2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献_第2页

Metal/silicon dioxide microtube improves optical and electrical properties of neuroprobe 金属/二氧化硅微管改善了神经探针的光学和电学性能

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474441

T. Nakamura, M. Sakata, A. Goryu, M. Ishida, T. Kawano

引用次数: 0

An electromagnetic energy harvester for low frequency and low-g vibrations with a modified frequency up conversion method 一种用于低频和低g振动的电磁能量采集器，具有改进的频率上转换方法

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474365

O. Zorlu, S. Turkyilmaz, A. Muhtaroğlu, H. Kulah

{"title":"An electromagnetic energy harvester for low frequency and low-g vibrations with a modified frequency up conversion method","authors":"O. Zorlu, S. Turkyilmaz, A. Muhtaroğlu, H. Kulah","doi":"10.1109/MEMSYS.2013.6474365","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474365","url":null,"abstract":"This paper presents a MEMS-based electromagnetic (EM) energy harvester for low frequency and low acceleration vibrations. The harvester is an improved version of [1], which operates with the frequency up conversion (FupC) principle. The former structure was composed of a low-frequency diaphragm carrying a magnet and 16 high-frequency cantilevers with coils. In this work, the phase difference between the coil outputs, leading to voltage cancellation in serial connection, has been eliminated by using a single coil placed on a diaphragm. Furthermore, the placement and the volume of the magnetic film have been modified for better magnetic coupling. The RMS values of the generated voltage and delivered power to an equivalent resistive load have been measured as 6.94 mV and 1.2 nW, respectively with 10 Hz, 3 mm peak to peak vibrations (0.6 g acceleration). About 32-fold increase in the peak power output has been demonstrated with the presented energy harvester with respect to the previous work.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76856616","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 11

Flexible neurocage array for live neural network study 用于实时神经网络研究的柔性神经细胞阵列

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474236

Jungwook Park, Jerome Pine, Yu-Chong Tai

{"title":"Flexible neurocage array for live neural network study","authors":"Jungwook Park, Jerome Pine, Yu-Chong Tai","doi":"10.1109/MEMSYS.2013.6474236","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474236","url":null,"abstract":"A flexible multi-electrode-array (MEA) with parylene-C (PA-C) cages on PA-C substrate for neural network study in vitro is presented here. 8×8 cage arrays were fabricated on a 10-μm-thick PA-C film. For our use, the array was glued on a 100μm-thick glass substrate for ease of handling. Each cage is to trap an individual neuron to force a close proximity of the neuron to an embedded electrode inside the cage for stimulation and recording. In addition, each neurocage has six tunnels emanating from the cage to allow axons and dendrites to grow outward and form synapses with other trapped neurons. The Electrode inside each neurocage can then be used to stimulate and/or record electrical activity from the trapped cell at any given time. Why thin and flexible? From our previous work, it is learned that manually loading neuron one-by-one into the cage is time-consuming. We then propose to use laser tweezer to do the cell loading from the backside of the array. To facilitate laser tweezer neuron loading, the neurocage array must be transparent and thin. On the other hand, device flexibility facilitates a high-yield fabrication, easy singulation and attachment to almost any substrate for use.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81975773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

Particle transporter using cilia of Vorticella 利用Vorticella纤毛的粒子转运体

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474178

M. Nagai, Y. Hayasaka, T. Kawashima, T. Shibata

引用次数: 0

Packaging study for a 512-channel intraocular epiretinal implant 512通道眼内视网膜外植入物的包装研究

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474428

J. Chang, Yang Liu, Dongyang Kang, M. Monge, Yu Zhao, Chia-Chen Yu, A. Emami-Neyestanak, J. Weiland, M. Yun, Yu-Chong Tai

{"title":"Packaging study for a 512-channel intraocular epiretinal implant","authors":"J. Chang, Yang Liu, Dongyang Kang, M. Monge, Yu Zhao, Chia-Chen Yu, A. Emami-Neyestanak, J. Weiland, M. Yun, Yu-Chong Tai","doi":"10.1109/MEMSYS.2013.6474428","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474428","url":null,"abstract":"Much effort has been put into developing multi-channel retinal prosthetic devices. Currently, even the most advanced prostheses do not have enough channels to provide vision to a desirable level. In this paper, we present a system design and a packaging scheme for a 512-channel intraocular epiretinal implant. Both a wireless power coil (with high transfer efficiency) and a data coil are included for this intraocular system. Simulation of the interference between coils is investigated and the results show that the two coils can be put in a co-planar fashion using two notch filters to minimize interference. The complete package is demonstrated with a mechanical model with a parylene-C flexible circuit board, i.e., parylene flex, to show the placement of the IC chips, discrete components, and coils. It also shows the final folded device after surgical insertion into an eye to save space. The feasibility of the proposed structure has been successfully tested in vivo. Experimentally, the maximum allowable pulling force is measured by a dynamic mechanical analysis (DMA) machine to be 8N, which provides a large safety margin for surgery.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85524678","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 14

Wrinkle meets MEMS: Tunable grating and hydrophobic surface 皱纹满足MEMS:可调谐光栅和疏水表面

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474305

A. Takei, H. Fujita

{"title":"Wrinkle meets MEMS: Tunable grating and hydrophobic surface","authors":"A. Takei, H. Fujita","doi":"10.1109/MEMSYS.2013.6474305","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474305","url":null,"abstract":"Multi-layered systems composed of a rigid thin film and an elastomeric base are ubiquitous in nature and in technology [1,2]. When stress is applied to the system, the surface of the system is often deformed in periodical wrinkle patterns due to the mismatch of the stiffness and the length. As reported in [3,4], the periodical patterns result in functional surfaces, such as smart adhesion, hydrophobic surfaces and diffractive gratings. In this paper, we present a tunable grating and a hydrophobic surface using the wrinkle phenomenon. The device is composed of a rigid layer and an elastomeric chamber. The chamber can be inflated pneumatically using oil, and the strain exerted on the device is controllable. By controlling the strain, we achieved a wrinkle pattern with a 10 μm wavelength whose amplitude is tunable from 1.6 μm to 2.8 μm. With this method, a tunable optical grating has been achieved. We have also created a tunable hydrophobic surface by controlling the surface roughness in two dimensions. The contact angle of a water droplet on the device ranged from 110 degrees to 130 degrees. The device can be fabricated with a transparent and flexible material and does not require electrical wires. This paper presents a range of possibilities for a functional wrinkle structure controlled using a MEMS technique.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82190149","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers 采用垂直集成双多晶硅层的cmos热电堆

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474270

Huchuan Zhou, P. Kropelnicki, J. Tsai, Chengkuo Lee

引用次数: 4

Combustion and material characterization of porous silicon nanoenergetics 多孔硅纳米能量学的燃烧与材料表征

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474275

N. Piekiel, W. Churaman, C. Morris, L. Currano

引用次数: 11

Nonlinearity-assisted frequency stabilization for nanowire array membrane oscillator 纳米线阵列膜振荡器的非线性辅助频率稳定

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474326

Yuerui Lu, A. Lal

引用次数: 1

A graphene FET gas sensor gated by ionic liquid 离子液体门控的石墨烯FET气体传感器

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474408

A. Inaba, G. Yoo, Y. Takei, Kiyoshi Matsumoto, I. Shimoyama

引用次数: 22