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Effect of period and degree of unbalancing on the structure and resistivity of Cr/CrN magnetron sputtered nano-multilayers 周期和不平衡程度对Cr/CrN磁控溅射纳米多层膜结构和电阻率的影响
2010 IEEE Nanotechnology Materials and Devices Conference Pub Date : 2010-12-03 DOI: 10.1109/NMDC.2010.5652521
D. Marulanda, A. Lousa, J. Olaya
{"title":"Effect of period and degree of unbalancing on the structure and resistivity of Cr/CrN magnetron sputtered nano-multilayers","authors":"D. Marulanda, A. Lousa, J. Olaya","doi":"10.1109/NMDC.2010.5652521","DOIUrl":"https://doi.org/10.1109/NMDC.2010.5652521","url":null,"abstract":"Cr/CrN nano-multilayers have been produced by varying the period and the degree of unbalancing in a magnetron sputtering system in order to study the influence of these parameters in the electrical properties. X-ray Diffraction (XRD) was used to investigate the microstructure characteristics of the multilayers and the Four Point Probe (FPP) technique in the Van der Pawn mode was used to evaluate electrical resistivity. The results show that the resistivity strongly depends on the period and the degree of unbalancing of the magnetron. These nano-multilayers are proposed to be used as contacts in Cu metallization and as diffusion barriers between copper and silicon.","PeriodicalId":423557,"journal":{"name":"2010 IEEE Nanotechnology Materials and Devices Conference","volume":"287 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115765710","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Performance investigation for a silicon nanowire FET biosensor using numerical simulation 硅纳米线场效应晶体管生物传感器性能的数值模拟研究
2010 IEEE Nanotechnology Materials and Devices Conference Pub Date : 2010-12-03 DOI: 10.1109/NMDC.2010.5652491
Yucai Wang, Guangyong Li
{"title":"Performance investigation for a silicon nanowire FET biosensor using numerical simulation","authors":"Yucai Wang, Guangyong Li","doi":"10.1109/NMDC.2010.5652491","DOIUrl":"https://doi.org/10.1109/NMDC.2010.5652491","url":null,"abstract":"Silcion field-effect transistor (SiNW FET) biosensors have recently been demonstrated experimentally for direct, label free, high sensitive, high selective and real time detection of DNA and proteins at very low concentration. Among these experiments, the detection of Biotin/Streptavidin binding is of special interest since the biotin/ Streptavidin system exhibits the strongest noncovalent biological interaction known and is widely demonstrated as a model system to study biorecognition between proteins and other biomolecules. In this paper, a comprehensive modeling theory and simulation approach is presented to account for the underlying detection mechanism of biotin/Streptavidin binding using SiNW FET biosensor. The influence of parameters like the dimension of the SiNW, the doping of the SiNW, and surrounding environment are investigated for the performance optimization of the SiNW FET biosensor. The preliminary simulation results indicate that the optimal sensor performance can be ensured by careful optimization of its parameters and it is feasible to detect binding of single streptavidin molecule when optimal parameters are chosen.","PeriodicalId":423557,"journal":{"name":"2010 IEEE Nanotechnology Materials and Devices Conference","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114397007","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Establishment of transport system for micro structures by using bacteria sheet 利用细菌片建立微结构输送系统
2010 IEEE Nanotechnology Materials and Devices Conference Pub Date : 2010-12-03 DOI: 10.1109/NMDC.2010.5651888
M. Kojima, Tatsuya Miyamoto, M. Nakajima, T. Fukuda
{"title":"Establishment of transport system for micro structures by using bacteria sheet","authors":"M. Kojima, Tatsuya Miyamoto, M. Nakajima, T. Fukuda","doi":"10.1109/NMDC.2010.5651888","DOIUrl":"https://doi.org/10.1109/NMDC.2010.5651888","url":null,"abstract":"In this paper, we established the transport systems for micro structures by using surface swarming of Vibrio alginolyticus. First, we confirmed that YM19 and YM19AcheY, that were a kind of the variant strain of V. alginolyticus appropriating for surface swarming, were able to transport the micro beads. Next, we examined relationship between the transport speed and the diameter of the micro bead. The micro channel was applied to control the cell movement. And then we succeeded in causing the rotational transportation of object through this method.","PeriodicalId":423557,"journal":{"name":"2010 IEEE Nanotechnology Materials and Devices Conference","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122195055","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An equivalent RLC circuit model for the nanoshell impedance 纳米壳阻抗的等效RLC电路模型
2010 IEEE Nanotechnology Materials and Devices Conference Pub Date : 2010-12-03 DOI: 10.1109/NMDC.2010.5652399
S. Smaili, Y. Massoud
{"title":"An equivalent RLC circuit model for the nanoshell impedance","authors":"S. Smaili, Y. Massoud","doi":"10.1109/NMDC.2010.5652399","DOIUrl":"https://doi.org/10.1109/NMDC.2010.5652399","url":null,"abstract":"Modeling Nanoparticles using impedances and circuit equivalents is a powerful tool that allows the development of efficient schemes for the analysis and design of nanoparticle based systems. In this paper, we provide a method for acquiring a circuit realization of the nanoshell modeled as an impedance. In particular, our circuit realization separates the elements arising from ohmic losses from those that are a result of the ideal properties of metals.","PeriodicalId":423557,"journal":{"name":"2010 IEEE Nanotechnology Materials and Devices Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121306284","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Driving magnetic cells for information storage and propagation 驱动磁细胞进行信息存储和传播
2010 IEEE Nanotechnology Materials and Devices Conference Pub Date : 2010-12-03 DOI: 10.1109/NMDC.2010.5652211
D. Karunaratne, J. Pulecio, S. Bhanja
{"title":"Driving magnetic cells for information storage and propagation","authors":"D. Karunaratne, J. Pulecio, S. Bhanja","doi":"10.1109/NMDC.2010.5652211","DOIUrl":"https://doi.org/10.1109/NMDC.2010.5652211","url":null,"abstract":"Single domain magnets serve as an excellent mechanism to store and preserve Boolean information. This work is an effort to establish that information can not only be stored and altered as in memory but also can be propagated in a causal fashion from the driver to the driven cell in presence of an external clocking field.","PeriodicalId":423557,"journal":{"name":"2010 IEEE Nanotechnology Materials and Devices Conference","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122299147","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Fabrication of high-performance voltage inverters based on carbon nanotube field-effect transistors 基于碳纳米管场效应晶体管的高性能电压逆变器的研制
2010 IEEE Nanotechnology Materials and Devices Conference Pub Date : 2010-12-03 DOI: 10.1109/NMDC.2010.5652509
K. Maehashi, T. Kishimoto, Y. Ohno, Koichi Inoue, K. Matsumoto
{"title":"Fabrication of high-performance voltage inverters based on carbon nanotube field-effect transistors","authors":"K. Maehashi, T. Kishimoto, Y. Ohno, Koichi Inoue, K. Matsumoto","doi":"10.1109/NMDC.2010.5652509","DOIUrl":"https://doi.org/10.1109/NMDC.2010.5652509","url":null,"abstract":"We demonstrated high-performance complementary voltage inverters based on top-gated carbon nanotube field-effect transistors (CNTFETs) with SiNx passivation films. The carrier type of CNTFETs was controlled by forming condition of SiNx passivation films. Complementary voltage inverters comprising p- and n-type CNTFETs were fabricated on the same SiO2 substrate. The static transfer and noise margin characteristics of the CNTFET based inverters were investigated. It was found that a gain of approximately 24 was achieved and that the device was robust against noise.","PeriodicalId":423557,"journal":{"name":"2010 IEEE Nanotechnology Materials and Devices Conference","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131439118","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Micro-nano integration via hybrid control of multiscale manipulators 基于多尺度机械臂混合控制的微纳集成
2010 IEEE Nanotechnology Materials and Devices Conference Pub Date : 2010-12-03 DOI: 10.1109/NMDC.2010.5652567
R. Murthy, Aditya N. Das, H. Stephanou
{"title":"Micro-nano integration via hybrid control of multiscale manipulators","authors":"R. Murthy, Aditya N. Das, H. Stephanou","doi":"10.1109/NMDC.2010.5652567","DOIUrl":"https://doi.org/10.1109/NMDC.2010.5652567","url":null,"abstract":"Successful commercialization of Nanosystems based devices largely depends on the development of manufacturing tools and strategies that address micro and nanoscale integration challenges at systems level. The present work brings out some of the challenges involved in accomplishing this, and presents both hardware and software based strategies used to accomplish this integration. Assembly at the nanoscale demands ultra high precision and involves physical effects vastly different from other scales. In addition to this, the lack of techniques to accomplish simultaneous sensing and manipulation, coupled with slow and bulky metrological equipments such as scanning electron microscopes (SEM) or atomic force microscopes (AFM) make conventional robotics obsolete for micro-nano integration. The integration strategy presented in this paper involves using microrobots to overcome these challenges and implements a new type of control scheme applicable to micro/nanorobotics. This novel and scalable hybrid control has been configured keeping in mind the (i) precision requirements, (ii) tolerance budgets, (iii) sensor field and workspace, and (iv) surface effects. This control scheme is designed to optimize assembly yield and the cycle time.","PeriodicalId":423557,"journal":{"name":"2010 IEEE Nanotechnology Materials and Devices Conference","volume":"62 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132673141","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Contact resistances of carbon nanotubes grown under various conditions 不同生长条件下碳纳米管的接触电阻
2010 IEEE Nanotechnology Materials and Devices Conference Pub Date : 2010-12-03 DOI: 10.1109/NMDC.2010.5652354
Xuhui Sun, K. Li, Raymond Wu, P. Wilhite, Cary Y. Yang
{"title":"Contact resistances of carbon nanotubes grown under various conditions","authors":"Xuhui Sun, K. Li, Raymond Wu, P. Wilhite, Cary Y. Yang","doi":"10.1109/NMDC.2010.5652354","DOIUrl":"https://doi.org/10.1109/NMDC.2010.5652354","url":null,"abstract":"This paper presents an in-depth electrical characterization of contact resistance between metal and vertically aligned carbon nanotubes (CNTs) grown under various conditions. Following the bottom-up approach of interconnect fabrication processes in the nanoelectronics industry, a via test structure to extract the contact resistance is designed and fabricated. The contact resistance is extracted by measuring the resistances of CNT vias with different lengths. The extracted contact resistance dominates the total resistance of CNT vias. Further, the interface between CNT and underlayer metal is investigated using XPS to elucidate the relationship between local electronic structure and contact resistance.","PeriodicalId":423557,"journal":{"name":"2010 IEEE Nanotechnology Materials and Devices Conference","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132723841","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Aptamer-based optical bionano sensor for mercury(II) ions 基于适配体的汞离子光学生物纳米传感器
2010 IEEE Nanotechnology Materials and Devices Conference Pub Date : 2010-12-03 DOI: 10.1109/NMDC.2010.5652331
Kimber L. Brenneman, B. Sen, M. Stroscio, M. Dutta
{"title":"Aptamer-based optical bionano sensor for mercury(II) ions","authors":"Kimber L. Brenneman, B. Sen, M. Stroscio, M. Dutta","doi":"10.1109/NMDC.2010.5652331","DOIUrl":"https://doi.org/10.1109/NMDC.2010.5652331","url":null,"abstract":"The detection of Hg2+ ions at the nanomolar level was achieved using a DNA aptamer as the molecular recognition element. The single stranded DNA sequence known as thrombin binding aptamer (TBA) was conjugated to a quantum dot and a gold nanoparticle to create the mercury-sensing probe. The quantum dot donor and gold nanoparticle acceptor allowed for optical detection via energy transfer using a spectrophotometer. The presence of the analyte caused a decrease in photoluminescence. The quenching efficiency at 500 nM Hg2+ ions with 10 nM aptamer probe was 62%. When the probe was exposed to a much higher concentration of Hg2+ ions, 824 µM, the photoluminescence was completely extinguished.","PeriodicalId":423557,"journal":{"name":"2010 IEEE Nanotechnology Materials and Devices Conference","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132826413","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Carbon nanotube based coils and helices: (Synthesis and applications in electronic, electromagnetic, and mechanical devices) 基于碳纳米管的线圈和螺旋:(在电子、电磁和机械设备中的合成和应用)
2010 IEEE Nanotechnology Materials and Devices Conference Pub Date : 2010-12-03 DOI: 10.1109/NMDC.2010.5652497
P. Bandaru, A. Rao
{"title":"Carbon nanotube based coils and helices: (Synthesis and applications in electronic, electromagnetic, and mechanical devices)","authors":"P. Bandaru, A. Rao","doi":"10.1109/NMDC.2010.5652497","DOIUrl":"https://doi.org/10.1109/NMDC.2010.5652497","url":null,"abstract":"We report on the rational synthesis of coiled carbon nanotube (CNT) and nanowires morphologies, through chemical vapor deposition, made feasible through extensive thermodynamic analysis and modeling. Coil formation is scientifically interesting in that helices abound in nature, e.g., DNA, proteins, etc., and a connection is being made at the nanoscale between carbon based inorganic and organic forms. Such morphologies can be used in a wide variety of applications, e.g., nanoscale electrical inductors and mechanical springs. We have also shown that polymer composites constituted of such helical forms exhibit a greater electromagnetic interference (EMI) shielding efficiency compared to composites constituted from the linear CNTs.","PeriodicalId":423557,"journal":{"name":"2010 IEEE Nanotechnology Materials and Devices Conference","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130448817","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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