SPIE MOEMS-MEMS最新文献_第3页

A porous silicon thermally tunable optical filter 一种多孔硅热可调谐光学滤光片

SPIE MOEMS-MEMS Pub Date : 2008-02-09 DOI: 10.1117/12.759165

Da Song, N. Tokranova, A. Gracias, J. Castracane

{"title":"A porous silicon thermally tunable optical filter","authors":"Da Song, N. Tokranova, A. Gracias, J. Castracane","doi":"10.1117/12.759165","DOIUrl":"https://doi.org/10.1117/12.759165","url":null,"abstract":"Porous silicon (PSi) is a promising material for the creation of optical components for chip-to-chip interconnects because of its unique optical properties, flexible fabrication methods and integration with conventional CMOS material sets. In this paper, we present a novel active optical filter made of PSi to select desired optical wavelengths. The tunable membrane type optical filter is based on a Fabry-Perot interferometer employing two Bragg reflectors separated by an adjustable air gap, which can be thermally controlled. The Bragg reflectors contain alternating layers of high and low porosities. These layers were created by electrochemical etching of p+ type silicon wafers by varying the applied current during etching process. Micro bimorph actuators are designed to control the movement of the top DBR mirror, which changes the cavity thickness. By varying the applied current, the proposed filter can tune the transmitted wavelength of the optical signal. Various geometrical shapes and sizes ranging from 100μm to 1mm of the active filtering region have been realized for specific applications. The MOEMS technology-based device fabrication is fully compatible with the existing IC mass fabrication processes, and can be integrated with a variety of active and passive optical components to realize inter-chip or intra-chip communication at the system level at a relatively low cost.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128315102","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A 4096 element continuous facesheet MEMS deformable mirror for high-contrast imaging 用于高对比度成像的4096单元连续面片MEMS变形镜

SPIE MOEMS-MEMS Pub Date : 2008-02-08 DOI: 10.1117/12.770620

S. Cornelissen, P. Bierden, T. Bifano

引用次数: 17

One-axis metallic electrostatic micromirror array 单轴金属静电微镜阵列

SPIE MOEMS-MEMS Pub Date : 2008-02-08 DOI: 10.1117/12.763877

K. Tondapu, Q. Cheng, M. Almasri

{"title":"One-axis metallic electrostatic micromirror array","authors":"K. Tondapu, Q. Cheng, M. Almasri","doi":"10.1117/12.763877","DOIUrl":"https://doi.org/10.1117/12.763877","url":null,"abstract":"A new micromachined one dimensional (1-D) micromirror array structure is presented that utilizes primarily electroplated nickel, a mechanically durable material with a high glass transition temperature and with controllable residual stress as the main structural material. The goal of this research is to develop custom micromirror array for use in epitaxial growth systems to define the device structure and hence eliminate the need for etching and lithography, the same micromirror can be used for switches and optical cross-connects. The high glass transition temperature of nickel allows it to be used at high temperature without causing any contamination to the epitaxial systems or to the deposited materials. Micromirror arrays with 5×5 and 1×5 pixels were designed with square shape with an area of 500 μm2 to provide high fill factor and uniform stress distribution. The focus of this paper is on improved design for reducing actuation voltage and increasing the rotation angle. The micromirror was previously fabricated using surface micromachining technologies with a thick photoresist sacrificial layer [1]. The torsion beams were designed with a serpentine shape in order to optimize the voltage necessary to tilt the micromirror by ± 10°. The micromirrors were simulated using Coventor finite element tool in order to determine their geometries and performance. A voltage of 20 volts was required to rotate the mirror with a pixel pitch of 500 μm by 7.68° with resonance frequency of 221.52 Hz.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127707602","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Two dimensional microscanners with large horizontal-vertical scanning frequency ratio for high-resolution laser projectors 用于高分辨率激光投影仪的大水平-垂直扫描频率比二维微扫描仪

SPIE MOEMS-MEMS Pub Date : 2008-02-08 DOI: 10.1117/12.761617

Shu-Ting Hsu, T. Klose, C. Drabe, H. Schenk

引用次数: 11

Performance of a MEMS-based AO-OCT system 基于mems的AO-OCT系统性能研究

SPIE MOEMS-MEMS Pub Date : 2008-02-08 DOI: 10.1117/12.771673

J. W. Evans, R. Zawadzki, S. Jones, Samelia Okpodu, S. Olivier, J. Werner

引用次数: 3

Pushbroom NIR hyperspectral imager using MOEMS scanning grating chips 推帚式近红外高光谱成像仪采用MOEMS扫描光栅芯片

SPIE MOEMS-MEMS Pub Date : 2008-02-08 DOI: 10.1117/12.762904

H. Grüger, T. Egloff, M. Scholles, F. Zimmer, Michael Müller, H. Schenk

引用次数: 4

Applying adaptive optics to three-dimensional wide-field microscopy 自适应光学在三维宽视场显微镜中的应用

SPIE MOEMS-MEMS Pub Date : 2008-02-08 DOI: 10.1117/12.773731

P. Kner, J. Sedat, D. Agard, Z. Kam

引用次数: 4

Turbulence compensation using micromirror arrays: the array design 微镜阵列湍流补偿:阵列设计

SPIE MOEMS-MEMS Pub Date : 2008-02-08 DOI: 10.1117/12.779877

W. Sweatt, M. Valley

引用次数: 0

A novel method of creating a surface micromachined 3D optical assembly for MEMS-based miniaturized FTIR spectrometers 一种为基于mems的小型化FTIR光谱仪制造表面微机械三维光学组件的新方法

SPIE MOEMS-MEMS Pub Date : 2008-02-08 DOI: 10.1117/12.764006

D. Reyes, E. Schildkraut, J. Kim, R. Connors, P. Kotidis, D. J. Cavicchio

{"title":"A novel method of creating a surface micromachined 3D optical assembly for MEMS-based miniaturized FTIR spectrometers","authors":"D. Reyes, E. Schildkraut, J. Kim, R. Connors, P. Kotidis, D. J. Cavicchio","doi":"10.1117/12.764006","DOIUrl":"https://doi.org/10.1117/12.764006","url":null,"abstract":"This paper describes design, fabrication, and characterization of a miniaturized, Fourier transform infrared (FTIR) spectrometer for the detection and identification of toxic or flammable gases. By measuring the absorption by the target material of IR radiation, unambiguous detection and identification can be achieved. The key component of the device is a micromachined Michelson interferometer capable of modulating light in the 2 - 14 μm spectral region. Two major technical achievements associated with developing a MEMS interferometer module are discussed: development of a micromirror assembly having an order of magnitude larger modulation stroke to approach laboratory instrument-grade spectral resolutions; and assembly of monolithic, millimeter-scale optical components using multi-layer surface micromachining techniques to produce an extremely low cost MEMS interferometer, which has an unprecedented optical throughput. We have manufactured and tested the device. Reported optical characterization results include a precisely aligned, static interferogram acquired from an assembled Michelson interferometer using visible light wavelengths, which promises a high sensitivity FTIR spectrometer for its size.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"11 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131282792","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 17

Flat electrowetting optics and displays 平板电润湿光学和显示器

SPIE MOEMS-MEMS Pub Date : 2008-02-08 DOI: 10.1117/12.758835

J. Heikenfeld, N. Smith, Bo Sun, K. Zhou, L. Hou, Y. Lao, B. Raj

{"title":"Flat electrowetting optics and displays","authors":"J. Heikenfeld, N. Smith, Bo Sun, K. Zhou, L. Hou, Y. Lao, B. Raj","doi":"10.1117/12.758835","DOIUrl":"https://doi.org/10.1117/12.758835","url":null,"abstract":"Flat electrowetting optics currently include pixel arrays for displays and prism arrays for beam steering. Electrowetting display pixels utilize a colored oil layer that provides high efficiency control of light transmission or light reflection. Electrowetting microprisms tilt the angle of the meniscus between liquids with different refractive index and thereby cause refraction of a light beam passing through the meniscus. Both of these technologies are projected to provide an order of magnitude increase in raw performance compared to liquid-crystal and other technologies. For example, transmissive electrowetting displays are expected to achieve >80% transmission, which far exceeds the ~8% transmission of a commercial liquid crystal display. Electrowetting microprisms have a clear roadmap leading to greater than +/- 45° of continuous beam steering, which surpasses the few degrees of beam steering achieved with electro-optic phased arrays. However, before widespread commercial application can be achieved, a variety of other challenges, such as low-voltage operation, must be solved. Many of these challenges are engineering problems, not fundamental scientific discoveries, and significant technological progress is expected for flat electrowetting optics.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-02-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132969069","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 10