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2019 IEEE 31st International Conference on Microelectronics (MIEL)最新文献

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SnO2-Pd as a Gate Material for the Capacitor Type Gas Sensor SnO2-Pd作为电容式气体传感器栅极材料的研究
2019 IEEE 31st International Conference on Microelectronics (MIEL) Pub Date : 2019-06-19 DOI: 10.1109/MIEL.2019.8889648
N. Samotaev, K. Oblov, A. Litvinov, M. Etrekova
{"title":"SnO2-Pd as a Gate Material for the Capacitor Type Gas Sensor","authors":"N. Samotaev, K. Oblov, A. Litvinov, M. Etrekova","doi":"10.1109/MIEL.2019.8889648","DOIUrl":"https://doi.org/10.1109/MIEL.2019.8889648","url":null,"abstract":"The article describes the result of the use SnO<inf>2</inf>-Pd thin films as a gate for structure measured ppb range of NO<inf>2</inf> gas by the capacitive method. The technological aspects of fabrication SnO<inf>2</inf>-Pd gate and one comparison by metrological parameters with the classical Pd gate field effect sensor are discussed. The use of SnO<inf>2</inf>-Pd material allows improvement in sensitivity of NO<inf>2</inf> by an order of magnitude compare the classical Pd based gate field effect sensors.","PeriodicalId":391606,"journal":{"name":"2019 IEEE 31st International Conference on Microelectronics (MIEL)","volume":"24 3","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131520339","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Rapid Prototyping of MOX Gas Sensors in Form-Factor of SMD Packages SMD封装中MOX气体传感器的快速成型
2019 IEEE 31st International Conference on Microelectronics (MIEL) Pub Date : 2019-06-19 DOI: 10.1109/MIEL.2019.8889576
N. Samotaev, K. Oblov, A. Ivanova, A. Gorshkova, B. Podlepetsky
{"title":"Rapid Prototyping of MOX Gas Sensors in Form-Factor of SMD Packages","authors":"N. Samotaev, K. Oblov, A. Ivanova, A. Gorshkova, B. Podlepetsky","doi":"10.1109/MIEL.2019.8889576","DOIUrl":"https://doi.org/10.1109/MIEL.2019.8889576","url":null,"abstract":"this work discusses the design of flexible laser micromilling technology for fast prototyping metal oxide based (MOX) gas sensors in SMD packages as a alternative to traditional silicon clean-room technologies. By laser micromilling technology possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also SMD packages for MOX sensor, that gives complete solution for integration one in devices using IoT conception.","PeriodicalId":391606,"journal":{"name":"2019 IEEE 31st International Conference on Microelectronics (MIEL)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131062723","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
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