SMD封装中MOX气体传感器的快速成型

2019 IEEE 31st International Conference on Microelectronics (MIEL) Pub Date : 2019-06-19 DOI:10.1109/MIEL.2019.8889576

N. Samotaev, K. Oblov, A. Ivanova, A. Gorshkova, B. Podlepetsky

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引用次数: 4

摘要

本工作讨论了用于SMD封装中快速成型金属氧化物(MOX)气体传感器的柔性激光微铣削技术的设计，作为传统硅洁净室技术的替代方案。通过激光微铣削技术，可以制造定制的微机电系统(MEMS)微热板平台和用于MOX传感器的SMD封装，这为使用物联网概念的设备集成提供了完整的解决方案。

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Rapid Prototyping of MOX Gas Sensors in Form-Factor of SMD Packages

this work discusses the design of flexible laser micromilling technology for fast prototyping metal oxide based (MOX) gas sensors in SMD packages as a alternative to traditional silicon clean-room technologies. By laser micromilling technology possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also SMD packages for MOX sensor, that gives complete solution for integration one in devices using IoT conception.

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来源期刊

2019 IEEE 31st International Conference on Microelectronics (MIEL)

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