Two-axis MEMS scanner in a resonance operation for diagnosis of middle ear diseases

2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI:10.1109/OMN.2017.8051466

Jaekwon Lee, Sang-Jin Lee, Seunghwan Moon, Yangkyu Park, Kwanghyun Kim, Jong-Hyun Lee

引用次数: 0

Abstract

A two-axis electrostatic MEMS scanner was fabricated to realize an OCT probe for middle ear diagnosis. Scanning angles were up to 8 degrees at resonance and the temperature dependence was within 1.2%.

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两轴MEMS扫描仪在中耳疾病共振诊断中的应用

为实现中耳诊断OCT探头，制作了两轴静电MEMS扫描仪。共振时扫描角度可达8度，温度依赖性在1.2%以内。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2017 International Conference on Optical MEMS and Nanophotonics (OMN)

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