development of MEMS constitutes one of the most challenging tasks in today's micromechanics. In addition to design, analysis, and fabrication capabilities, this task also requires advanced test methodologies for determination of functional characteristics of MEMS to enable refinement and optimization of their designs as well as for demonstration of their reliability. Until recently, this characterization was hindered by lack of a readily available methodology. However, using recent advances in photonics, electronics, and computer technology, it was possible to develop a NonDestructive Testing (NDT) methodology suitable for evaluation of MEMS. In this paper, an optoelectronic methodology for NDT of MEMS is described and its application is illustrated with representative examples; this description represents work in progress and the results are preliminary. This methodology provides quantitative full-field-of-view measurements in near real-time with high spatial resolution and nanometer accuracy. By quantitatively characterizing performance of MEMS, under different vibration, thermal, and other operating conditions, specific suggestions for their improvements can be made. Then, using the methodology, we can verify the effects of these improvements. In this way, we can develop better understanding of functional characteristics of MEMS, which will ensure that they are operated at optimum performance, are durable, and are reliable.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122089405","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Synthesis of approximate zonal controllers for MEMS DMs MEMS DMs近似区域控制器的合成
SPIE MOEMS-MEMS Pub Date : 2008-02-18 DOI: 10.1117/12.760838
A. Guesalaga, D. Guzmán, Richard H. Myers, R. Sharples, T. Morris, C. Saunter, A. Basden
{"title":"Synthesis of approximate zonal controllers for MEMS DMs","authors":"A. Guesalaga, D. Guzmán, Richard H. Myers, R. Sharples, T. Morris, C. Saunter, A. Basden","doi":"10.1117/12.760838","DOIUrl":"https://doi.org/10.1117/12.760838","url":null,"abstract":"We present a novel technique for the design of DM controllers in high spatial resolution adaptive optics systems, operating in open-loop. It consists of a Shack-Hartmann (SH) figure sensor and multiple overlapping MIMO controllers based on the H∞ synthesis method. The controller synthesis can be carried out periodically using a linearized representation of a continuously adjusted model that accounts for varying physical or ambient conditions and incorporates the spatial geometry of the SH. The figure sensor uses a bright reference source and a fast CMOS detector to sample the DM surface sequentially with an optical arrangement that does not interfere with the main corrected beam. Taking full advantage of such robust techniques, the controller can successfully handle the dynamics and non-linearity of the DM, allowing one to decouple, from the main AO control loop standpoint, the turbulence estimation errors from those originating in the DM servo-loop. It can also implement noise and vibration rejection without compromising the loop stability, pushing the control bandwidth to the physical limits imposed by hardware and software components. By splitting the control function into several overlapping controllers, implementation complexity is reduced and continuous updating of the controller can be easily achieved. Simulations show its ability to successfully control the DM shape, in spite of partial and non-simultaneous sampling of the SH figure sensor due to detector speed limitations.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114122398","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Evaluation of passive planar microfluidic devices for mixing of particle flows 用于颗粒流混合的被动平面微流控装置的评价
SPIE MOEMS-MEMS Pub Date : 2008-02-13 DOI: 10.1117/12.767347
A. Bhagat, K. Wurm, I. Papautsky
{"title":"Evaluation of passive planar microfluidic devices for mixing of particle flows","authors":"A. Bhagat, K. Wurm, I. Papautsky","doi":"10.1117/12.767347","DOIUrl":"https://doi.org/10.1117/12.767347","url":null,"abstract":"In this paper, the design, modeling, fabrication and characterization of a planar passive microfluidic mixer capable of mixing particulate laden flows at low Reynolds numbers (Re) is reported. Particle-based flow modeling was performed using CFD-ACE+ software to simulate micromixer designs for efficient particle dispersion across microchannel cross-section. The micromixer design developed herein incorporates rectangular shaped obstructions within the microchannel to propel both the particles within the flow and the flow itself into the other half of the channel, thereby achieving mixing. A simple technique to analyze and quantify particle mixing is also proposed. The developed particle micromixer has a simple planar structure, thereby resulting in easy realization and integration with on-chip microfluidic systems, such as micro total analysis systems or lab-on-a-chip.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"72 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114715601","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Portable CE system with contactless conductivity detection in an injection molded polymer chip for on-site food analysis 便携式CE系统，在注塑成型的聚合物芯片中进行非接触式电导率检测，用于现场食品分析
SPIE MOEMS-MEMS Pub Date : 2008-02-13 DOI: 10.1117/12.773579
H. Becker, H. Muehlberger, W. Hoffmann, Thomas Clemens, R. Klemm, C. Gärtner
{"title":"Portable CE system with contactless conductivity detection in an injection molded polymer chip for on-site food analysis","authors":"H. Becker, H. Muehlberger, W. Hoffmann, Thomas Clemens, R. Klemm, C. Gärtner","doi":"10.1117/12.773579","DOIUrl":"https://doi.org/10.1117/12.773579","url":null,"abstract":"We present a compact portable chip-based capillary electrophoresis system that employs capacitively coupled contactless conductivity detection (C4D) operating at 4 MHz as an alternative detection method compared to the commonly used optical detection employing laser-induced fluorescence. The disposable chip for this system is fabricated out of PMMA using injection molding; the electrodes are screen-printed or thin-film electrodes. The system allows the measurement of small ions like Li, Na, K typically present in foodstuff like milk and mineral water as well as acids in wine.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116481087","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
Spiral microfluidic nanoparticle separators 螺旋微流控纳米颗粒分离器
SPIE MOEMS-MEMS Pub Date : 2008-02-13 DOI: 10.1117/12.767350
A. Bhagat, S. Kuntaegowdanahalli, D. Dionysiou, I. Papautsky
{"title":"Spiral microfluidic nanoparticle separators","authors":"A. Bhagat, S. Kuntaegowdanahalli, D. Dionysiou, I. Papautsky","doi":"10.1117/12.767350","DOIUrl":"https://doi.org/10.1117/12.767350","url":null,"abstract":"Nanoparticles have potential applications in many areas such as consumer products, health care, electronics, energy and other industries. As the use of nanoparticles in manufacturing increases, we anticipate a growing need to detect and measure particles of nanometer scale dimensions in fluids to control emissions of possible toxic nanoparticles. At present most particle separation techniques are based on membrane assisted filtering schemes. Unfortunately their efficiency is limited by the membrane pore size, making them inefficient for separating a wide range of sizes. In this paper, we propose a passive spiral microfluidic geometry for momentum-based particle separations. The proposed design is versatile and is capable of separating particulate mixtures over a wide dynamic range and we expect it will enable a variety of environmental, medical, or manufacturing applications that involve rapid separation of nanoparticles in real-world samples with a wide range of particle components.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126289240","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Direct electrical detection of target cells on a microfluidic biochip 微流控生物芯片上靶细胞的直接电检测
SPIE MOEMS-MEMS Pub Date : 2008-02-12 DOI: 10.1117/12.765611
M. Javanmard, A. Talasaz, M. Nemat‐Gorgani, F. Pease, M. Ronaghi, Ronald W. Davis
{"title":"Direct electrical detection of target cells on a microfluidic biochip","authors":"M. Javanmard, A. Talasaz, M. Nemat‐Gorgani, F. Pease, M. Ronaghi, Ronald W. Davis","doi":"10.1117/12.765611","DOIUrl":"https://doi.org/10.1117/12.765611","url":null,"abstract":"Pathogenic bacterial cell detection is currently performed using techniques such as culture enrichment and various plating methods, which are expensive and can take up to several days. In this study, we describe the design, fabrication, and testing of a rapid and inexpensive sensor for detection of target cells electrically in real-time. The sensor operates with the use of microelectrodes integrated in a micro-channel. As a proof of principle, we have successfully demonstrated real-time detection of target yeast cells with a concentration of 107 cells/ml. We have also demonstrated the selectivity of our sensors in responding to target cells while remaining irresponsive to non-target cells. We also perform theoretical modeling in order to determine the ultimate detection limit of the sensor. Based on our modeling results, proper optimization of the sensor can yield detection limits approaching the single cell level.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132019762","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Microchips fabricated by femtosecond laser micromachining in glass for observation of aquatic microorganisms 飞秒激光微加工玻璃微芯片用于观察水生微生物
SPIE MOEMS-MEMS Pub Date : 2008-02-12 DOI: 10.1117/12.762966
Y. Hanada, K. Sugioka, H. Kawano, I. Ishikawa, A. Miyawaki, K. Midorikawa
{"title":"Microchips fabricated by femtosecond laser micromachining in glass for observation of aquatic microorganisms","authors":"Y. Hanada, K. Sugioka, H. Kawano, I. Ishikawa, A. Miyawaki, K. Midorikawa","doi":"10.1117/12.762966","DOIUrl":"https://doi.org/10.1117/12.762966","url":null,"abstract":"We demonstrate the fabrication of three-dimensional (3D) hollow microstructures embedded in photostructurable glass by a nonlinear multiphoton absorption process using a femtosecond (fs) laser. Fs laser direct writing followed by annealing and successive wet etching in dilute hydrofluoric (HF) acid solution resulted in the rapid manufacturing of microchips with 3-D hollow microstructures for the dynamic observation of living microorganisms in fresh water. The embedded microchannel structure enables us to analyze the continuous motion of Euglena gracilis and Dinoflagellate. Such microchips, referred to as nano-aquariums realize the efficient and highly functional observation of microorganisms.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123557201","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Developments of the in-check platform for diagnostic applications 诊断应用的检内平台的开发
SPIE MOEMS-MEMS Pub Date : 2008-02-12 DOI: 10.1117/12.778331
M. Palmieri, E. Alessi, S. Conoci, M. Marchi, Gaetano Panvini
{"title":"Developments of the in-check platform for diagnostic applications","authors":"M. Palmieri, E. Alessi, S. Conoci, M. Marchi, Gaetano Panvini","doi":"10.1117/12.778331","DOIUrl":"https://doi.org/10.1117/12.778331","url":null,"abstract":"In-Check is STMicroelectronics proprietary platform for molecular diagnostics. In-Check lays its foundations on the monolithic integration of microelectronics and micromachining technology MEMS, with microfluidic and optical features, bio-chemical surface functionalization and molecular biology. It comprises a core lab-on-chip device, control and reading instrumentation, a complete suite of software modules, and application protocols. Leveraging on such capabilities, In-Check enables fast, highly sensitive and specific, multi-analytical capability of nucleic acid analysis. The platform provides a unique combination of nucleic acid amplification, by polymerase-chain-reaction and target identification and typing by DNA microarray. These integrated biological functionalities together with top quality standard and process control are key features for a platform to be accepted by the highly demanding modern medical diagnostic. This paper describes recent developments of In-Check and some core biological characterizations.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"83 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122699525","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Nonplanar surface structures of inorganic materials fabricated by femtosecond laser lithography 飞秒激光光刻技术制备无机材料的非平面表面结构
SPIE MOEMS-MEMS Pub Date : 2008-02-12 DOI: 10.1117/12.762542
H. Nishiyama, M. Mizoshiri, J. Nishii, Y. Hirata
{"title":"Nonplanar surface structures of inorganic materials fabricated by femtosecond laser lithography","authors":"H. Nishiyama, M. Mizoshiri, J. Nishii, Y. Hirata","doi":"10.1117/12.762542","DOIUrl":"https://doi.org/10.1117/12.762542","url":null,"abstract":"Silica-based nonplanar surface structures were fabricated by use of femtosecond laser lithography-assisted micromachining (FLAM), which is a combined process of femtosecond laser lithography and plasma etching. Diffractive optical elements (DOEs) are widely used for photonic applications such as optical pickup, interconnection and so forth. Most DOEs have been produced by semiconductor fabrication process. Although this process is useful to form complicated fine structures, there exist two problems. First, it is rather difficult to fabricate nonplanar surfaces including slopes and curves, which is effective to enhance diffraction efficiencies of DOEs. Second, microstructures cannot be fabricated onto nonplanar substrates. In the FLAM, nonplanar patterns are directly written inside resists by use of femtosecond laser-induced nonlinear optical absorption. Then, the patterns are transferred to underlying silica glasses by CHF3 plasma. By use of FLAM, we successfully fabricated silica-based microFresnel lenses including curves and slopes on planar substrates and cross-grating structures onto a convex microlens. In particular, as for the latter, uniform grating structures with smooth surfaces were observed even at top and curved regions of the lenses. The FLAM is expected to be useful for the fabrication of highly functional DOEs such as diffractive/refractive hybrid microlenses.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133978444","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
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