A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators

2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI:10.1109/OMEMS.2012.6318808

Li Li, R. Bauer, G. Brown, D. Uttamchandani

引用次数: 2

Abstract

A hybrid two-axis scanning micromirror combining electrostatic and electrothermal actuators was fabricated using SOIMUMPs. Experimental evaluation shows the device is capable of scan in two orthogonal directions and produces a rectangular raster-scan pattern.

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一种带有电热和静电执行器的二维MEMS扫描微镜

采用SOIMUMPs制备了一种由静电和电热作动器组成的混合式两轴扫描微镜。实验结果表明，该装置能够在两个正交方向上进行扫描，并产生矩形光栅扫描图。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2012 International Conference on Optical MEMS and Nanophotonics

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