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2012 International Conference on Optical MEMS and Nanophotonics最新文献

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A slanted InP waveguide for fiber coupler using skewed dry etching process 一种斜干蚀刻法用于光纤耦合器的倾斜InP波导
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318873
S. Choi, A. Higo, K. Kikuta, H. Toshiyoshi, Y. Nakano
{"title":"A slanted InP waveguide for fiber coupler using skewed dry etching process","authors":"S. Choi, A. Higo, K. Kikuta, H. Toshiyoshi, Y. Nakano","doi":"10.1109/OMEMS.2012.6318873","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318873","url":null,"abstract":"We propose a simple and efficient off-chip coupler for vertical coupling between optical fibers and InP-based slab waveguides. Etching angle of the waveguide edge is controlled by an etching jig made of SiO2-coated aluminum for ICP-RIE. Simulation shows that maximum 71% coupling efficiency would be obtained by matrix expansion methods.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"65 9","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132476871","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Enhanced gain in colloidal quantum dots in all-dielectric microcavities 全介电微腔中胶体量子点增益的增强
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318781
D. Goldberg, Vinod M. Menon
{"title":"Enhanced gain in colloidal quantum dots in all-dielectric microcavities","authors":"D. Goldberg, Vinod M. Menon","doi":"10.1109/OMEMS.2012.6318781","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318781","url":null,"abstract":"We report enhanced amplified-spontaneous-emission from CdSe/ZnS quantum-dots in an all-dielectric Si3N4/SiO2 microcavity. Directional emission is observed through the cavity mode. Enhancement is confirmed with time-resolved and steady-state photoluminescence measurements showing a Purcell factor of ~1.3.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132058887","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Hierarchically structured LED lens for wide angle and high efficiency illumination 层次结构的LED镜头，广角和高效率照明
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318884
Jae-jun Kim, Youngseop Lee, Minhee Kang, K. Jeong
{"title":"Hierarchically structured LED lens for wide angle and high efficiency illumination","authors":"Jae-jun Kim, Youngseop Lee, Minhee Kang, K. Jeong","doi":"10.1109/OMEMS.2012.6318884","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318884","url":null,"abstract":"This work presents an effective method for the wide angle and high efficiency illumination with hierarchical structures on lens surfaces, which were fabricated by a photolithography and a capillary force lithography.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"152 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134211926","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Nano pillar array laser with a bottom metal plane 底部金属平面的纳米柱阵列激光器
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318887
Kyungmook Kwon, Jong-Bum You, Youngho Jung, Jaeho Shim, Kyoungsik Yu
{"title":"Nano pillar array laser with a bottom metal plane","authors":"Kyungmook Kwon, Jong-Bum You, Youngho Jung, Jaeho Shim, Kyoungsik Yu","doi":"10.1109/OMEMS.2012.6318887","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318887","url":null,"abstract":"We report a photonic bandedge laser using subwavelength-scale pillars with a metal reflector plane bonded on the silicon substrate. Surface-emitting operation near the gamma point of the photonic band diagram is observed at 77 K.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"82 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131146462","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Polarization-selective optical nanostructures for optical MEMS integration 用于光学MEMS集成的偏振选择性光学纳米结构
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318869
E. Keeler, S. Rydberg, V. Paeder, H. Herzig, D. Dickensheets, W. Nakagawa
{"title":"Polarization-selective optical nanostructures for optical MEMS integration","authors":"E. Keeler, S. Rydberg, V. Paeder, H. Herzig, D. Dickensheets, W. Nakagawa","doi":"10.1109/OMEMS.2012.6318869","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318869","url":null,"abstract":"Optical nanostructures have the potential to provide useful new functionalities, using materials and fabrication methods that are compatible with standard silicon-based processes. For example, it has been shown that a nanoscale grating coated with a metal layer produces polarization-selective reflectivity (Paeder, 2011 and Paeder et al., 2009), based on the combined effects of form birefringence and a resonant cavity (Tyan et al., 1997). In this work, we adapt this design approach to develop two devices optimized to operate around 1.55 μm wavelength: a polarizing beam splitter, and a polarization-selective reflector. Such devices are of particular interest as they may provide optical properties such as polarization selectivity or enhanced reflectivity using nanostructures compatible with optical micro-electro-mechanical systems (MEMS).","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127268131","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators 一种带有电热和静电执行器的二维MEMS扫描微镜
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318808
Li Li, R. Bauer, G. Brown, D. Uttamchandani
{"title":"A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators","authors":"Li Li, R. Bauer, G. Brown, D. Uttamchandani","doi":"10.1109/OMEMS.2012.6318808","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318808","url":null,"abstract":"A hybrid two-axis scanning micromirror combining electrostatic and electrothermal actuators was fabricated using SOIMUMPs. Experimental evaluation shows the device is capable of scan in two orthogonal directions and produces a rectangular raster-scan pattern.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116513898","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Mode mapping of coupled cavities in photonic crystal waveguides 光子晶体波导中耦合腔的模式映射
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318774
F. Brossard, B. Reid, C. Chan, D. Williams, R. Murray, R. A. Taylor
{"title":"Mode mapping of coupled cavities in photonic crystal waveguides","authors":"F. Brossard, B. Reid, C. Chan, D. Williams, R. Murray, R. A. Taylor","doi":"10.1109/OMEMS.2012.6318774","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318774","url":null,"abstract":"Photonic crystal cavities embedded in photonic crystal waveguides are investigated using a nanopositioning photoluminescence mapping technique. Coupled-cavity modes near telecom wavelengths are shown and their suitability for strong light matter interaction discussed.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117237488","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
MEMS micromirror based X-ray pulse modulators 基于MEMS微镜的x射线脉冲调制器
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318841
D. Mukhopadhyay, D. Walko, I. Jung, Jin Wang, G. Shenoy, D. López
{"title":"MEMS micromirror based X-ray pulse modulators","authors":"D. Mukhopadhyay, D. Walko, I. Jung, Jin Wang, G. Shenoy, D. López","doi":"10.1109/OMEMS.2012.6318841","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318841","url":null,"abstract":"We describe a MEMS micromirror for modulation of X-ray pulses needed for critical time-resolved process studies of cyclical and far-from-equilibrium phenomena. This MEMS micromirror leverages grazing-angle reflection of X-ray pulses to generate its temporal modulation response. The generated responses are 1.5μs wide for 8keV X-rays and have been successfully used to isolate single X-ray pulses separated 1.59μs from their suppressed neighboring pulses.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127442249","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A stiffness-defined silicon plane bending method to realize perfectly-curved surface formation for tunable parabolic mirrors 一种刚度定义的硅平面弯曲方法以实现可调谐抛物面镜的完美曲面形成
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318802
Trần Nam Bình, S. Morishita, M. Kubota, Y. Mita
{"title":"A stiffness-defined silicon plane bending method to realize perfectly-curved surface formation for tunable parabolic mirrors","authors":"Trần Nam Bình, S. Morishita, M. Kubota, Y. Mita","doi":"10.1109/OMEMS.2012.6318802","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318802","url":null,"abstract":"The authors propose a universal method to form cylindrically-curved surfaces by dynamically bending in-plane a DRIE-etched flat vertical silicon plate with microactuator. The stiffness is designed position-dependent, thus allowing ideal curvature over large area.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122243414","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
CCD based ion image sensors for novel bio imaging — Fusion of Sensor technology and LSI technology 基于CCD的新型生物成像离子图像传感器——传感器技术与LSI技术的融合
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318879
K. Sawada
{"title":"CCD based ion image sensors for novel bio imaging — Fusion of Sensor technology and LSI technology","authors":"K. Sawada","doi":"10.1109/OMEMS.2012.6318879","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318879","url":null,"abstract":"The ion image sensor was invented. The device enables two dimensional visualization of both the ion and optical imaging of chemical activity of solutions and cell activity. The CMOS device consists of an array of CCDs covered with functionalized membrane. Changes in the concentration and two dimensional distributions of several ions are detected by charge accumulation. We have recently reported on the use of the sensor for real time imaging of acetylcholine (ACh) enzyme reactions. Insights in the variation of the concentration of ACh may lead to new methods for the treatment of Alzheimer's disease.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128528142","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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