用于高对比度成像的4096单元连续面片MEMS变形镜

SPIE MOEMS-MEMS Pub Date : 2008-02-08 DOI:10.1117/12.770620

S. Cornelissen, P. Bierden, T. Bifano

{"title":"用于高对比度成像的4096单元连续面片MEMS变形镜","authors":"S. Cornelissen, P. Bierden, T. Bifano","doi":"10.1117/12.770620","DOIUrl":null,"url":null,"abstract":"This paper presents the progress in the development of a 4096 element MEMS deformable mirror, fabricated using polysilicon surface micromachining manufacturing processes, with 4μm of stroke, a surface finish of less than 10nm RMS, a fill factor of 99.5%, and bandwidth greater than 5kHz. The packaging and high speed drive electronics for this device, capable of frame rates of 22 kHz, are also presented.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"156 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-02-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"17","resultStr":"{\"title\":\"A 4096 element continuous facesheet MEMS deformable mirror for high-contrast imaging\",\"authors\":\"S. Cornelissen, P. Bierden, T. Bifano\",\"doi\":\"10.1117/12.770620\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents the progress in the development of a 4096 element MEMS deformable mirror, fabricated using polysilicon surface micromachining manufacturing processes, with 4μm of stroke, a surface finish of less than 10nm RMS, a fill factor of 99.5%, and bandwidth greater than 5kHz. The packaging and high speed drive electronics for this device, capable of frame rates of 22 kHz, are also presented.\",\"PeriodicalId\":130723,\"journal\":{\"name\":\"SPIE MOEMS-MEMS\",\"volume\":\"156 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-02-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"17\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"SPIE MOEMS-MEMS\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.770620\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE MOEMS-MEMS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.770620","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 17

摘要

本文介绍了采用多晶硅表面微加工工艺制备的4096元MEMS可变形反射镜的研制进展，该反射镜的行程为4μm，表面光洁度小于10nm RMS，填充系数为99.5%，带宽大于5kHz。本文还介绍了该器件的封装和高速驱动电子器件，其帧率可达22 kHz。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

A 4096 element continuous facesheet MEMS deformable mirror for high-contrast imaging

This paper presents the progress in the development of a 4096 element MEMS deformable mirror, fabricated using polysilicon surface micromachining manufacturing processes, with 4μm of stroke, a surface finish of less than 10nm RMS, a fill factor of 99.5%, and bandwidth greater than 5kHz. The packaging and high speed drive electronics for this device, capable of frame rates of 22 kHz, are also presented.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

SPIE MOEMS-MEMS

自引率

0.00%

发文量