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2012 International Conference on Optical MEMS and Nanophotonics最新文献

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Fabrication of ultra high aspect ratio silica nanocone arrays by multiple shrinking mask etching 多层缩模刻蚀法制备超高纵横比二氧化硅纳米锥阵列
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318772
Hyungryul J Choi, I. Cornago, Jeong-Gil Kim, Tim Savas, G. Barbastathis
{"title":"Fabrication of ultra high aspect ratio silica nanocone arrays by multiple shrinking mask etching","authors":"Hyungryul J Choi, I. Cornago, Jeong-Gil Kim, Tim Savas, G. Barbastathis","doi":"10.1109/OMEMS.2012.6318772","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318772","url":null,"abstract":"We propose and experimentally demonstrate a novel method to fabricate subwavelength silica nanocone arrays with high aspect ratio (~7) for multifunctional surfaces having anti-reflective, self-cleaning, and anti-fogging properties.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"134 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115165555","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
A spectral line imager based on a MEMS vibratory grating scanner 基于MEMS振动光栅扫描器的光谱线成像仪
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318877
Y. Du, K. Cheo, Guang-xiang Zhou, F. Chau
{"title":"A spectral line imager based on a MEMS vibratory grating scanner","authors":"Y. Du, K. Cheo, Guang-xiang Zhou, F. Chau","doi":"10.1109/OMEMS.2012.6318877","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318877","url":null,"abstract":"A single-pixel spectral line imager based on a highspeed MEMS grating scanner is demonstrated to possess the capability of resolving 104 spectral bands and 250 spatial pixels. Delauney Triangulation is used in the signal processing to correct the spectral image distortions.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115105633","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Design and fabrication of dielectric nanostructured bending adaptor for optical frequencies 光学频率介质纳米结构弯曲适配器的设计与制造
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318858
Yen-Sheng Lu, Hongyi Xu, Hanhong Gao, C. M. Hsieh, Baile Zhang, Handong Sun, G. Barbastathis
{"title":"Design and fabrication of dielectric nanostructured bending adaptor for optical frequencies","authors":"Yen-Sheng Lu, Hongyi Xu, Hanhong Gao, C. M. Hsieh, Baile Zhang, Handong Sun, G. Barbastathis","doi":"10.1109/OMEMS.2012.6318858","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318858","url":null,"abstract":"We present the first ever design of bending adaptor based on transformation optics at near-infrared frequency (1550 nm). The Si-air nanograting structure with period <; 0.1 λ has sufficient anisotropy for light bending by 60°.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122371954","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Non-imaging fluorescence detection system with hemispherical dome reflectors 半球形反射器非成像荧光检测系统
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318870
Byounghun Park, Kyungmook Kwon, Kyoungsik Yu
{"title":"Non-imaging fluorescence detection system with hemispherical dome reflectors","authors":"Byounghun Park, Kyungmook Kwon, Kyoungsik Yu","doi":"10.1109/OMEMS.2012.6318870","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318870","url":null,"abstract":"We report efficient non-imaging emission collection optics for compact fluorescence detection systems. A combination of hemispherical dome mirrors redirects and integrates the isotropic fluorescent emission toward the photodetector, and significantly enhances the fluorescence signal level.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122153584","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A novel release mechanism utilizing micro-fuse for CMOS-MEMS micro-mirror 一种基于微保险丝的CMOS-MEMS微镜释放机构
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318811
Peng Qu, H. Qu
{"title":"A novel release mechanism utilizing micro-fuse for CMOS-MEMS micro-mirror","authors":"Peng Qu, H. Qu","doi":"10.1109/OMEMS.2012.6318811","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318811","url":null,"abstract":"Residual stress developed during thermal processes in fabrication is ubiquitous in MEMS devices. While the residual stress is exploited in many devices to generate initial displacements of freestanding structures in the device [1-2], it can also cause severe problems during and after device fabrications. Post-development of residual stress over long term can deteriorate the performance and even fail the device completely [3]. In the DRIE based microfabrication of our previous CMOS-MEMS electrostatic micro mirrors, sudden release and even crash of microstructures in plasma etching chamber was observed. This is due to the considerable large stress in the multiple-layer microstructures and the low damping effect in the chamber where high vacuum is present [4]. One possible solution to this troublesome final step is to release the microstructures in ambient with higher damping factor.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128548095","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
2-D forward optical scanner with glass microlens and isolation blocks using thermal reflow 2-D前向光学扫描仪与玻璃微透镜和隔离块使用热回流
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318849
S. Yoo, Joo-Young Jin, Joon-Geun Ha, C. Ji, Yong-Kweon Kim
{"title":"2-D forward optical scanner with glass microlens and isolation blocks using thermal reflow","authors":"S. Yoo, Joo-Young Jin, Joon-Geun Ha, C. Ji, Yong-Kweon Kim","doi":"10.1109/OMEMS.2012.6318849","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318849","url":null,"abstract":"We present a novel fabrication method of a two-dimensional forward optical scanner with integrated microlens. Glass microlens and electrical isolation blocks were integrated with silicon XY-stage using thermal reflow process. Measured scan angles in X and Y directions at resonance were ±4.9° and ±5.0°, respectively, at atmospheric pressure.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128574436","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Biosensing using long-range surface plasmon-polariton waveguides 远距离表面等离子体-极化子波导的生物传感技术
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318780
O. Krupin, P. Berini
{"title":"Biosensing using long-range surface plasmon-polariton waveguides","authors":"O. Krupin, P. Berini","doi":"10.1109/OMEMS.2012.6318780","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318780","url":null,"abstract":"Surface plasmon waveguides consisting of Au stripes in microfluidic channels are highly suitable as biosensors. They are capable of detecting analyte of mass over a very large dynamic range (cells to proteins) with competitive sensitivity.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115472706","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Electrostatically tunable MEMS THz metamaterials based on DC/RF decoupled split-ring resonator arrays 基于DC/RF去耦分环谐振器阵列的静电可调谐MEMS太赫兹超材料
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318785
Zhengli Han, H. Fujita, H. Toshiyoshi
{"title":"Electrostatically tunable MEMS THz metamaterials based on DC/RF decoupled split-ring resonator arrays","authors":"Zhengli Han, H. Fujita, H. Toshiyoshi","doi":"10.1109/OMEMS.2012.6318785","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318785","url":null,"abstract":"High-frequency electromagnetic-field simulation HFSS has been performed on sub-millimeter scale split-ring resonator (SRR) metamaterials to propose electrostatically tunable THz frequency filters with integrated RF-MEMS variable capacitors and switches.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114979424","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
The Casimir effect on silicon micromechanical systems: Forces due to virtual photons 硅微机械系统中的卡西米尔效应:由虚光子引起的力
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318786
H. B. Chan, Y. Bao, J. Zou
{"title":"The Casimir effect on silicon micromechanical systems: Forces due to virtual photons","authors":"H. B. Chan, Y. Bao, J. Zou","doi":"10.1109/OMEMS.2012.6318786","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318786","url":null,"abstract":"The Casimir force arising from quantum fluctuations could become the dominant interaction in silicon micromechanical devices under the appropriate conditions. The measured force is distinct from the pairwise summation of van der Waals forces.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124479765","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Polyacrylate tunable microlens with on-chip thermopneumatic actuation 带有片上热气动驱动的聚丙烯酸酯可调微透镜
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318800
Wei Zhang, H. Zappe, Andreas Seifert
{"title":"Polyacrylate tunable microlens with on-chip thermopneumatic actuation","authors":"Wei Zhang, H. Zappe, Andreas Seifert","doi":"10.1109/OMEMS.2012.6318800","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318800","url":null,"abstract":"We present a polyacrylate-based thermopneumati-cally tunable liquid microlens with on-chip actuation for focal length tuning. The use of a polyacrylate membrane allows use of silicone oil as the optical liquid without any swelling or degradation.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129593873","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
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