1976 International Electron Devices Meeting最新文献

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MOSFETs with polysilicon gates self-aligned to the field isolation and to the source/drain regions 具有多晶硅栅极的mosfet自对准场隔离和源极/漏极区域
1976 International Electron Devices Meeting Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1976.189114
V. L. Rideout, V. Silvestri
{"title":"MOSFETs with polysilicon gates self-aligned to the field isolation and to the source/drain regions","authors":"V. L. Rideout, V. Silvestri","doi":"10.1109/IEDM.1976.189114","DOIUrl":"https://doi.org/10.1109/IEDM.1976.189114","url":null,"abstract":"The fabrication procedure and device characteristics of MOSFETs having a unique gate electrode structure are described. The polysilicon gate electrode of the structure is self-aligned on its ends with respect to the conductive source and drain regions, and it is also self-aligned on its sides with respect to the nonconductive field oxide isolation regions. This double self-alignment feature results in a polysilicon gate electrode area that matches the channel region of the FET. Another novel feature of this device is a self-registering electtical connection between the gate and the metallic interconnection pattern. An oxidation barrier layer of silicon nitride is used to prevent oxidation over the gate. When the nitride layer is removed, the entire gate area is revealed for contacting by a metal line. This misregistration tolerant contacting technique and the doubly self-aligned gate electrode structure yield small FETs with increased packing density. The novel fabrication procedure can lead to the formation of nonplanar microstructural features which nevertheless can be controlled by proper choice of processing variables. The experimental electrical characteristics of the new FET structure are quite similar to those of larger area MOSFETs fabricated using more conventional methods.","PeriodicalId":106190,"journal":{"name":"1976 International Electron Devices Meeting","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132122665","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Gate assisted turn-off thyristor with cathode shunts and dynamic gate 具有阴极分流和动态栅极的栅极辅助关断可控硅
1976 International Electron Devices Meeting Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1976.189089
E. Schlegel, D. Page
{"title":"Gate assisted turn-off thyristor with cathode shunts and dynamic gate","authors":"E. Schlegel, D. Page","doi":"10.1109/IEDM.1976.189089","DOIUrl":"https://doi.org/10.1109/IEDM.1976.189089","url":null,"abstract":"A 1000V, 200A gate-assisted turn-off thyristor (GATT) is described that was developed for, and is being used in, circuitry for space applications requiring high efficiency and reliability as well as small size and weight. The design features include an interdigitated shunted cathode, a dynamic gate, a means for optimizing the carrier lifetime level, and a bypass diode. The bypass diode is necessary to permit the combination of both dynamic turn-on and gate-assisted turn-off in the same device. Two versions of this diode are described. The device physics of gate-assisted turn-off will be reviewed. Based on this, improvements in the design will be described. It is shown that a prime failure mode can be eliminated and that the gate-assist signal voltage can be substantially decreased by employing a shunted cathode emitter. The test data show excellent turn-on characteristics due to the dynamic gate and the long perimeter of the edge of the main cathode. Turn-off times as short as 3 µsec are obtained. The effect of the gate-assist current on the turn-off time is described. The combination of controlling the carrier lifetime with a precisely controlled and easily variable irradiation dose of high energy electrons with gate assist current provides for simple, precision tailoring of the device characteristics to the intended application.","PeriodicalId":106190,"journal":{"name":"1976 International Electron Devices Meeting","volume":" 36","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132039972","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
An improved circuit model of the step-recovery diode for computer-aided design 一种用于计算机辅助设计的改进的步进恢复二极管电路模型
1976 International Electron Devices Meeting Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1976.188997
R. Tielert, B. Bosch
{"title":"An improved circuit model of the step-recovery diode for computer-aided design","authors":"R. Tielert, B. Bosch","doi":"10.1109/IEDM.1976.188997","DOIUrl":"https://doi.org/10.1109/IEDM.1976.188997","url":null,"abstract":"The switching behavior of pin diodes with short i-layer, used as step-recovery diodes, is discussed on the basis of measurements in the subnanosecond time domain. Special attention is given to the effect of charge storage in the contact layers on the turn-off transition response. It is demonstrated that this additional storage effect is a dominant factor as far as high injection levels are concerned. A large-signal circuit model is presented which is suited for computer-aided circuit design using transient network analysis programs. In contrast to existing circuit models, this model includes all effects responsible for the various phases of the turn-off response observed.","PeriodicalId":106190,"journal":{"name":"1976 International Electron Devices Meeting","volume":"135 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116414631","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Metal-oxide devices for rapid high current switching 用于快速大电流开关的金属氧化物器件
1976 International Electron Devices Meeting Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1976.189038
G. Gaule, P. LaPlante, S. Levy, S. Schneider
{"title":"Metal-oxide devices for rapid high current switching","authors":"G. Gaule, P. LaPlante, S. Levy, S. Schneider","doi":"10.1109/IEDM.1976.189038","DOIUrl":"https://doi.org/10.1109/IEDM.1976.189038","url":null,"abstract":"Prototypes of Metal-Oxide Threshold Switches (MOTS) have been built using bulk switching effects in chips of transition metal oxides, in most cases niobium-\"dioxide\", NbO2(x≈2). A 3 mm diameter disc of niobium oxide can pass 100A, millisecond pulses without damage for hundreds of pulses. Chips mounted in microwave diode packages have capacitances of only a few pF, and leakage resistances ranging from the kiloohm to the megohm range in the \"off\" state. The \"on\" state occurs within 500 ps after the threshold voltage has been approached, and within a few (≈2) ns, the voltage across the device begins to drop to a \"holding\" voltage on the order of 20V. Threshold voltages can be varied during manufacture from 60V to the kV range for prototype MOTS. Due to their speed and low capacitance in the \"off\" state, MOTS devices are well suited as high current transient protectors in RF lines. Another application being studied with present prototype is the \"sharpening\" of pulses with undesirably long rise times for use in lasers and radars.","PeriodicalId":106190,"journal":{"name":"1976 International Electron Devices Meeting","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121198533","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Ultrafast multireflection- and transparent thinfilm silicon photodiodes 超快多反射和透明薄膜硅光电二极管
1976 International Electron Devices Meeting Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1976.189072
J. Muller
{"title":"Ultrafast multireflection- and transparent thinfilm silicon photodiodes","authors":"J. Muller","doi":"10.1109/IEDM.1976.189072","DOIUrl":"https://doi.org/10.1109/IEDM.1976.189072","url":null,"abstract":"Thin-silicon-film mesa-shaped pin-photodiodes are presented, which exhibit high internal quantum efficiency at risetimes below 100 ps using a grated highly reflecting back contact and total reflection at the top. Theoretical and typical experimental data are given. Transparent photodiodes fabricated in a similar way are introduced, which can be inserted into an optical transmission path to take out a fraction of power without the need of an optical coupler.","PeriodicalId":106190,"journal":{"name":"1976 International Electron Devices Meeting","volume":"114 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124070732","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Improvement of TRAPATT performance with optically generated carriers 利用光生成载流子改进TRAPATT性能
1976 International Electron Devices Meeting Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1976.188994
R. Kiehl, E. P. Eernisse
{"title":"Improvement of TRAPATT performance with optically generated carriers","authors":"R. Kiehl, E. P. Eernisse","doi":"10.1109/IEDM.1976.188994","DOIUrl":"https://doi.org/10.1109/IEDM.1976.188994","url":null,"abstract":"It is demonstrated that a number of the difficulties which have thus far limited the application of the TRAPATT oscillator may be overcome by optically generating carriers within the device's active region. Illumination with a short light pulse at the beginning of the bias pulse extends the ranges of (i) bias, (ii) circuit tuning, and (iii) temperature over which the duration of leading edge jitter is short. Illumination during the application of the bias pulse significantly shifts the oscillation frequency. It is shown that this effect may be used to eliminate undesirable intra-pulse frequency drift with shaped light pulses. Also, frequency switching in time-frames approaching one RF period are accomplished, which opens up new applications for the TRAPATT oscillator.","PeriodicalId":106190,"journal":{"name":"1976 International Electron Devices Meeting","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122007408","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Electrical properties of a-Si solar cells a-Si太阳能电池的电学特性
1976 International Electron Devices Meeting Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1976.188989
C. Wronski, D. Carlson, R. E. Daniel, A. Triano
{"title":"Electrical properties of a-Si solar cells","authors":"C. Wronski, D. Carlson, R. E. Daniel, A. Triano","doi":"10.1109/IEDM.1976.188989","DOIUrl":"https://doi.org/10.1109/IEDM.1976.188989","url":null,"abstract":"The principal electrical properties that contribute to the operation of efficient metal/a-Si solar cells have been evaluated. Various metal/ a-Si Schottky barriers have been characterized in terms of barrier height, saturated current density, generation-recombination, built-in potential, and depletion width. The photovoltaic and photoconductive properties of the cell structures have been investigated. The dependence of photocurrents on wavelength and depletion width is presented and minority carrier diffusion effects are discussed.","PeriodicalId":106190,"journal":{"name":"1976 International Electron Devices Meeting","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130605952","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Accurate calculations of the forward drop of power rectifiers and thyristors 精确计算功率整流器和晶闸管的正向压降
1976 International Electron Devices Meeting Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1976.189092
M. Adler, V. Temple
{"title":"Accurate calculations of the forward drop of power rectifiers and thyristors","authors":"M. Adler, V. Temple","doi":"10.1109/IEDM.1976.189092","DOIUrl":"https://doi.org/10.1109/IEDM.1976.189092","url":null,"abstract":"In this paper, four layer power thyristors are analyzed using exact numerical solutions of the full set of semiconductor device equations together with the heat flow equation. Included in the analysis are the physical mechanisms of carrier-carrier scattering, Auger and SRH recomgination, and band gap narrowing. The experimental current-voltage curves for three thyristor structures are compared with the theoretical predictions and are shown to be in good agreement. The limiting effects on device behavior of the physical mechanisms noted above included heat sink thermal impedance are investigated over the range of device operating conditions. The distribution of power dissipation throughout the device is shown and compared with the distribution of recombination in the device. The theory of calculating power dissipation in a semiconductor is also discussed.","PeriodicalId":106190,"journal":{"name":"1976 International Electron Devices Meeting","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130444866","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
Recent Digicon developments 数码icon的最新发展
1976 International Electron Devices Meeting Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1976.189068
J. P. Choisser
{"title":"Recent Digicon developments","authors":"J. P. Choisser","doi":"10.1109/IEDM.1976.189068","DOIUrl":"https://doi.org/10.1109/IEDM.1976.189068","url":null,"abstract":"The use of semiconductor arrays in image tubes is becoming increasingly important in a wide variety of applications. This paper will summarize the Digicon fabrication methods, and will describe several new devices that are in development. Two of the most interesting new devices include intensified charge coupled devices (ICCDs) and APD Digicons which use avalanche photodiodes to detect photoelectrons. In the case of the ICCD, test results will be given and single photoelectron pulse height distributions shown. Test results will also be given on the APD Digicon. This new rugged and potentially low cost photomultiplier device may find use in a number of high speed applications, such as laser ranging and high speed optical communication.","PeriodicalId":106190,"journal":{"name":"1976 International Electron Devices Meeting","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130040176","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A new photomask with ion-implanted resist 一种新型离子注入抗蚀剂光掩膜
1976 International Electron Devices Meeting Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1976.189018
T. Hashimoto, T. Koguchi, Y. Okuyama, K. Yamamoto, K. Takahata, M. Kamoshida, T. Yanagawa
{"title":"A new photomask with ion-implanted resist","authors":"T. Hashimoto, T. Koguchi, Y. Okuyama, K. Yamamoto, K. Takahata, M. Kamoshida, T. Yanagawa","doi":"10.1109/IEDM.1976.189018","DOIUrl":"https://doi.org/10.1109/IEDM.1976.189018","url":null,"abstract":"A novel photomask fabrication method using ion implantation has been developed, where energetic ions are implanted into the patterned resist on a glass substrate. The optical transmission of the resist film was exceedingly decreased and the resist becomes more mechanically and chemically resistant by high energy, high dose ion implantation. These results are suitably applied to photomask fabrication. In this paper process conditions such as types of resist, resist thickness, ion species, energy and dose will be discussed. And some of the evaluation results on the implanted photomasks will be also discussed in relation to optical density, pattern definition, scratch resistance and chemical attacks.","PeriodicalId":106190,"journal":{"name":"1976 International Electron Devices Meeting","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131142735","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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