Journal of Materials Chemistry C最新文献

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Near fully depleted Pt/Sb2Se3/ZnO hybrid junctions for high-performance polarized detection and encrypted communication 用于高性能偏振探测和加密通信的近完全耗尽型 Pt/Sb2Se3/ZnO 混合结
IF 5.7 2区 材料科学
Journal of Materials Chemistry C Pub Date : 2024-09-18 DOI: 10.1039/D4TC03472D
Zhipeng Sun, Fazhen Zhang, Mengdan Chen, Tao He, Yun Wei, Caixia Kan, Mingming Jiang and Peng Wan
{"title":"Near fully depleted Pt/Sb2Se3/ZnO hybrid junctions for high-performance polarized detection and encrypted communication","authors":"Zhipeng Sun, Fazhen Zhang, Mengdan Chen, Tao He, Yun Wei, Caixia Kan, Mingming Jiang and Peng Wan","doi":"10.1039/D4TC03472D","DOIUrl":"https://doi.org/10.1039/D4TC03472D","url":null,"abstract":"<p >The field of low-dimensional polarized photodetectors has become a leading focus for optical communications, remote sensing, imaging research and other studies. Achieving high polarization anisotropy while maintaining other critical detection performance metrics continues to be a significant hurdle. In this work, self-powered hybrid junction polarized photodetectors, which are based on a Pt/Sb<small><sub>2</sub></small>Se<small><sub>3</sub></small> Schottky junction combined with a Sb<small><sub>2</sub></small>Se<small><sub>3</sub></small>/ZnO heterojunction, are proposed. The Pt/Sb<small><sub>2</sub></small>Se<small><sub>3</sub></small>/ZnO hybrid junction photodetector has a high responsivity of 120 mA W<small><sup>−1</sup></small>, a high specific detectivity of 10<small><sup>12</sup></small> Jones (1000 Hz), and an ultrafast rise/decay time (833 μs/830 μs) upon 880 nm light irradiation at zero bias. Specifically, the polarization anisotropy of the designed device is measured to be 1.69. Based on the finite element method calculation, the favorable overall photoelectric properties of the photodetectors are attributed to the consistency and synergy of the built-in electric field introduced by the near fully depleted hybrid junctions, which promote the effective separation of carriers and reduce recombination losses. Because the photodetector can be used as a polarized light receiver, it can be further applied in near-infrared encrypted communication. This work provides a promising route for the design of high-performance polarized photodetectors towards realistic applications.</p>","PeriodicalId":84,"journal":{"name":"Journal of Materials Chemistry C","volume":null,"pages":null},"PeriodicalIF":5.7,"publicationDate":"2024-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142595212","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Visible light mediated efficient photoswitching of dimethyldihydropyrenes in thin films for all-photonic logic gate applications and dynamic encryption/decryption capabilities† 以可见光为介导,在薄膜中实现二甲基二氢吡喃的高效光开关,从而实现全光子逻辑门应用和动态加密/解密功能†。
IF 5.7 2区 材料科学
Journal of Materials Chemistry C Pub Date : 2024-09-18 DOI: 10.1039/D4TC03321C
Sariful Molla and Subhajit Bandyopadhyay
{"title":"Visible light mediated efficient photoswitching of dimethyldihydropyrenes in thin films for all-photonic logic gate applications and dynamic encryption/decryption capabilities†","authors":"Sariful Molla and Subhajit Bandyopadhyay","doi":"10.1039/D4TC03321C","DOIUrl":"https://doi.org/10.1039/D4TC03321C","url":null,"abstract":"<p >Dimethyldihydropyrene (DHP) photoswitches exhibit visible light-induced ring-opening photoisomerization, reversed by UV light or heat. These photochromic systems exhibit extended half-lives, ranging from days to weeks for metastable photoisomers, making them applicable in diverse fields such as biology, optoelectronics, memory devices, and anti-counterfeiting measures. However, their solid-state photoswitching properties are suboptimal. To unlock their full potential for applications, the knowledge of solid-state switching is crucial. Solid-state photoswitching challenges are addressed in this study, investigating parent DHP and derivatives in polymer matrices. Self-aggregation and high optical density issues are mitigated by limiting the loading of the photochromic system below 2.5% (w/w), maintaining high solid-state photoswitching efficiency (85−90%). It was also found that the polymer rigidity enhanced the thermal stability of the open form. This study reveals that fusing aromatic rings enhances the photochromic efficiency of DHP systems, enabling both ring-opening and closing with visible light, and enhanced visible light reversal is observed with increased annelation. The optimized DHP-blended polymers also demonstrate possible applications of these systems as an all-photonic logic gate in the solid state, anti-counterfeiting and data storage, with dynamic encryption/decryption capabilities.</p>","PeriodicalId":84,"journal":{"name":"Journal of Materials Chemistry C","volume":null,"pages":null},"PeriodicalIF":5.7,"publicationDate":"2024-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142595214","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Lanthanide hydrogels with tunable circularly polarized luminescence (CPL) via supramolecular chirality induction† 通过超分子手性诱导实现可调圆偏振发光(CPL)的镧系水凝胶†
IF 5.7 2区 材料科学
Journal of Materials Chemistry C Pub Date : 2024-09-18 DOI: 10.1039/D4TC03257H
Raju Laishram, Souvik Sarkar, Uday Maitra and Subi J. George
{"title":"Lanthanide hydrogels with tunable circularly polarized luminescence (CPL) via supramolecular chirality induction†","authors":"Raju Laishram, Souvik Sarkar, Uday Maitra and Subi J. George","doi":"10.1039/D4TC03257H","DOIUrl":"https://doi.org/10.1039/D4TC03257H","url":null,"abstract":"<p >Lanthanide-derived materials are promising candidates for efficient circularly polarized luminescence (CPL) with a high dissymmetry factor (<em>g</em><small><sub>lum</sub></small>). However, synthesizing chiral ligands in lanthanide-based designs remains challenging. In this context, we present a simpler, modular approach using ‘supramolecular chirality induction’ and non-covalent sensitization to create soft hydrogel materials with tunable CPL emission and a remarkably high <em>g</em><small><sub>lum</sub></small> of 2 × 10<small><sup>−2</sup></small>.</p>","PeriodicalId":84,"journal":{"name":"Journal of Materials Chemistry C","volume":null,"pages":null},"PeriodicalIF":5.7,"publicationDate":"2024-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142368698","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Single- and two-photon excited photoluminescence of 2D perovskite thin films with different organic spacer cations† 含不同有机间隔阳离子的二维过氧化物薄膜的单光子和双光子激发光致发光
IF 5.7 2区 材料科学
Journal of Materials Chemistry C Pub Date : 2024-09-18 DOI: 10.1039/D4TC03184A
Tai Luo, Junzi Li, Yanyan Cui, Hao Jin and Tingchao He
{"title":"Single- and two-photon excited photoluminescence of 2D perovskite thin films with different organic spacer cations†","authors":"Tai Luo, Junzi Li, Yanyan Cui, Hao Jin and Tingchao He","doi":"10.1039/D4TC03184A","DOIUrl":"https://doi.org/10.1039/D4TC03184A","url":null,"abstract":"<p >Studying the fundamental optical properties of two-dimensional (2D) perovskites is a prerequisite for developing related applications. In this work, we have prepared A<small><sub>2</sub></small>PbBr<small><sub>4</sub></small> (A = EA<small><sup>+</sup></small>, PA<small><sup>+</sup></small>, and BA<small><sup>+</sup></small>) (EA<small><sup>+</sup></small> = ethylammonium, PA<small><sup>+</sup></small> = propylammonium, and BA<small><sup>+</sup></small> = butylammonium) polycrystalline thin films with different alkylamine chain lengths by a spin-coating and annealing method, and we investigate the effect of the organic spacer cation chain length on optical properties. Our experimental results show that the length of the amine chain can significantly affect the temperature-dependent photoluminescence (PL) properties. Specifically, short amine chains will result in dominance of the thermal expansion effect, while long amine chains can enhance electron–phonon coupling strength. Meanwhile, we confirm that the amine chain length can also effectively regulate the two-photon excited PL properties of 2D perovskite films. Among the three samples, the (PA)<small><sub>2</sub></small>PbBr<small><sub>4</sub></small> film with a medium chain length exhibits the largest two-photon absorption coefficient, attributed to its large density of states and the strongest electron–phonon coupling strength. Our study not only deepens the understanding of the regulation of PL properties in 2D perovskites but also provides an important theoretical basis for the development of high-performance luminescent devices.</p>","PeriodicalId":84,"journal":{"name":"Journal of Materials Chemistry C","volume":null,"pages":null},"PeriodicalIF":5.7,"publicationDate":"2024-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142565726","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Liquid crystal elastomers in soft micro electromechanical systems: a review of recent developments 软微型机电系统中的液晶弹性体:最新发展综述
IF 5.7 2区 材料科学
Journal of Materials Chemistry C Pub Date : 2024-09-16 DOI: 10.1039/D4TC03282A
Elaheh Asgari, Alexandre Robichaud, Paul-Vahé Cicek and Andy Shih
{"title":"Liquid crystal elastomers in soft micro electromechanical systems: a review of recent developments","authors":"Elaheh Asgari, Alexandre Robichaud, Paul-Vahé Cicek and Andy Shih","doi":"10.1039/D4TC03282A","DOIUrl":"https://doi.org/10.1039/D4TC03282A","url":null,"abstract":"<p >Liquid crystal elastomers (LCEs) are a class of electroactive polymers (EAPs) that have attracted significant attention in the microelectromechanical system (MEMS) community due to their unique combination of properties, including different actuation mechanisms, high generated strain (up to 400%), preprogrammed deformation, and biocompatibility. LCEs have the potential to revolutionize MEMS devices by enabling the development of miniaturized actuators, sensors, and other functional components with enhanced performance. This review provides a comprehensive overview of LCE-based devices for MEMS applications. It begins by exploring the fundamentals of LCEs, delving into their core component, liquid crystals (LCs). Subsequently, it examines the LCE preparation process, encompassing synthesis techniques, and alignment mechanisms. The review then delves into the state-of-the-art LCE-based devices used in MEMS, discussing their functionalities, characterization, and fabrication methods. A particular focus is placed on cutting-edge methods for integrating LCEs with MEMS using compatible fabrication techniques. Looking towards the future, the review introduces ionic liquid crystal elastomers (iLCEs) as a promising novel class of LCE-based materials with the potential to address limitations and enhance the performance of conventional LCEs in MEMS. Finally, a conclusion lays out future research orientations in iLCE-based MEMS technologies and the challenges that remain to be addressed in order to further expand their applications.</p>","PeriodicalId":84,"journal":{"name":"Journal of Materials Chemistry C","volume":null,"pages":null},"PeriodicalIF":5.7,"publicationDate":"2024-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142368694","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Growth, characterization and theoretical analysis of α-SrGeO3 as a candidate mid-IR stimulated Raman scattering crystal† 作为候选中红外受激拉曼散射晶体的 α-SrGeO3 的生长、表征和理论分析†。
IF 5.7 2区 材料科学
Journal of Materials Chemistry C Pub Date : 2024-09-16 DOI: 10.1039/D4TC03340J
Hailong Wang, Bin Li, Ying Zhou, Guimei Zheng, Xue Zhang and Songming Wan
{"title":"Growth, characterization and theoretical analysis of α-SrGeO3 as a candidate mid-IR stimulated Raman scattering crystal†","authors":"Hailong Wang, Bin Li, Ying Zhou, Guimei Zheng, Xue Zhang and Songming Wan","doi":"10.1039/D4TC03340J","DOIUrl":"https://doi.org/10.1039/D4TC03340J","url":null,"abstract":"<p >The α-BaGeO<small><sub>3</sub></small> crystal is a potential stimulated Raman scattering (SRS) medium for use in generating lasers at wavelengths in the range of 2.1–2.4 μm. However, the growth of a large-sized and high-quality α-BaGeO<small><sub>3</sub></small> crystal is still challenging. Here, we turn the attention to its analogue, α-SrGeO<small><sub>3</sub></small>. The α-SrGeO<small><sub>3</sub></small> crystal was grown by the high-temperature solution method under conditions similar to those for growth of α-BaGeO<small><sub>3</sub></small>. The grown α-SrGeO<small><sub>3</sub></small> single crystals have larger sizes (approximately 8 × 12 × 10 mm<small><sup>3</sup></small>) and higher quality than α-BaGeO<small><sub>3</sub></small>. A strong Raman peak at 813 cm<small><sup>−1</sup></small> and a wide transparent window from 0.22 to 5.78 μm indicate that the α-SrGeO<small><sub>3</sub></small> crystal is a promising SRS crystal working in the 2.1–2.4 μm wavelength range. From density functional theory (DFT) computations, the strongest Raman peak, the ultraviolet cut-off edge and the infrared cut-off edge of α-SrGeO<small><sub>3</sub></small> are all related to the [Ge<small><sub>3</sub></small>O<small><sub>9</sub></small>]<small><sup>6−</sup></small> ring, the basic building unit in both α-SrGeO<small><sub>3</sub></small> and α-BaGeO<small><sub>3</sub></small>, which suggests that the [Ge<small><sub>3</sub></small>O<small><sub>9</sub></small>]<small><sup>6−</sup></small> ring is a valuable structural group for developing new mid-IR SRS crystals.</p>","PeriodicalId":84,"journal":{"name":"Journal of Materials Chemistry C","volume":null,"pages":null},"PeriodicalIF":5.7,"publicationDate":"2024-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.rsc.org/en/content/articlepdf/2024/tc/d4tc03340j?page=search","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142565699","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
In situ synthesis of lithiophilic Ag sites in 3D MOF-derived nitrogen-doped porous carbon composites towards dendrite-free lithium metal anodes† 在三维 MOF 衍生的掺氮多孔碳复合材料中原位合成亲锂银位点,实现无枝晶的锂金属阳极
IF 5.7 2区 材料科学
Journal of Materials Chemistry C Pub Date : 2024-09-16 DOI: 10.1039/D4TC01835D
Xiaoxuan Li and Longwei Yin
{"title":"In situ synthesis of lithiophilic Ag sites in 3D MOF-derived nitrogen-doped porous carbon composites towards dendrite-free lithium metal anodes†","authors":"Xiaoxuan Li and Longwei Yin","doi":"10.1039/D4TC01835D","DOIUrl":"10.1039/D4TC01835D","url":null,"abstract":"<p >The uncontrolled dendritic lithium growth and excessive volume expansion pose significant challenges to the practical applications of metallic lithium, which is considered as the most promising high-energy-density anode material for rechargeable batteries. In this work, derived from metal organic framework (MOF), we design a novel Ag@nitrogen-doped porous carbon framework (Ag@NPCF) composite with silver (Ag) nanoparticles uniformly distributed. The 3D MOF microporous structure effectively stabilizes the volume changes during the repetitive plating/stripping of Li. Lithiophilic nitrogen-doped carbon and Ag nanoparticles, acting as uniform nucleation sites reduce local current density and guide uniform nucleation and deposition of Li ions. Therefore, the Ag@NPCF electrodes displayed excellent cyclic stability for over 600 cycles with 98.8% coulombic efficiency and a stable cyclic lifespan of 1600 h in the symmetrical cells. Additionally, full cells coupled with an LiFePO<small><sub>4</sub></small> commercialized cathode deliver excellent cyclic and rate performance.</p>","PeriodicalId":84,"journal":{"name":"Journal of Materials Chemistry C","volume":null,"pages":null},"PeriodicalIF":5.7,"publicationDate":"2024-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142259515","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
(C2H10N2)[Zn2(HPO4)2Cl2]: substitution-activated new short-wave ultraviolet phosphate with pivotal dual-property enhancement† (C2H10N2)[Zn2(HPO4)2Cl2]:取代激活的新型短波紫外磷酸盐,具有关键的双重性能增强作用†。
IF 5.7 2区 材料科学
Journal of Materials Chemistry C Pub Date : 2024-09-16 DOI: 10.1039/D4TC03504F
Zhi Fang, Yu-Ming Pan, Pei Han, Bing-Ping Yang and Mei-Hong Duan
{"title":"(C2H10N2)[Zn2(HPO4)2Cl2]: substitution-activated new short-wave ultraviolet phosphate with pivotal dual-property enhancement†","authors":"Zhi Fang, Yu-Ming Pan, Pei Han, Bing-Ping Yang and Mei-Hong Duan","doi":"10.1039/D4TC03504F","DOIUrl":"https://doi.org/10.1039/D4TC03504F","url":null,"abstract":"<p >Exploration of ultraviolet phosphates with large optical anisotropy is of great significance to the development of ultraviolet lasers. Nevertheless, due to the inherent contradiction between wide band gap and large birefringence, the exploration of ultraviolet phosphates with improved optical anisotropy is a great challenge. Herein, a new short-wave ultraviolet phosphate of (C<small><sub>2</sub></small>H<small><sub>10</sub></small>N<small><sub>2</sub></small>)[Zn<small><sub>2</sub></small>(HPO<small><sub>4</sub></small>)<small><sub>2</sub></small>Cl<small><sub>2</sub></small>] was rationally obtained through a substitution-oriented design strategy, namely the excess substitution of bridging O<small><sup>2−</sup></small> with Cl<small><sup>−</sup></small> and OH<small><sup>−</sup></small> as well as the aliovalent substitution of K<small><sup>+</sup></small> with ethylenediamine polycations with reference to the prototype of β-K<small><sub>2</sub></small>[Zn<small><sub>2</sub></small>(PO<small><sub>4</sub></small>)<small><sub>2</sub></small>]. Having benefitted from this substitution, (C<small><sub>2</sub></small>H<small><sub>10</sub></small>N<small><sub>2</sub></small>)[Zn<small><sub>2</sub></small>(HPO<small><sub>4</sub></small>)<small><sub>2</sub></small>Cl<small><sub>2</sub></small>] was characterized by dual property enhancement as compared with β-K<small><sub>2</sub></small>[Zn<small><sub>2</sub></small>(PO<small><sub>4</sub></small>)<small><sub>2</sub></small>]. Specifically, the band gap was expanded from 3.848 eV to 5.043 eV and the birefringence was dramatically enlarged from 0.011@546 nm to 0.066@546 nm, indicating the feasibility of substitution for the design of ultraviolet phosphates with enhanced birefringence.</p>","PeriodicalId":84,"journal":{"name":"Journal of Materials Chemistry C","volume":null,"pages":null},"PeriodicalIF":5.7,"publicationDate":"2024-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142595211","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Broadband polarization conversion metasurface for beam deflection with switchable characteristics 用于光束偏转的具有可切换特性的宽带偏振转换元表面
IF 5.7 2区 材料科学
Journal of Materials Chemistry C Pub Date : 2024-09-16 DOI: 10.1039/D4TC03245D
Yuhao Liang, Yuxin Liu, Weikai Huang and Yu-Sheng Lin
{"title":"Broadband polarization conversion metasurface for beam deflection with switchable characteristics","authors":"Yuhao Liang, Yuxin Liu, Weikai Huang and Yu-Sheng Lin","doi":"10.1039/D4TC03245D","DOIUrl":"10.1039/D4TC03245D","url":null,"abstract":"<p >We present a dynamically switchable polarization conversion metasurface (PCM) integrated with an electromechanical actuator (EMA) that enabled the switching of states for the reflected wavefront of circularly polarized waves in the terahertz (THz) spectrum. The unit cell of the proposed PCM was composed of double L-shaped Au structures covering a dielectric layer suspended atop a bottom reflective mirror layer. The PCM showed a broad polarization conversion band ranging from 0.74 THz to 1.64 THz with a polarization conversion ratio &gt;90% for incident linear polarized (LP) and circular polarized (CP) waves. Within this broadband, the full 2π phase shifts of the reflected orthogonal CP wave could be obtained by rotating the orientation angle of the PCM unit cell spanning a wide frequency range. The anomalous reflection effect of PCM was simulated and discussed to validate the performance of the proposed switchable coding metasurface based on Pancharatnam–Berry phase theory and the generalized Snell's law. In particular, the reflection efficiency could be tuned dynamically by transforming the movable configuration. The proposed PCM had significant potential for applications in imaging and communication systems, which opens new avenues for the development of multifunctional devices that can modulate THz wavefronts.</p>","PeriodicalId":84,"journal":{"name":"Journal of Materials Chemistry C","volume":null,"pages":null},"PeriodicalIF":5.7,"publicationDate":"2024-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142259521","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Recent progress of inorganic photoresists for next-generation EUV lithography 用于下一代超紫外光刻的无机光刻胶的最新进展
IF 5.7 2区 材料科学
Journal of Materials Chemistry C Pub Date : 2024-09-16 DOI: 10.1039/D4TC02671C
Yeo Kyung Kang, Sun Jin Lee, Sunghun Eom, Byeong Geun Kim, Chan-Cuk Hwang and Myung-Gil Kim
{"title":"Recent progress of inorganic photoresists for next-generation EUV lithography","authors":"Yeo Kyung Kang, Sun Jin Lee, Sunghun Eom, Byeong Geun Kim, Chan-Cuk Hwang and Myung-Gil Kim","doi":"10.1039/D4TC02671C","DOIUrl":"https://doi.org/10.1039/D4TC02671C","url":null,"abstract":"<p >The continuous scaling down of semiconductor devices has significantly benefited consumers by enhancing the device performance, portability, power efficiency, and affordability. Recently, chip makers have embraced extreme ultraviolet (EUV) lithography to spearhead the market leadership of sub-10 nm patterning. This surge in EUV adoption has sparked extensive research on EUV photoresists, focusing on materials with various metallic elements to improve the EUV sensitivity and advance nanolithography. Previous studies explored the determinants of sensitivity and pattern formation. Recently, interest has shifted toward dry photoresists and innovative techniques, such as resistless lithography. This review summarizes the research on inorganic EUV photoresists and outlines strategies to boost the lithographic performance and tackle future challenges.</p>","PeriodicalId":84,"journal":{"name":"Journal of Materials Chemistry C","volume":null,"pages":null},"PeriodicalIF":5.7,"publicationDate":"2024-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142409097","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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