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Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)最新文献

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Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures 亚开尔文温度下微热量计阵列的热设计问题和性能
Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1278957
M. Ridder, M. Bruijn, H. Hoevers, A. Germeau, N.H.R. Baarsa, E. Krouwer, J.J. van Baarb, R. Wiegerink
{"title":"Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures","authors":"M. Ridder, M. Bruijn, H. Hoevers, A. Germeau, N.H.R. Baarsa, E. Krouwer, J.J. van Baarb, R. Wiegerink","doi":"10.1109/ICSENS.2003.1278957","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1278957","url":null,"abstract":"We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK. Moreover we find that the thermal transport at 100 mK in Si beams, with dimensions 1.25 mm /spl times/ 0.35mm /spl times/ 35/spl mu/m (length /spl times/ height /spl times/ width) is dominated by ballistic phonons with a mean free path of 110 /spl mu/m. These thermal parameters can be used for modelling future 32 /spl times/ 32 pixel arrays. In addition we operated three pixels in a 5 /spl times/ 5 array of microcalorimeters and find that the pixel to pixel reproducibility is very good. When used as an X-ray microcalorimeter individual pixels have a thermal decay time of 200 /spl mu/s is and their energy resolution is between 6 and 7 eV for 5.89 keV X-ray photons.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128387238","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Characterization of microelectromechanical HF resonators fabricated using a SOI-based low temperature process 基于soi低温工艺制备的微机电HF谐振器的表征
Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1279057
P. Ruther, J. Bartholomeyczik, A. Buhmann, O. Paul
{"title":"Characterization of microelectromechanical HF resonators fabricated using a SOI-based low temperature process","authors":"P. Ruther, J. Bartholomeyczik, A. Buhmann, O. Paul","doi":"10.1109/ICSENS.2003.1279057","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279057","url":null,"abstract":"This paper reports on the characterization of electromechanical high frequency resonators realized using a novel SOI-based low temperature fabrication process. Key features of the devices are single crystal silicon resonant beams, 200 nm to 600 nm thin transducer gaps, and gold electrodes. The fabrication process combines bulk silicon micromachining applying deep reactive ion etching, low temperature deposition of a thin sacrificial oxide and electroplating of the lateral electrodes. The resonant behavior of devices with resonance frequencies f/sub res/ between 420 kHz and 4.11 MHz was characterized as a function of the bias voltage V/sub bias/ applied to the beam. Measurements were performed at ambient pressures p between 5/spl times/10/sup -5/ mbar and 0.5 mbar. Q values up to 52,000 at f/sub res/=420 kHz and 6,000 at f/sub res/=4.11 MHz were obtained. The interaction of resonator and measurement setup were simulated using an electrical network simulation program combined with a finite element analysis using ANSYS/sup /spl reg//.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128614066","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Ex vivo performance of printed thick film glucose sensors without immobilized glucose oxidase 无固定化葡萄糖氧化酶的印刷厚膜葡萄糖传感器的体外性能
Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1279165
G. Voskerician, A. Lynn, M. Shao
{"title":"Ex vivo performance of printed thick film glucose sensors without immobilized glucose oxidase","authors":"G. Voskerician, A. Lynn, M. Shao","doi":"10.1109/ICSENS.2003.1279165","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279165","url":null,"abstract":"The present study investigated the temporal modulation in performance of printed thick film electrochemical sensors without immobilized glucose oxidase by comparing the ex vivo performance of such devices with that of in vitro phosphate buffer saline (PBS) maintained sensors, at similar time points. In addition, a preliminary study was conducted to investigate the dependency of the sensor functionality on the method of sterilization. The oxidation and reduction current involving a ferrous-ferric coupling reaction was used to assess the performance of the electrode elements under in vitro and ex vivo conditions. Imaging analysis was employed to investigate the cellular morphology on the surface of the explanted devices. It was concluded that while the devices were affected by the presence of the surrounding biological environment (cellular adhesion, fibrous capsule formation), the ex vivo performance of the printed thick film sensors was comparable to that of the in vitro prototypes, at similar time points.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131728243","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Terfenol-D based optical current transducer 基于Terfenol-D的光学电流传感器
Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1278968
D. Satpathi, J. Moore, M. G. Ennis
{"title":"Terfenol-D based optical current transducer","authors":"D. Satpathi, J. Moore, M. G. Ennis","doi":"10.1109/ICSENS.2003.1278968","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1278968","url":null,"abstract":"The authors have developed and tested a prototype magnetostriction based, passive optical current sensing device for high voltage applications. The sensor contains a ferromagnetic yoke, a modulator of magnetostrictive Terfenol-D that responds to the magnetic field, and a fiber Bragg grating that converts this response into a wavelength modulated optical signal and transmit it via an optical fiber to ground level electronics. To linearize the output the modulator material was subjected to both mechanical and magnetic bias. The prototype CT was found to have a useable linear range of 100-1000A with a measured phase shift of around 30 degrees for a steady state 60 Hz excitation. Both the gain and the phase response have been found to be dependent on mechanical prestress and magnetic bias. The authors also report on materials characterization and modeling that support the actual design process.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133445517","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Polymer-based membrane mirrors for micro-optical sensors 用于微光学传感器的聚合物膜反射镜
Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1279022
C. Friese, M. Wissmann, H. Zappe
{"title":"Polymer-based membrane mirrors for micro-optical sensors","authors":"C. Friese, M. Wissmann, H. Zappe","doi":"10.1109/ICSENS.2003.1279022","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279022","url":null,"abstract":"We present the first use of polymer technology for the fabrication of deformable micro-mirrors. A self-supporting membrane fabricated using SU-8, with a diameter of 1 mm and a thickness of less than 10 /spl mu/m, can be used as either an active or passive optical component in a sensor system. In combination with an electrode array beneath the membrane, electrostatic actuation is used to deform the mirror for adaptive optics applications useful in, for example, wavefront formation or 2D-scanners for bio-chip readers. The described technology can also be used to produce other types of membrane devices such as pressure sensors, pumps or valves. The mechanical properties of the SU-8 polymer are such that the forces required for deflection are reduced, thus increasing mirror flexibility and sensitivity, but the fabrication process is simple and potentially low cost.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133450779","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Quantitative characterization of the partitioning of aqueous analytes into a polymer coating 水分析物在聚合物涂层中分配的定量表征
Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1279082
Y. Jones, Zhonghui Li, Fabien Josse, J. Hossenlopp
{"title":"Quantitative characterization of the partitioning of aqueous analytes into a polymer coating","authors":"Y. Jones, Zhonghui Li, Fabien Josse, J. Hossenlopp","doi":"10.1109/ICSENS.2003.1279082","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279082","url":null,"abstract":"Polymer coatings that are used with guided shear horizontal acoustic wave (SH-SAW) gas sensors are not necessarily optimal for operating in liquid environments due to significant differences between gas-phase and liquid-phase partition coefficients for some analytes. Development of an effective screening methodology for testing potential coatings for use in liquid sensing applications is particularly important for designing sensors for detection of aqueous analytes. Attenuated total internal reflectance Fourier transform infrared (ATR-FTIR) spectroscopy is used to predict the relative magnitude of the responses of a guided shear horizontal surface acoustic wave (SH-SAW) sensor, coated with a poly(dimethyl siloxane) (PDMS) thin film, to a series of aqueous analytes. The ATR-FTIR approach developed here is shown to effectively predict trends in analyte partitioning from water into PDMS and to also provide insight into the local environment of the analyte when combined with density functional theory computational chemistry and the Onsager model for solvent effects. The response of PDMS-coated guided SH-SAW sensors to nonpolar analytes exhibits an apparently anomalous positive frequency shift that is attributed to having a significant viscoelastic effect in addition to the mass-loading contribution. Sensor responses are linear with respect to analyte concentration.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"306 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131816826","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
CAD design of mask compensation patterns 掩模补偿图样的CAD设计
Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1278992
C. Tellier
{"title":"CAD design of mask compensation patterns","authors":"C. Tellier","doi":"10.1109/ICSENS.2003.1278992","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1278992","url":null,"abstract":"The wet micromachining of silicon mechanical structures for sensors is a widely used process. But compensation of the corner undercutting is frequently needed. Hence a new method to design compensation mask patterns is proposed here that is based on a numerical simulation. New results on the convex corner undercutting in anisotropic etching of (100), [110] and (hhl) silicon are presented for TMAH and KOH etchants. Simulations of the convex undercutting are performed using the simulator TENSOSIM. For this purpose new software applications are developed that allow us to work with more complex mask patterns. Compensating beams are then studied for various orientations. Differently shaped masks patterns are numerically tested (influence of shape, of relative dimensions and of misalignment of mask patterns) showing that the simulator TENSOSIM is a very convenient CAD tool to design compensation structures for convex corner micromachining in silicon.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123877046","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Classifier comparison and sensor selection for e-noses 电子鼻分类器比较及传感器选择
Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1279009
M. Pardo, G. Sberveglieri, B. Sisk, N. Lewis
{"title":"Classifier comparison and sensor selection for e-noses","authors":"M. Pardo, G. Sberveglieri, B. Sisk, N. Lewis","doi":"10.1109/ICSENS.2003.1279009","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279009","url":null,"abstract":"The authors analyze 4 datasets produced by an e-nose based on 20 compositionally distinct polymer-carbon black sensors exposed to laboratory designed gas mixtures and one dataset produced by a second e-nose based on five thin films metal oxide sensors exposed to the headspace of seven different coffee blends. We aim at selecting the best 5 sensors (for the e-nose which has 20) using as FS criterion the test performance of Fisher linear discriminant analysis (LDA) and multilayer perceptrons (MLP). The datasets were chosen to give classification problems of varying hardness: from the discrimination of two almost Gaussian distributed analytes to the discrimination of two analytes in the presence of interferents at different concentration levels. The performance of the best 5-sensors subset selected with MLP was found to be better - but not significantly better - than the performance of the LDA-selected subsets. This is true also for classes with a strong multimodal distribution. In only one case the test set performance distribution over all 5-sensors subsets was found to be clearly better with MLP than with LDA.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129407572","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A monolithic phase measurement photodetector 单片相位测量光电探测器
Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1279048
P. Arguel, J. Valentin, S. Fourment, F. Lozes-Dupuy, G. Sarrabayrouse, S. Bonnefont, Y. Jourlin, S. Reynaud, N. Destouches, A. Tishchenko, J. Jay
{"title":"A monolithic phase measurement photodetector","authors":"P. Arguel, J. Valentin, S. Fourment, F. Lozes-Dupuy, G. Sarrabayrouse, S. Bonnefont, Y. Jourlin, S. Reynaud, N. Destouches, A. Tishchenko, J. Jay","doi":"10.1109/ICSENS.2003.1279048","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279048","url":null,"abstract":"A novel monolithically integrated photodetector used as an optical phase-shift sensor is presented It consists of a diffraction grating etched at the surface of a p-n photodiode fabricated by standard silicon CMOS technology. This device provides the phase relationship between two coherent light beams collimated toward the surface of the photodetector. The operating principle of this sensor is presented along with the first devices fabricated and the experimental validation of the concept is demonstrated by performance characterization.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"97 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116323399","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Deposition of high quality coatings on SAW sensors using electrospray 用电喷雾在SAW传感器上沉积高质量涂层
Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI: 10.1109/ICSENS.2003.1278909
F. Bender, L. Wachter, A. Voigt, M. Rapp
{"title":"Deposition of high quality coatings on SAW sensors using electrospray","authors":"F. Bender, L. Wachter, A. Voigt, M. Rapp","doi":"10.1109/ICSENS.2003.1278909","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1278909","url":null,"abstract":"Electrospray has long been used as an ion source for mass spectrometry and for coating of conducting surfaces. However, it has only recently been introduced as a novel method to deposit polymer layers and other coating materials on sensor devices. In this work, the adaptation of electrospray deposition for this particular application is described, including the development of an apparatus for polymer deposition on nonconducting surfaces, optimization of deposition parameters, and a discussion of different solvent mixtures suitable for dissolving and spraying of a variety of polymers. Results are presented on both the apparent quality of electrospray-deposited polymer layers and their performance in analytical sensing applications.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117256920","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 18
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