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2012 International Conference on Optical MEMS and Nanophotonics最新文献

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Optomechanical coupling effects in a Fabry-Perot mechanical resonator 法布里-珀罗机械谐振腔中的光-力耦合效应
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318796
M. Malak, F. Marty, B. Capellazzi, P. Jouannard, T. Bourouina
{"title":"Optomechanical coupling effects in a Fabry-Perot mechanical resonator","authors":"M. Malak, F. Marty, B. Capellazzi, P. Jouannard, T. Bourouina","doi":"10.1109/OMEMS.2012.6318796","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318796","url":null,"abstract":"We explore a technique for MEMS in situ reversible optical transduction of mechanical vibrations. While performing preliminary experiments, we found that the opto-mechanical coupling is strong enough at this scale to lead to hysteresis behavior.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127831093","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Electrostatic actuator for coupling quantum well electron states 耦合量子阱电子态的静电致动器
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318843
W. Chan, J. Talghader, M. Saarinen
{"title":"Electrostatic actuator for coupling quantum well electron states","authors":"W. Chan, J. Talghader, M. Saarinen","doi":"10.1109/OMEMS.2012.6318843","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318843","url":null,"abstract":"An actuator was designed and fabricated to actively tune the nanometer-scaled gap between quantum wells in a collapsed cantilever structure. Maximum actuation of 55nm was achieved. Photoluminescence from the quantum wells at the collapsed cantilever was observed at cryogenic temperature, indicating that the wells remained intact after fabrication.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125920099","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
X-ray reflectivity measurement of a iridium coated MEMS optic with atomic layer deposition 原子层沉积铱包覆MEMS光学元件的x射线反射率测量
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318813
T. Ogawa, Y. Ezoe, I. Mitsuishi, T. Kakiuchi, T. Moriyama, T. Ohashi, K. Mitsuda, M. Putkonen
{"title":"X-ray reflectivity measurement of a iridium coated MEMS optic with atomic layer deposition","authors":"T. Ogawa, Y. Ezoe, I. Mitsuishi, T. Kakiuchi, T. Moriyama, T. Ohashi, K. Mitsuda, M. Putkonen","doi":"10.1109/OMEMS.2012.6318813","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318813","url":null,"abstract":"We coated a MEMS-based silicon optic with iridium by means of atomic layer deposition. Its X-ray reflectivity is quantitatively measured using a parallel X-ray beam at Al Kα 1.49 keV.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"63 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126835655","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
3D waveguide penetrating arrays for optical neural stimulation 用于光学神经刺激的三维波导穿透阵列
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318880
T. Abaya, M. Diwekar, Steve Blair, P. Tathireddy, L. Rieth, Florian Solzbacher
{"title":"3D waveguide penetrating arrays for optical neural stimulation","authors":"T. Abaya, M. Diwekar, Steve Blair, P. Tathireddy, L. Rieth, Florian Solzbacher","doi":"10.1109/OMEMS.2012.6318880","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318880","url":null,"abstract":"Early-generation waveguide arrays made of silicon (Si) and fused silica (SiO2) were micromachined for infrared (IR) neural stimulation and optogenetics applications in able to provide comprehensive and selective access to distributed targets. Edge-coupled multimode fibers delivered light through the optrodes. Maximum normalized output power from the tips, with respect to the fiber output, was determined as 0.33 and 0.71 for silicon and glass optrodes, respectively.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125628635","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Two-dimensional (2D) micromirror with enhanced tilting angle using active control methods 采用主动控制方法增强倾斜角度的二维微镜
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318828
H. Imam, R. Adamson, J. Brown, Yuan Ma
{"title":"Two-dimensional (2D) micromirror with enhanced tilting angle using active control methods","authors":"H. Imam, R. Adamson, J. Brown, Yuan Ma","doi":"10.1109/OMEMS.2012.6318828","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318828","url":null,"abstract":"Electrostatically actuated torsional micromirror fabricated using MicroElectroMechanical Systems (MEMS) technology is a fundamental building block for many optical network applications, such as optical wavelength-selective switch, configurable optical add-drop multiplexers and optical cross-connects. A two-dimensional (2D) micro-mirror functioning with a flexible secondary tilting offers tremendous value for the network designers. Commonly, electrostatic MEMS micromirrors have been designed with a gimbal surrounding the mirror plate and four square electrodes underneath. The main disadvantage of this type of design is the X-Y tilts are extensively coupled, which makes design of a control system difficult. In this work, design and control of an electrostatically actuated 2D MEMS micromirror has been reported. Triangular shaped electrodes have been used to achieve relative decoupling and a multi-loop proportional, integral and derivative (PID) controller is designed. The simulation results show that decoupling for small tilting angles has been achieved and that the controller can achieve a larger controllable tilting angle than the pull-in angle resulting in significantly enhanced device performance and functionality.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124417817","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Raman spectrum of core-shell silicon nanowires on different substrates 不同衬底上核壳硅纳米线的拉曼光谱
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318783
M. Khorasaninejad, M. Adachi, J. Walia, K. Karim, S. Saini
{"title":"Raman spectrum of core-shell silicon nanowires on different substrates","authors":"M. Khorasaninejad, M. Adachi, J. Walia, K. Karim, S. Saini","doi":"10.1109/OMEMS.2012.6318783","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318783","url":null,"abstract":"Silicon nanowires were grown on glass and steel substrates and investigated with Raman spectroscopy. It is shown that the Raman shift is mainly due to local heating of the nanowires.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114691357","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Q-switching of Nd:YAG solid-state laser with intra-cavity MEMS resonant scanning mirror 腔内MEMS谐振扫描镜Nd:YAG固体激光器的q开关
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318812
R. Bauer, W. Lubeigt, D. Uttamchandani
{"title":"Q-switching of Nd:YAG solid-state laser with intra-cavity MEMS resonant scanning mirror","authors":"R. Bauer, W. Lubeigt, D. Uttamchandani","doi":"10.1109/OMEMS.2012.6318812","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318812","url":null,"abstract":"A comb-drive actuated MEMS scanning mirror is used to actively Q-switch a side-pumped Nd:YAG laser. Minimum pulse durations of 38 ns are observed and maximum average output powers of 55 mW at 17.625 kHz pulse repetition frequency.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130382454","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Improving extraction efficiency of light-emitting devices through use of bottom distributed Bragg reflectors 利用底部分布布拉格反射器提高发光器件的提取效率
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318850
N. Saulnier, E. Towe
{"title":"Improving extraction efficiency of light-emitting devices through use of bottom distributed Bragg reflectors","authors":"N. Saulnier, E. Towe","doi":"10.1109/OMEMS.2012.6318850","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318850","url":null,"abstract":"The extraction efficiency of a laser with a photonic crystal at the top and a distributed Bragg reflector below can be as high as 90% if the reflector is a distance of one period away.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130560217","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Reconfigurable, panoramic vision micro camera array 可重构，全景视觉微摄像头阵列
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318776
A. Kanhere, B. Aldalali, Li Zhang, Hongrui Jiang
{"title":"Reconfigurable, panoramic vision micro camera array","authors":"A. Kanhere, B. Aldalali, Li Zhang, Hongrui Jiang","doi":"10.1109/OMEMS.2012.6318776","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318776","url":null,"abstract":"We present a prototype of a micro panoramic vision system that includes five micro-cameras controlled simultaneously by mechanical arm-like actuators, structurally similar to umbrella ribs. Each camera rests on an arm that can be oriented at an angle simultaneously with the other four arms. This arrangement offers reconfigurable angle of view and depth perception. Stitching of the images from individual cameras yields a horizontal field of view of 360°. This micro-camera set is configured in the context of laparoscopic surgery and single-port surgery.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131756282","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Mass replication of multifunctional surface by nanoimprint of high aspect ratio tapered nanostructures 利用高纵横比锥形纳米结构的纳米压印大规模复制多功能表面
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318807
Jeong-Gil Kim, H. Choi, Hanhong Gao, I. Cornago, Chih‐Hao Chang, G. Barbastathis
{"title":"Mass replication of multifunctional surface by nanoimprint of high aspect ratio tapered nanostructures","authors":"Jeong-Gil Kim, H. Choi, Hanhong Gao, I. Cornago, Chih‐Hao Chang, G. Barbastathis","doi":"10.1109/OMEMS.2012.6318807","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318807","url":null,"abstract":"Tapered nanostructures with high aspect ratio were fabricated using high-throughput nanoimprint process. The replicated nanostructures have axially increasing effective refractive index, which enhances the optical transmission over a wide range of wavelengths and incident angles.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133884656","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
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