利用高纵横比锥形纳米结构的纳米压印大规模复制多功能表面

2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI:10.1109/OMEMS.2012.6318807

Jeong-Gil Kim, H. Choi, Hanhong Gao, I. Cornago, Chih‐Hao Chang, G. Barbastathis

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引用次数: 3

摘要

采用高通量纳米压印工艺制备了高纵横比的锥形纳米结构。复制的纳米结构具有轴向增加的有效折射率，从而提高了在宽波长和入射角范围内的光传输。

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Mass replication of multifunctional surface by nanoimprint of high aspect ratio tapered nanostructures

Tapered nanostructures with high aspect ratio were fabricated using high-throughput nanoimprint process. The replicated nanostructures have axially increasing effective refractive index, which enhances the optical transmission over a wide range of wavelengths and incident angles.

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2012 International Conference on Optical MEMS and Nanophotonics

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