Pirani pressure sensor with distributed temperature measurement

Abstract

Surface micromachined distributed Pirani pressure gauges, with designed heater-to-heat sink distances (gap-heights) of 0.35 /spl mu/rn and 1.10 /spl mu/m, are successfully fabricated, modeled and characterized. Measurements and model response correspond within 5 % of the measured value in a pressure range of 10 to 2*10/sup 4/ Pa. The distributed nature of the sensor facilitates pressure measurement to be independent of the Temperature Coefficient of Resistance of the resistors. This also provides an inherent compensation for heat loss via the membrane supporting the heater, extending the lower pressure range.