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Enhanced Fiber Bragg Grating Interrogation Using Deep Learning and Fabry-Pérot Liquid Crystal: A CGAN-CNN for Improved Wavelength Detection
IF 4.3 2区 综合性期刊
IEEE Sensors Journal Pub Date : 2025-02-26 DOI: 10.1109/JSEN.2025.3543132
Minyechil Alehegn Tefera;Cheng-Kai Yao;Hao-Kuan Lee;Ssu-Han Liu;Yibeltal Chanie Manie;Ming-Che Chan;Peng-Chun Peng
{"title":"Enhanced Fiber Bragg Grating Interrogation Using Deep Learning and Fabry-Pérot Liquid Crystal: A CGAN-CNN for Improved Wavelength Detection","authors":"Minyechil Alehegn Tefera;Cheng-Kai Yao;Hao-Kuan Lee;Ssu-Han Liu;Yibeltal Chanie Manie;Ming-Che Chan;Peng-Chun Peng","doi":"10.1109/JSEN.2025.3543132","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3543132","url":null,"abstract":"In this article, we propose a novel method that integrates deep learning with Fabry-Pérot liquid crystal (FP-LC) technology for fiber Bragg grating (FBG) interrogation. The use of FP-LC enhances the measurement range and enables high sensitivity in FBG sensors, making them appropriate for a wide range of applications requiring precise and responsive sensing. However, collecting a large amount of real experimental FBG sensor data is time-consuming, technically challenging, and resource-intensive. To address this issue, we utilize a conditional generative adversarial network (CGAN) to generate a sufficient amount of synthetic training data. The CGAN generates data conditioned on real FBG sensor data, ensuring that the generated data closely look like real experimental data distributions, which is crucial for effective model training. Moreover, we proposed a convolutional neural network (CNN) method to solve crosstalk problems, to improve sensing accuracy, and to precisely detect the peak wavelength of each FBG sensor. The experimental results demonstrated that the proposed CGAN technique effectively generates a large amount of data to improve the performance of the proposed CNN model. Furthermore, the results proved that the CNN trained on CGAN-generated data significantly improves the detection speed and accuracy of central wavelength measurements compared to traditional approaches. Hence, the proposed system is cost-effective, easy to set up for experiments, increases the feasibility and portability of modularization, fast and flexible, overcoming data shortages, and improving the sensing accuracy of wavelength detection for FBG sensor systems.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 7","pages":"11123-11130"},"PeriodicalIF":4.3,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143748741","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Localizing and Tracking the Transmitter Bionanosensor in Mobile Molecular Communication by Deep Learning
IF 4.3 2区 综合性期刊
IEEE Sensors Journal Pub Date : 2025-02-26 DOI: 10.1109/JSEN.2025.3543552
Zhen Cheng;Heng Liu;Jianlong Zheng;Weihua Gong;Kaikai Chi
{"title":"Localizing and Tracking the Transmitter Bionanosensor in Mobile Molecular Communication by Deep Learning","authors":"Zhen Cheng;Heng Liu;Jianlong Zheng;Weihua Gong;Kaikai Chi","doi":"10.1109/JSEN.2025.3543552","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3543552","url":null,"abstract":"Mobile molecular communication (MMC) system has been widely used in the field of medical drug delivery, disease detection, and target tracking. Considering the MMC system with one mobile transmitter and multiple fixed receivers that are bionanosensors, it is of great significance to localize and track the mobile transmitter in this MMC system. The existing work mainly focused on the deep neural network (DNN), which was utilized to locate the position of the receiver in static molecular communication (MC). In this article, we consider using the Transformer-based model to predict the position of the transmitter in a 2-D unbounded MMC environment by capturing the time series of the number of molecules in each time slot at multiple receivers. The simulation results show that the Transformer-based model performs better than the DNN-based model in localizing the transmitter. When the time slot is smaller, we find that the model can approximately track the trajectory of the transmitter. In addition, we also demonstrate the factors that affect the performance of localizing and tracking the transmitter by using the model.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 7","pages":"10583-10593"},"PeriodicalIF":4.3,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143748962","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Multimodal Hand Movement Recognition Framework Based on S-Transform and ISDNet
IF 4.3 2区 综合性期刊
IEEE Sensors Journal Pub Date : 2025-02-26 DOI: 10.1109/JSEN.2025.3542902
Lei Shi;Ranran Gui;Qunfeng Niu;Peng Li
{"title":"A Multimodal Hand Movement Recognition Framework Based on S-Transform and ISDNet","authors":"Lei Shi;Ranran Gui;Qunfeng Niu;Peng Li","doi":"10.1109/JSEN.2025.3542902","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3542902","url":null,"abstract":"In the rehabilitation of hand movement disorders, multimodal signal-based hand movement recognition (HMR) plays a crucial role in enhancing therapeutic interventions and improving patient outcomes. However, existing methods face challenges such as suboptimal feature fusion and limited recognition performance. To address these issues, this article proposes a novel multimodal HMR framework. First, a signal fusion algorithm based on Spearman’s rank correlation coefficient (SRCC) is utilized to effectively integrate features from surface electromyography (sEMG) and triaxial acceleration signals (TASs), laying a solid foundation for subsequent feature fusion. Next, a feature fusion algorithm based on S-transform (S-T) and RGB image technology is developed, transforming signals into 3-D time-frequency fusion feature maps (3D-TFTTMs) to more comprehensively capture the time-frequency characteristics of the signals. Subsequently, a deep learning model, inception-SENet-DenseNet (ISDNet), is designed, incorporating both inception and squeeze-and-excitation network (SENet) modules. The inception module extracts fused features, while SENet dynamically adjusts channel weights, significantly enhancing recognition performance. Evaluation on the Ninapro DB2&3, DB5, and DB7 databases demonstrates that ISDNet achieves HMR accuracies of 97.02%, 93.78%, and 95.37%, respectively, significantly outperforming existing multimodal HMR methods. The results validate the effectiveness of the proposed framework in multimodal fusion and highlight its potential for advancing HMR technology, with broad application prospects in areas such as prosthetics, rehabilitation, and robotics.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 7","pages":"11672-11682"},"PeriodicalIF":4.3,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143761366","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Infected and Noninfected Diseases Detection for Human Health Using Surface Plasmon Resonance Biosensors: A Review
IF 4.3 2区 综合性期刊
IEEE Sensors Journal Pub Date : 2025-02-26 DOI: 10.1109/JSEN.2025.3539783
Rajeev Kumar;Lokendra Singh;S. Malathi
{"title":"Infected and Noninfected Diseases Detection for Human Health Using Surface Plasmon Resonance Biosensors: A Review","authors":"Rajeev Kumar;Lokendra Singh;S. Malathi","doi":"10.1109/JSEN.2025.3539783","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3539783","url":null,"abstract":"Human health is affected by a vast spectrum of ailments, collectively called diseases, which obstruct the proper functioning of the body and may stem from diverse origins, including genetic alterations, environmental factors, or pathogenic infections. These diseases are often categorized into groups, such as infectious diseases, triggered by bacteria, viruses, fungi, or parasites, and noninfectious diseases, encompassing genetic disorders, autoimmune conditions, and persistent illnesses like cardiovascular disease and diabetes. Infectious diseases may disseminate through direct or indirect contact, air, food, water, or vectors, whereas noninfectious diseases are frequently associated with lifestyle practices, genetic predisposition, or environmental influences. Progress in modern medicine, including vaccines, antibiotics, and diagnostic technologies, has markedly reduced the impact of numerous diseases; however, challenges continue due to the emergence of new infections, antibiotic resistance, and the escalating prevalence of noncommunicable diseases. Confronting human diseases necessitates a holistic strategy that integrates public health measures, healthcare interventions, and biomedical research to enhance prevention, diagnosis, and treatment methods, consequently improving global health outcomes. Infectious and noninfectious diseases (autoimmune disorders, cancer, and cardiovascular diseases) caused by bacteria, viruses, and fungi can be identified quickly and accurately with surface plasmon resonance (SPR) sensors. The ease and capacity of SPR technology to track biomolecular interactions enhances its adaptability, which allows early diagnosis and individualized treatment plans for a variety of medical disorders.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 7","pages":"10556-10565"},"PeriodicalIF":4.3,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143748957","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The Effect of Length and Curvature on Quantum-Enhanced Temperature Sensing in a Fiber-Based Sagnac Loop
IF 4.3 2区 综合性期刊
IEEE Sensors Journal Pub Date : 2025-02-26 DOI: 10.1109/JSEN.2025.3542813
Hailong Wang;Zehua Chen;Tenghui Mao;Dongxu Wang;Cheng Peng;Yajuan Zhang;Chunliu Zhao
{"title":"The Effect of Length and Curvature on Quantum-Enhanced Temperature Sensing in a Fiber-Based Sagnac Loop","authors":"Hailong Wang;Zehua Chen;Tenghui Mao;Dongxu Wang;Cheng Peng;Yajuan Zhang;Chunliu Zhao","doi":"10.1109/JSEN.2025.3542813","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3542813","url":null,"abstract":"In this work, we theoretically proposed and experimentally demonstrated the enhanced effect of prior curvature precondition on temperature sensing in a quantum-enhanced sensing system, which is constructed by combining an all-fiber two-mode squeezed light source and a Sagnac loop. By choosing the prior optimum length and curvature of polarization-maintaining fiber inside the Sagnac loop, both signal-to-noise ratio (SNR) and sensitivity can be effectively enhanced. The experimental results are summarized as follows. SNR is enhanced by the factor of 0.38 dB under balanced measurement condition. Under unbalanced measurement condition, the enhanced factors with regard to sensing depth are 0.22 and 2.34 dB for the classical double-channel light source and two-mode squeezed light source, respectively. With the support of curvature precondition, the sensing depth of the former one 15.62 dB is enhanced to 31.49 dB of the latter one by an enhanced factor of 15.87 dB, which is larger than 13.75 dB in the absence of curvature precondition, this enhanced effect still exists in the temperature sensitivity (0.982 dB/°C <1.134 dB/°C) and SNR (0.54 dB <1.7 dB). These results confirm the potential prospects of using the cross effects from other physical quantities to enhance temperature sensing in a quantum-enhanced sensing system.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 7","pages":"11102-11110"},"PeriodicalIF":4.3,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143748973","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Detection of Silver(I) Ions by Ion-Imprinted SPR Sensors
IF 4.3 2区 综合性期刊
IEEE Sensors Journal Pub Date : 2025-02-26 DOI: 10.1109/JSEN.2025.3543283
Duygu Çimen;Mitra Jalilzadeh;Adil Denizli
{"title":"Detection of Silver(I) Ions by Ion-Imprinted SPR Sensors","authors":"Duygu Çimen;Mitra Jalilzadeh;Adil Denizli","doi":"10.1109/JSEN.2025.3543283","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3543283","url":null,"abstract":"In this study, Ag(I) ion-imprinted and nonimprinted (NIP) poly(hydroxyethyl methacrylate-methacryloylamidocysteine) [poly(HEMA-MAC)] polimeric film-based surface plasmon resonance (SPR) sensors were prepared for the determination of silver ions (I) (Ag(I) ions). Atomic force microscopy (AFM) and contact angle measurements were used for the characterization of Ag(I) ion-imprinted and NIP SPR sensors. Kinetic studies are the limit of detection of 0.015 nM in the Ag(I) ions concentration range ranging from 0.5 to 1000 nM. When the selectivity of Ag(I) ion-imprinted SPR sensors was compared with the competing ions as lead (II) and copper (II) ions, it was shown that Ag(I) ions were 2.74 times and 7.04 times more selective than lead (II) and copper (II) ions, respectively. The reusability and shelf life of the developed SPR sensor has shown a decrease of 12.08% compared to kinetic analyses performed after 6 months. In addition, the determination of Ag(I) ions from real water samples was made using both SPR sensor and atomic absorption spectroscopy (AAS).","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 7","pages":"10575-10582"},"PeriodicalIF":4.3,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143748934","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Multisensor Plug-and-Play Navigation Based on Resilient Information Filter
IF 4.3 2区 综合性期刊
IEEE Sensors Journal Pub Date : 2025-02-26 DOI: 10.1109/JSEN.2025.3540790
Qian Meng;Chang Su;Yingying Jiang;Weisong Wen;Xiaolin Meng
{"title":"Multisensor Plug-and-Play Navigation Based on Resilient Information Filter","authors":"Qian Meng;Chang Su;Yingying Jiang;Weisong Wen;Xiaolin Meng","doi":"10.1109/JSEN.2025.3540790","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3540790","url":null,"abstract":"To improve the positioning accuracy and resilience of the multisensor integration, a resilient plug-and-play navigation method based on information filter (IF) is proposed in this article. As the dual form of Kalman filter (KF), IF turns the likelihood product into a sum, which can fully utilize asynchronous sensor measurements for fusion and realize plug-and-play navigation flexibly. Furthermore, a resilient factor based on the principle of chi-square test is implemented to adjust the sensor information, aiming to reduce the impact of faulty measurements under challenging scenarios. By conducting and analyzing the vehicle experiments in the urban environment, the proposed method shows better performance over traditional KF, with the root mean square (rms) error reduced from 9.13 to 3.28 m. Plug-and-play navigation achieves a 51.37% improvement in positioning accuracy by utilizing more suitable sensor measurements and propagation intervals, which can decrease the sensitivity to measurement noise and faults. The resilient factor directly addresses the faults themselves and improves the positioning performance by 26.13%, further enhancing the system’s resilience and robustness to faulty information. This resilient IF method is fully validated as effective for multisensor plug-and-play navigation.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 7","pages":"11563-11573"},"PeriodicalIF":4.3,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143761556","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
AD2T: Multivariate Time-Series Anomaly Detection With Association Discrepancy Dual-Decoder Transformer
IF 4.3 2区 综合性期刊
IEEE Sensors Journal Pub Date : 2025-02-26 DOI: 10.1109/JSEN.2025.3543835
Zezhong Li;Wei Guo;Jianpeng An;Qi Wang;Yingchun Mei;Rongshun Juan;Tianshu Wang;Yang Li;Zhongke Gao
{"title":"AD2T: Multivariate Time-Series Anomaly Detection With Association Discrepancy Dual-Decoder Transformer","authors":"Zezhong Li;Wei Guo;Jianpeng An;Qi Wang;Yingchun Mei;Rongshun Juan;Tianshu Wang;Yang Li;Zhongke Gao","doi":"10.1109/JSEN.2025.3543835","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3543835","url":null,"abstract":"Multivariate time-series (MTS) anomaly detection is of great importance in both condition monitoring and malfunction identification in multisensor systems. Current MTS anomaly detection approaches are typically based on reconstruction, prediction, or association discrepancy learning algorithms. These methods detect anomalies by learning hidden representations of entire sequences, modeling dependencies at a single time-step level, or calculating an association-based metric inherently distinguishable between regular and deviant points. However, most existing methods typically fail to leverage all three types of models simultaneously to enhance overall performance as well as often disregard the correlations between different sensors. To address the issues above, this article proposes a novel deep learning-based unsupervised MTS anomaly detection algorithm called association discrepancy dual-decoder transformer (AD2T). AD2T employs a dual-decoder architecture to accommodate reconstruction, prediction, and association discrepancy learning tasks, thereby effectively utilizing information across these tasks to better characterize MTS data. We further develop a min-max training strategy to jointly optimize all the aforementioned tasks. Additionally, we propose a compound embedding module based on dilated causal convolution to simultaneously capture correlations in both temporal and sensor dimensions. Extensive empirical studies on five multisensor system datasets from the aerospace, server, and water treatment domains have demonstrated the superiority of our method, achieving an average improvement of 1.96% in the <inline-formula> <tex-math>$F1$ </tex-math></inline-formula>-score compared to state-of-the-art (SOTA) methods.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 7","pages":"11710-11721"},"PeriodicalIF":4.3,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143761492","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
AIS Data-Driven Maritime Traffic Flow Prediction and Density Visualization Using Multitime Scale Temporal Feature Fusion Network
IF 4.3 2区 综合性期刊
IEEE Sensors Journal Pub Date : 2025-02-26 DOI: 10.1109/JSEN.2024.3525094
Yukuan Wang;Ryan Wen Liu;Jingxian Liu;Lichao Yang;Yang Liu
{"title":"AIS Data-Driven Maritime Traffic Flow Prediction and Density Visualization Using Multitime Scale Temporal Feature Fusion Network","authors":"Yukuan Wang;Ryan Wen Liu;Jingxian Liu;Lichao Yang;Yang Liu","doi":"10.1109/JSEN.2024.3525094","DOIUrl":"https://doi.org/10.1109/JSEN.2024.3525094","url":null,"abstract":"Maritime traffic flow prediction is essential for the development of intelligent transportation systems in the maritime domain. The widespread deployment of automatic identification system (AIS) sensors generates vast amounts of real-time trajectory data, which are crucial for traffic state perception and vessel position tracking. This study aims to improve maritime traffic state prediction by leveraging AIS data. The existing methods often face two key challenges: insufficient consideration of traffic flow characteristics across different time scales, which limits the comprehensive capture of temporal features, and difficulties in estimating the uncertainty in ship position distributions. To address these challenges, we propose a multitime scale temporal feature fusion network (MSTFFN) model. This model enhances the transformer architecture for maritime traffic flow prediction by extracting multiscale temporal features that encapsulate the dynamic nature of traffic patterns. Additionally, a Gaussian distribution process is employed to effectively visualize traffic density. Experiments on real-world datasets demonstrate the superior performance of the MSTFFN model in traffic flow prediction tasks. Compared to baseline models, such as transformer, GRU, long short-term memory (LSTM), bidirectional LSTM (Bi-LSTM), and CovLSTM—each improved through multitime scale feature fusion—the proposed MSTFFN achieves superior predictive accuracy. Moreover, the advanced visualization of traffic density facilitates more intuitive and efficient maritime traffic management, thereby enhancing the application of AIS data across ship-to-shore and management operations in the maritime industry.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 7","pages":"11357-11365"},"PeriodicalIF":4.3,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143748793","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design, Preparation, and Performance Study of a Highly Reliable Temperature Measurement Array Based on NTC Thin Films
IF 4.3 2区 综合性期刊
IEEE Sensors Journal Pub Date : 2025-02-26 DOI: 10.1109/JSEN.2025.3542835
Tao Huang;Bo Yang;Yuxian Song;Yingying Dou;Wenwen Kong;Aimin Chang
{"title":"Design, Preparation, and Performance Study of a Highly Reliable Temperature Measurement Array Based on NTC Thin Films","authors":"Tao Huang;Bo Yang;Yuxian Song;Yingying Dou;Wenwen Kong;Aimin Chang","doi":"10.1109/JSEN.2025.3542835","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3542835","url":null,"abstract":"This article presents the development of a highly reliable temperature measurement system based on negative temperature coefficient (NTC) thermistor thin films integrated into micro-electromechanical system (MEMS) sensor arrays. Leveraging COMSOL Multiphysics simulations, the system optimizes sensor array configuration to accurately predict and manage thermal gradients on wafer surfaces. It features several technical advancements previously uncombined in temperature sensing applications. First, a novel fabrication process involving magnetron sputtering significantly enhances the uniformity and sensitivity of the NTC thin films. Second, high-resolution photolithography ensures precise patterning of sensor elements, achieving the system’s ultrafast thermal response time of 0.34 s and exceptional measurement accuracy of <inline-formula> <tex-math>$0.5~^{circ }$ </tex-math></inline-formula>C across a broad operational range of <inline-formula> <tex-math>$0~^{circ }$ </tex-math></inline-formula>C–<inline-formula> <tex-math>$70~^{circ }$ </tex-math></inline-formula>C. The integrated sensors exhibit less than 3% resistance drift in high-stress testing environments, underscoring their stability and robustness. By accurately correlating temperature variations with process defects, and with a coefficient of determination (<inline-formula> <tex-math>${R}^{{2}}$ </tex-math></inline-formula>) calculated at 0.995, our system effectively enhances process control and contributes to yield improvement and device reliability in semiconductor manufacturing, thereby advancing temperature sensing technology in high-precision industrial applications.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 7","pages":"10619-10627"},"PeriodicalIF":4.3,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143748963","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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