{"title":"An all-silicon integrated optical sensor based on multi-mode interference","authors":"A. Irace, G. Breglio","doi":"10.1109/ICSENS.2003.1278899","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1278899","url":null,"abstract":"Temperature sensing with optical devices is a very promising research field because of many attractive features common to all-optical sensing schemes. All-silicon integrated sensors have many interesting features from their inherent low processing cost to integrability with signal-processing electronics. In this paper, we present a novel approach to temperature sensing with optoelectronic devices which relies on the usage of bare silicon as the transducing material. The device is composed by a single mode input waveguide, an MMI region where the higher order modes are allowed to propagate and two output waveguides. The refractive index variation in the MMI section due to temperature shifts induces different phase velocities of the propagating modes. Analytical calculations are presented together with BPM simulations aimed to the maximization of the sensitivity of the sensor.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124270536","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
L. Rodríguez-Pardo, J. Fariña, M. J. González, C. Gabrielli, H. Perrot, R. Brendel
{"title":"OptiMiller: a CAD tool for the design and optimization of Miller electronic oscillator circuits for QCM sensors","authors":"L. Rodríguez-Pardo, J. Fariña, M. J. González, C. Gabrielli, H. Perrot, R. Brendel","doi":"10.1109/ICSENS.2003.1278995","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1278995","url":null,"abstract":"Despite the long history of the quartz crystal oscillators, for their use as mass sensors in damping media, the success of a design still depends strongly on the designer's ability and experience. The large reduction that the quality factor of the quartz experiences in those media implies the necessity to adapt the designs so that the oscillation remains in spite of this reduction. In this paper, a CAD tool to help users in the design and optimization of Miller oscillators for the realization of quartz crystal microbalance sensors (QCM) for liquid media is presented.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129298395","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Modeling of impedance of cell-covered electrodes","authors":"D. Greve, X. Huang, D. Nguyen, M. Domach","doi":"10.1109/ICSENS.2003.1279169","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279169","url":null,"abstract":"Measurements of the impedance of cell-covered electrodes can be used to detect the presence of cells, their motion, and can yield information about biological processes. In this paper we present the results of finite element modeling of the impedance of cell-covered electrodes. The emphasis is on the behavior of small electrodes comparable to the cell size.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"178 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129582815","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
B. de Jong, W. Bula, D. Zalewski, J. van Baar, R. Wiegerink
{"title":"Pirani pressure sensor with distributed temperature measurement","authors":"B. de Jong, W. Bula, D. Zalewski, J. van Baar, R. Wiegerink","doi":"10.1109/ICSENS.2003.1279033","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279033","url":null,"abstract":"Surface micromachined distributed Pirani pressure gauges, with designed heater-to-heat sink distances (gap-heights) of 0.35 /spl mu/rn and 1.10 /spl mu/m, are successfully fabricated, modeled and characterized. Measurements and model response correspond within 5 % of the measured value in a pressure range of 10 to 2*10/sup 4/ Pa. The distributed nature of the sensor facilitates pressure measurement to be independent of the Temperature Coefficient of Resistance of the resistors. This also provides an inherent compensation for heat loss via the membrane supporting the heater, extending the lower pressure range.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"148 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128437258","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
P. Kim, N. Kohl, B. Hassler, N. Dotson, A. Mason, R. Worden, R. Ofoli
{"title":"An electrochemical interface for integrated biosensors","authors":"P. Kim, N. Kohl, B. Hassler, N. Dotson, A. Mason, R. Worden, R. Ofoli","doi":"10.1109/ICSENS.2003.1279100","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279100","url":null,"abstract":"This paper presents an integrated, protein-based, biosensor that can be scaled to form high-density, multi-analyte sensor arrays physically integrated on a signal conditioning circuit die. A fully scalable, post-CMOS-compatible, three-electrode interface to biochemical sensors has been developed. A silicon substrate electrode system, consisting of Ti/Au working and auxiliary electrodes and a Ti/Au/Ag/AgCl reference electrode has been adapted to biomimetic sensors. The functional Ag/AgCl reference electrode is isolated from the environment using a Nafion cation-exchange membrane to extend operation lifetime. To complete the sensor structure, lipid bilayers have been deposited in passivation layer openings formed over individual working electrodes using a special tethering molecule. Total internal reflection microscopy (TIRFM) studies were done to confirm that a wide range of proteins, such as dehydrogenase enzymes and ion channels, can then be embedded into the lipid bilayers. These results verify the potential to form highly selective recognition elements with direct physical connection to readout electronics on the supporting silicon substrate.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130573446","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
J. van Baar, Marcel Dijkstra, R. Wiegerink, T. Lammerink, G. Krijnen
{"title":"Fabrication of arrays of artificial hairs for complex flow pattern recognition","authors":"J. van Baar, Marcel Dijkstra, R. Wiegerink, T. Lammerink, G. Krijnen","doi":"10.1109/ICSENS.2003.1278952","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1278952","url":null,"abstract":"We present monolithically integrated high-density arrays of artificial hairs for flow pattern measurements based on drag force. A combined bulk/surface micromachining process has been developed to integrate the artificial hairs with capacitive read-out. First fabrication results show the possibility to fabricate out-of-plane hairs without reverting to micro-assembly technologies. This enables realisation of high-density arrays of symmetrical sensors with two-dimensional sensitivity.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130856911","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
H. Shekhar, V. Chathapuram, S. Hyun, Seungkwan Hong, H. Cho
{"title":"A disposable microsensor for continuous monitoring of free chlorine in water","authors":"H. Shekhar, V. Chathapuram, S. Hyun, Seungkwan Hong, H. Cho","doi":"10.1109/ICSENS.2003.1278897","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1278897","url":null,"abstract":"We designed, fabricated and tested a low cost, disposable, flow-through sensor to determine the amount of free chlorine in water. The whole sensor cell combining electrodes and a fluidic channel is micromachined on a chemically-inert transparent cyclic olefin copolymer substrate. The advantages are (a) disposability from low cost (b) wide operation range from three-electrode design (c) easy electrical and fluidic interconnection from a chip format, compared to previous works. The sensor showed a good response and linearity in the chlorine concentration ranging from 1.5 to 8 ppm, which applies to common chlorination process.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130154959","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Distributed-mass micromachined gyroscopes for enhanced mode-decoupling","authors":"C. Acar, A. Shkel","doi":"10.1109/ICSENS.2003.1278977","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1278977","url":null,"abstract":"A novel micromachined z-axis gyroscope with multidirectional drive-mode is presented. The design concept aims to relax mode-matching requirement, eliminate effects of directional residual stresses, and completely decouple the drive and sense modes. The proposed approach is based on denning multiple drive-mode oscillators, distributed symmetrically around the center of a supporting frame. Quadrature error and zero-rate-output are minimized, since the instability and drift is suppressed, due to the enhanced decoupling of multidirectional linear drive-mode and the torsional sense-mode. By designing each drive-mode oscillator with incrementally spaced resonance frequencies, a constant total Coriolis torque is achieved over a wide range of driving frequencies, leading to relaxed mode-matching requirements; and thus, robustness and reduced sensitivity to structural and thermal parameter fluctuations are achieved. Bulk-micromachined prototypes have been fabricated in a one-mask SOI-based process, and experimentally characterized.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126553185","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
E. Berkenpas, M. Pereira da Cunha, S. Bitla, P. Millard
{"title":"Shear horizontal SAW biosensor on langasite","authors":"E. Berkenpas, M. Pereira da Cunha, S. Bitla, P. Millard","doi":"10.1109/ICSENS.2003.1279020","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1279020","url":null,"abstract":"Pathogenic microbial agents can be introduced into food, water supplies, or atmosphere as a result of accidents, pollution, or terrorist activity. Sensitive and selective sensors are urgently needed to detect minute quantities of pathogens rapidly and accurately. SH SAW devices provide opportunities for the design of microbial sensing platforms that function in liquid media, where most other SAW modes fail. A SH SAW delay line device was designed and fabricated on a novel LGS SH orientation. The biosensor measurements were carried out using a network analyzer S-parameter and impedance characterization. A specialized flow through system was developed to perform liquid phase biological testing on the SH SAW device. Sensitivity to biomolecule binding in physiological solutions was tested by sequential binding of specific protein species to the modified sensing surface. A self-assembling monolayer of cysteamine was formed on the gold sensing region of the delay line and the resulting terminal amine moieties reacted with alkyl NHS-biotin to produce a biotin-rich sensor surface. The biotinylated sensor was then exposed sequentially to biotin-binding Neutravidin, biotin-modified rabbit IgG, and goat anti-rabbit IgG antibody. As each protein was bound sequentially to the sensing surface, marked changes in the delay line phase were recorded. The reported results demonstrating the capability of these devices for sensitive biochemical recognition in acequous solutions reveals an important development in SAW based biosensor technology.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126783206","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yong Chen, J. Jiao, Linxi Dong, B. Xiong, Lufeng Che, Xinxin Li, Yuelin Wang
{"title":"Micromachined bar-structure gyroscope with high Q-factors for both driving and sensing mode at atmospheric pressure","authors":"Yong Chen, J. Jiao, Linxi Dong, B. Xiong, Lufeng Che, Xinxin Li, Yuelin Wang","doi":"10.1109/ICSENS.2003.1278980","DOIUrl":"https://doi.org/10.1109/ICSENS.2003.1278980","url":null,"abstract":"In this paper, we report the design and fabrication of a novel micromachined electro-magnetically driven fork tuning type gyroscope with bar-structure working at atmospheric pressure. Instead of common squeeze film damping, slide film damping effect plays an important role in this sensor, which enables it to achieve high Q-factors for both driving and sensing mode at atmospheric pressure. The angular rate is sensed by detecting the differential change of capacitance between the bar structures electrodes and the fixed interdigitated electrodes on the glass substrate. The measured Q-factors at atmospheric pressure are 1005 for driving mode and 365 for sensing mode, respectively. The sensitivity of the sensor is about 10mV//spl deg/ /S, and the nonlinearity is less than 0.5%.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125223478","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}