{"title":"Deep silicon etching for X-ray diffraction devices fabrication","authors":"H. Miao, M. Mirzaeimoghri, Lei Chen, H. Wen","doi":"10.1109/OMN.2017.8051446","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051446","url":null,"abstract":"We report deep reactive ion etching of silicon gratings via cryogenic and Bosch processes. An aspect ratio of > 50 is achieved for 400 nm period gratings with both processes.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131601388","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Black silicon based iris with reduced light scattering and reflection","authors":"Yousuf D. Almoallem, M. Moghimi, Hongrui Jiang","doi":"10.1109/OMN.2017.8051469","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051469","url":null,"abstract":"This paper reports the fabrication and the characterization of a black silicon based iris that shows significant reduction in the unwanted stray light due to scattering and reflection on the iris surfaces. The iris was characterized by recording the far-field diffraction pattern at a 532-nm wavelength. The intensity at dark rings is reduced by a factor of up to 5, which makes the bright 0th order disk much sharper.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"813 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132034871","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A refractive index sensor based on a packaged microfiber coil resonator","authors":"Xuan-Yi Lu, Lon A. Wang","doi":"10.1109/OMN.2017.8051482","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051482","url":null,"abstract":"We demonstrate a refractive index sensor based on microfiber coil resonator packaged with polydimethylsiloxane to detect glucose solutions with different concentrations. The detection limit of this sensor was about 7×10<sup>−4</sup>.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"62 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127095563","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"High-throughput fabrication of surface plasmon resonance fiber probes using nanotransfer printing method","authors":"C. Lo, N. Huang, Chien-Lin Wu, Lon A. Wang","doi":"10.1109/OMN.2017.8051483","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051483","url":null,"abstract":"We demonstrate a novel fabrication method to make many optical fiber sensing probes with the end face of each optical fiber patterned with submicron scale Au hole-array pattern using novel nano-transfer printing method.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127777291","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
P. Vabishchevich, S. Liu, A. Vaskin, J. Reno, G. Keeler, M. Sinclair, I. Staude, I. Brener
{"title":"Frequency-mixing in GaAs dielectric metasurfaces","authors":"P. Vabishchevich, S. Liu, A. Vaskin, J. Reno, G. Keeler, M. Sinclair, I. Staude, I. Brener","doi":"10.1109/OMN.2017.8051462","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051462","url":null,"abstract":"We experimentally demonstrate resonantly enhanced nonlinear optical processes such as 2nd-, 3rd-, and 4th-harmonic generations, sum-frequency generation, four-wave mixing processes, etc., in the visible and near-IR using GaAs dielectric metasurfaces.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115635133","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jaekwon Lee, Sang-Jin Lee, Seunghwan Moon, Yangkyu Park, Kwanghyun Kim, Jong-Hyun Lee
{"title":"Two-axis MEMS scanner in a resonance operation for diagnosis of middle ear diseases","authors":"Jaekwon Lee, Sang-Jin Lee, Seunghwan Moon, Yangkyu Park, Kwanghyun Kim, Jong-Hyun Lee","doi":"10.1109/OMN.2017.8051466","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051466","url":null,"abstract":"A two-axis electrostatic MEMS scanner was fabricated to realize an OCT probe for middle ear diagnosis. Scanning angles were up to 8 degrees at resonance and the temperature dependence was within 1.2%.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129712155","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Third order nonlinear waveguide with CdSe quantum dots in PFCB nanocomposite core","authors":"M. Nun, Yedidya Lior, D. Marom","doi":"10.1109/OMN.2017.8051441","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051441","url":null,"abstract":"We present our implementation of waveguides for third order nonlinear interactions constructed of 1.3% volume concentration CdSe quantum dots in PFCB polymer. FWM phenomena was observed and waveguide nonlinear coefficient of 7(Wm)−1 was evaluated.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"64 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122582422","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
B. Dong, Chengkuo Lee, Hong Wang, Xianshu Luo, P. Lo
{"title":"Broadband mid-infrared silicon-on-insulator waveguide devices","authors":"B. Dong, Chengkuo Lee, Hong Wang, Xianshu Luo, P. Lo","doi":"10.1109/OMN.2017.8051443","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051443","url":null,"abstract":"We demonstrate SOI waveguide with low propagation and bending loss of 2dB/cm and 0.02dB/90° in the broad mid-infrared range of 3.68–3.88μm. By theoretically analyzing loss mechanisms, we indicate SOI waveguide's intrinsic limitation for mid-infrared application.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133808790","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"CD-like centrifugal microfluidic device for organophosphorus pesticides (OPP) sensing","authors":"Yu‐Sheng Lin, Jingjing Liu","doi":"10.1109/OMN.2017.8051476","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051476","url":null,"abstract":"A centrifugal microfluidic device (CMD) is demonstrated for organophosphorus pesticides (OPP) sensing. CMD is designed as a CD-like to have a sequential sample injection with capillary valves controlled by centrifugal force, i.e. rotational speed (rpm). OPP in CMD could be successfully derived into a mixer at 570 rpm and then spined into a detection reservoir at 2000 rpm. The experiment results indicated that limit of detection (LD) for OPP is 0.01 ppm. A linear relationship between OPP logarithmic concentration (ppm) and inhibition rate is 0.9215.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"335 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123335680","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Keynote We-K: Microscale light emitting diodes: From information display to discovery tools in neuroscience","authors":"J. Rogers, L. Simpson, Kimberly Querrey","doi":"10.1109/OMN.2017.8051434","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051434","url":null,"abstract":"Recent advances in materials science and engineering provide means for constructing high-performance light emitting diodes with unusual sizes, shapes and forms and with efficient operation throughout the infrared, visible and ultraviolet. When combined with high-speed assembly techniques, microscale devices of this type can be configured onto ultrathin polymer filaments for injection into biological tissues, onto elastomeric substrates for use in skin-conformal health diagnostics, and into large-scale sparse arrays for high-speed displays with unmatched brightness, contrast, switching speeds and power efficiency. This talk summarizes the foundational scientific concepts and the engineering designs for these and other applications.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125478430","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}