2-D前向光学扫描仪与玻璃微透镜和隔离块使用热回流

2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI:10.1109/OMEMS.2012.6318849

S. Yoo, Joo-Young Jin, Joon-Geun Ha, C. Ji, Yong-Kweon Kim

{"title":"2-D前向光学扫描仪与玻璃微透镜和隔离块使用热回流","authors":"S. Yoo, Joo-Young Jin, Joon-Geun Ha, C. Ji, Yong-Kweon Kim","doi":"10.1109/OMEMS.2012.6318849","DOIUrl":null,"url":null,"abstract":"We present a novel fabrication method of a two-dimensional forward optical scanner with integrated microlens. Glass microlens and electrical isolation blocks were integrated with silicon XY-stage using thermal reflow process. Measured scan angles in X and Y directions at resonance were ±4.9° and ±5.0°, respectively, at atmospheric pressure.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"2-D forward optical scanner with glass microlens and isolation blocks using thermal reflow\",\"authors\":\"S. Yoo, Joo-Young Jin, Joon-Geun Ha, C. Ji, Yong-Kweon Kim\",\"doi\":\"10.1109/OMEMS.2012.6318849\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present a novel fabrication method of a two-dimensional forward optical scanner with integrated microlens. Glass microlens and electrical isolation blocks were integrated with silicon XY-stage using thermal reflow process. Measured scan angles in X and Y directions at resonance were ±4.9° and ±5.0°, respectively, at atmospheric pressure.\",\"PeriodicalId\":347863,\"journal\":{\"name\":\"2012 International Conference on Optical MEMS and Nanophotonics\",\"volume\":\"19 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-10-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 International Conference on Optical MEMS and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2012.6318849\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2012.6318849","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

提出了一种新型集成微透镜二维前向光学扫描仪的制作方法。采用热回流工艺将玻璃微透镜和电隔离块与硅xy级集成。在常压下，X和Y方向的共振扫描角分别为±4.9°和±5.0°。

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2-D forward optical scanner with glass microlens and isolation blocks using thermal reflow

We present a novel fabrication method of a two-dimensional forward optical scanner with integrated microlens. Glass microlens and electrical isolation blocks were integrated with silicon XY-stage using thermal reflow process. Measured scan angles in X and Y directions at resonance were ±4.9° and ±5.0°, respectively, at atmospheric pressure.

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2012 International Conference on Optical MEMS and Nanophotonics

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