具有高q因子的微机械杆结构陀螺仪，用于大气压下的驱动和传感模式

Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) Pub Date : 2003-10-22 DOI:10.1109/ICSENS.2003.1278980

Yong Chen, J. Jiao, Linxi Dong, B. Xiong, Lufeng Che, Xinxin Li, Yuelin Wang

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引用次数: 6

摘要

本文报道了一种在大气压下工作的新型杆结构微机械电磁驱动叉调谐式陀螺仪的设计与制造。取代普通的挤压膜阻尼，滑动膜阻尼效应在该传感器中发挥了重要作用，使其在大气压下的驱动和传感模式下都能实现高q因子。角速度是通过检测柱状结构电极和玻璃基板上的固定交叉电极之间电容的微分变化来检测的。在常压下测得的驱动模式和传感模式下的q因子分别为1005和365。传感器的灵敏度约为10mV//spl度// S，非线性小于0.5%。

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Micromachined bar-structure gyroscope with high Q-factors for both driving and sensing mode at atmospheric pressure

In this paper, we report the design and fabrication of a novel micromachined electro-magnetically driven fork tuning type gyroscope with bar-structure working at atmospheric pressure. Instead of common squeeze film damping, slide film damping effect plays an important role in this sensor, which enables it to achieve high Q-factors for both driving and sensing mode at atmospheric pressure. The angular rate is sensed by detecting the differential change of capacitance between the bar structures electrodes and the fixed interdigitated electrodes on the glass substrate. The measured Q-factors at atmospheric pressure are 1005 for driving mode and 365 for sensing mode, respectively. The sensitivity of the sensor is about 10mV//spl deg/ /S, and the nonlinearity is less than 0.5%.

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Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)

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