Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)最新文献_第9页

SnO/sub 2//Pt microsensors fabricated on micromachined Si (100) substrate suitable for silicon processing 在适于硅加工的微加工Si(100)衬底上制备的SnO/sub 2/ Pt微传感器

Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1278917

B. Esfandyarpour, S. Mohajerzadeh, B. Hekmatshoar, M. Moradi, A. Khodadadi

{"title":"SnO/sub 2//Pt microsensors fabricated on micromachined Si (100) substrate suitable for silicon processing","authors":"B. Esfandyarpour, S. Mohajerzadeh, B. Hekmatshoar, M. Moradi, A. Khodadadi","doi":"10.1109/ICSENS.2003.1278917","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1278917","url":null,"abstract":"Using standard photolithography process, thin film SnO/sub 2/-based gas sensors were fabricated on Si/sub 3/N/sub 4/ membrane for detection of CO and H/sub 2/. The sensing material with a thickness of 400nm was spin-coated using a sol-gel deposition technique. Platinum was added by deposition of various thicknesses of Pt using an RF sputtering unit onto the spin-coated films after preannealing process. 2% chemically Pt doped sensors were prepared adding appropriate amount of H/sub 2/Cl/sub 6/Pt.6H/sub 2/O to the sol-gel solution. Conductivity measurements of the sensors annealed at different temperatures have been carried out in dry air and in presence of various concentrations of CO and H/sub 2/. The Pt-doped sensor prepared by the method of sputter-deposited platinum onto the SnO/sub 2/ surface exhibited a high sensitivity for selective detection of H/sub 2/. However, the chemically doped sensors showed a considerable high response to CO at a temperature around 170/spl deg/C. The selectivity of the sensing material was studied toward different reducing gases. SEM and XRD analyses were used to investigate the surface morphology and crystallinity of SnO/sub 2/ films after annealing at different temperatures.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125336682","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Improved E-nose detection using initial reaction smellprint and advanced classifiers 使用初始反应嗅觉印迹和高级分类器改进的电子鼻检测

Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1279138

O. Uluyol, A. Wood, M. Kaiser, K. Arnold

引用次数: 0

Microfluidic genetic and amino acid analysis using an integrated a-Si:H detector 采用集成a-Si:H检测器的微流体遗传和氨基酸分析

Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1279103

T. Kamei, J. Scherer, B. M. Paegel, E. Lagally, A. Skelley, R. Street, R. Mathies

引用次数: 2

Surface acoustic wave biosensors for biomolecular interaction analysis 用于生物分子相互作用分析的表面声波生物传感器

Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1279130

K. Lange, A. Voigt, M. Rapp

{"title":"Surface acoustic wave biosensors for biomolecular interaction analysis","authors":"K. Lange, A. Voigt, M. Rapp","doi":"10.1109/ICSENS.2003.1279130","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279130","url":null,"abstract":"HPSSW type, (horizontally polarized surface shear wave) surface acoustic wave (SAW) devices have been proven to be suitable for biosensing applications. They allow an easy and fast label free detection of molecules with biological relevance via direct detection of the adsorbed mass. However, SAW device structures are usually connected by bond wires. In consequence sampling chambers suffer from relatively big flow cell volumes /spl sim/ 50 /spl mu/l. We developed new resonator filter based HPSSW devices with gold transducers. They work at an operating frequency of 433.9 MHz on 36/spl deg/YX LiTaO/sub 3/ as substrate material. Bonding wires could be eliminated as the sensor is capacitively coupled with the driving electronics via large contact pads. The new coupling concept (originally developed for our gas sensing approach) enables the reduction of the sample volume in the flow cell down to 60 nl. This decreases sample consumption and reduces the length of the measurement cycles. Affinity assays were realized using this SAW biosensor. Measurements with the systems urease/anti-urease and estradiol/estrogen receptor are shown exemplarily. In the latter case it could be shown that reference SAW surfaces without binding partner have the potential to enable the quantification of binding reactions even in complex media. For automated sample handling, the SAW detection unit is integrated in a flow injection analysis (FIA) system. A cost-effective, compact demonstration instrument for SAW biosensing was developed.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128157354","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 5

An active pixel sensor (APS) based on high gain CMOS compatible lateral bipolar transistor (LBT) on SOS substrate with backside illumination 一种基于高增益CMOS兼容侧双极晶体管(LBT)的主动像素传感器(APS)

Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1279151

Chen Xu, Chao Shen, P. Ko, M. Chan

引用次数: 2

A wireless sensor-network system with a dynamically programmable sensor interface 具有动态可编程传感器接口的无线传感器网络系统

Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1279036

J. Terada, Y. Satoh, F. Morisawa, S. Mutoh, K. Fujii, Y. Kado

引用次数: 3

Influence of electrodes ageing on the responses of SnO/sub 2/ sol-gel sensors 电极老化对SnO/sub - 2/溶胶-凝胶传感器响应的影响

Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1279160

A. Taurino

{"title":"Influence of electrodes ageing on the responses of SnO/sub 2/ sol-gel sensors","authors":"A. Taurino","doi":"10.1109/ICSENS.2003.1279160","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279160","url":null,"abstract":"Metal oxides films are generally applied as sensing layers, in semiconductor gas sensors. These sensors based on electrical conductivity changes have numerous advantages as high sensitivity, simple design and low cost. Great efforts have been made with the aim to determine and improve the parameters that contribute to the electrical conductivity and that influence the electrical response of the sensors. Nevertheless, these devices show some well-known limitations as poor selectivity, temperature and moisture dependence and, especially, ageing and drift. The main cause of drift is, of course, changes in morphology of the sensing layer. In fact, the electrical properties of the sensing layer and the transduction function of the device depend strongly on the layer morphology. Moreover also the quality of the electrodes has to be considered as parameter that can influence the ageing of the device. In this paper, we studied the gas sensing characteristics, in particular the stability and reliability, of different pure and Ni-, Os-, Pt-, Pd- doped SnO/sub 2/ thin films based sensors prepared by the sol-gel technique and the influence of the ageing of the Au electrical contacts on the performances of the sensors. We studied the responses of different sensors towards some gases and vapours. SEM results were showed. The surface chemical composition of the samples has been studied by XPS (X-ray Photoelectron Spectroscopy) analysis.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121894401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Hybrid oxide mixtures as /spl gamma/-radiation sensors 杂化氧化物混合物as /spl伽马/辐射传感器

Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1278901

F.K. Fahim, K. Arshak, O. Korostynska

引用次数: 1

MEMS wind direction detection: from design to operation MEMS风向检测:从设计到运行

Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1278954

R. Adamec, D. V. Thiel, P. Tanner

引用次数: 17

Multi-analyte detection handheld analyzer for point-of-care application with disposable biochips 多分析物检测手持分析仪点护理应用与一次性生物芯片

Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1279011

M. Dutta, L. Ramasamy, Xiaoshan Zhu, J. Do, C. Gao, C. Hong, A. Puntambekar, J. Han, Se Hwan Lee, R. Trichur, Jin-Woo Choi, J. Nevin, C. Ahn, S. Chilukuru

引用次数: 3