膜梁结构的大量程石墨烯压力传感器

IF 4.3 2区综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Sensors Journal Pub Date : 2025-06-19 DOI:10.1109/JSEN.2025.3579595

Junqiang Wang;Pengcheng Li;Haiyang Li;Ningning Su;Yonghong Cao

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引用次数: 0

摘要

设计并制作了一种膜-梁混合结构的大量程石墨烯压力传感器，其测量量程可达200 MPa。采用高强度合金钢薄膜作为传感器的弹性元件。石墨烯基敏感元件由氮化硅保护，分布在硅片束的根部。采用Sn99Ag0.3Cu0.7焊接技术，实现了钢膜与硅片的可靠连接。扫描电镜（SEM）显微组织分析证实焊缝界面无缺陷连接。SEM、拉曼光谱和I-V测试结果表明，石墨烯敏感元件具有高质量和稳定的电阻。压力测试表明，该传感器的工作范围可达200 MPa，石墨烯测量因子（GF）值为1.27，灵敏度为3.39 mV/MPa。通过对比，本文开发的大量程石墨烯压力传感器，将推动石墨烯在航空航天、工业控制、石油化工等专业领域的发展和应用。

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A Large-Range Graphene Pressure Sensor With Membrane-Beam Structure

A large-range graphene pressure sensor with a membrane-beam hybrid structure was designed and fabricated, and its measuring range could reach 200 MPa. The membrane made of high-strength alloy steel was used as the elastic element of the sensor. The graphene-based sensitive element was protected by Si3N4 and distributed at the root region of the silicon chip’s beam. The reliable connection between the steel membrane and the silicon chip was realized by solder bonding technology using Sn99Ag0.3Cu0.7. Scanning electron microscopy (SEM) microstructural analysis confirmed defect-free interconnection at the weld interface. Moreover, the results of SEM, Raman spectroscopy, and I–V tests showed that the graphene sensitive element has high quality and stable resistance. The pressure test indicated that the range of the sensor had achieved up to 200 MPa, the graphene gauge factor (GF) value is 1.27, and the sensitivity is 3.39 mV/MPa. According to comparation, this article has developed a large-range graphene pressure sensor, which will advancement facilitate the development and application of graphene in specialized fields, such as aerospace, industrial control, and the petrochemical industry.

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来源期刊

IEEE Sensors Journal 工程技术-工程：电子与电气

CiteScore

7.70

自引率

14.00%

发文量

2058

审稿时长

5.2 months

期刊介绍： The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice