Influence of electrodes ageing on the responses of SnO/sub 2/ sol-gel sensors

A. Taurino
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Abstract

Metal oxides films are generally applied as sensing layers, in semiconductor gas sensors. These sensors based on electrical conductivity changes have numerous advantages as high sensitivity, simple design and low cost. Great efforts have been made with the aim to determine and improve the parameters that contribute to the electrical conductivity and that influence the electrical response of the sensors. Nevertheless, these devices show some well-known limitations as poor selectivity, temperature and moisture dependence and, especially, ageing and drift. The main cause of drift is, of course, changes in morphology of the sensing layer. In fact, the electrical properties of the sensing layer and the transduction function of the device depend strongly on the layer morphology. Moreover also the quality of the electrodes has to be considered as parameter that can influence the ageing of the device. In this paper, we studied the gas sensing characteristics, in particular the stability and reliability, of different pure and Ni-, Os-, Pt-, Pd- doped SnO/sub 2/ thin films based sensors prepared by the sol-gel technique and the influence of the ageing of the Au electrical contacts on the performances of the sensors. We studied the responses of different sensors towards some gases and vapours. SEM results were showed. The surface chemical composition of the samples has been studied by XPS (X-ray Photoelectron Spectroscopy) analysis.
电极老化对SnO/sub - 2/溶胶-凝胶传感器响应的影响
金属氧化物薄膜通常用作半导体气体传感器的传感层。这些基于电导率变化的传感器具有灵敏度高、设计简单、成本低等优点。为了确定和改进有助于电导率和影响传感器电响应的参数,已经做出了巨大的努力。然而,这些装置显示出一些众所周知的局限性,如选择性差,温度和湿度依赖性,特别是老化和漂移。漂移的主要原因当然是传感层形态的变化。事实上,传感层的电学性能和器件的转导功能在很大程度上取决于层的形态。此外,电极的质量也必须作为影响器件老化的参数加以考虑。本文研究了溶胶-凝胶法制备的不同纯和掺杂Ni、Os、Pt、Pd的SnO/sub /薄膜传感器的气敏特性,特别是稳定性和可靠性,以及Au电触点老化对传感器性能的影响。我们研究了不同传感器对某些气体和蒸气的反应。SEM结果如下:用XPS (x射线光电子能谱)分析研究了样品的表面化学成分。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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