Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176最新文献_第8页

Micromachined needles for the transdermal delivery of drugs 经皮给药用微机械针

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI: 10.1109/MEMSYS.1998.659807

S. Henry, D. McAllister, Mark G. Allen, M. Prausnitz

{"title":"Micromachined needles for the transdermal delivery of drugs","authors":"S. Henry, D. McAllister, Mark G. Allen, M. Prausnitz","doi":"10.1109/MEMSYS.1998.659807","DOIUrl":"https://doi.org/10.1109/MEMSYS.1998.659807","url":null,"abstract":"Although modern biotechnology has produced extremely sophisticated and potent drugs, many of these compounds cannot be effectively delivered using current drug delivery techniques (e.g., pills and injections). Administration across skin by transdermal drug delivery is an attractive alternative, but it is limited by the remarkably poor permeability of the skin. Because the primary barrier to transport is located in the upper 10-15 /spl mu/m of skin, and because nerves are only found in deeper tissue, we made arrays of microneedles long enough to cross the permeability barrier but not so long that they stimulate nerves, thereby causing no pain. These microneedles were fabricated using the Black Silicon Method, which is a reactive ion etching process in which an SF/sub 6//O/sub 2/ plasma etches silicon anisotropically. When inserted into skin in vitro, these microneedles demonstrated excellent mechanical properties and enhanced skin permeability to calcein, a model drug, by up to four orders of magnitude. Limited tests on humans demonstrated that microneedles were painless.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133655654","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 123

A one-body MEMS device composed of mutually insulated metallic parts-fabrication processes for a microactuator for high-density hard disk drives 一种由相互绝缘金属部件组成的单体MEMS器件——高密度硬盘驱动器微致动器的制造工艺

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI: 10.1109/MEMSYS.1998.659768

S. Nakamura, K. Suzuki, H. Fujita, T. Numazawa, H. Takada

引用次数: 5

Micro balloon actuators for aerodynamic control 用于气动控制的微型气球致动器

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI: 10.1109/MEMSYS.1998.659748

C. Grosjean, G.B. Lee, W. Hong, Y. Tai, C. Ho

引用次数: 62

Diamond microstructure replicas from silicon masters 钻石微观结构的复制品从硅大师

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI: 10.1109/MEMSYS.1998.659725

H. Björkman, P. Rangsten, U. Simu, J. Karlsson, P. Hollman, K. Hjort

引用次数: 8

A suspended microchannel with integrated temperature sensors for high-pressure flow studies 一个带有集成温度传感器的悬浮微通道，用于高压流动研究

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI: 10.1109/MEMSYS.1998.659734

S. Wu, J. Mai, Y. Zohar, Y. Tai, C. Ho

{"title":"A suspended microchannel with integrated temperature sensors for high-pressure flow studies","authors":"S. Wu, J. Mai, Y. Zohar, Y. Tai, C. Ho","doi":"10.1109/MEMSYS.1998.659734","DOIUrl":"https://doi.org/10.1109/MEMSYS.1998.659734","url":null,"abstract":"A freestanding microchannel, with integrated temperature sensors, has been developed for high-pressure flow studies. These microchannels are approximately 20 /spl mu/m/spl times/2 /spl mu/m/spl times/4400 /spl mu/m, and are suspended above 80 /spl mu/m deep cavities, bulk micromachined using BrF/sub 3/ dry etch. The calibration of the lightly boron-doped thermistor-type sensors shows that the resistance sensitivity of these integrated sensors is parabolic with respect to temperature and linear with respect to pressure. Volumetric flow rates of NZ in the microchannel were measured at inlet pressures up to 578 psig. The discrepancy between the data and theory results from the flow acceleration in a channel, the nonparabolic velocity profile, and the bulging of the channel. Bulging effects were evaluated by using incompressible water flow measurements, which also measures 1.045/spl times/10/sup -3/N-s/m/sup 2/ for the viscosity of DI water. The temperature data from sensors on the channel shows the heating of the channel due to the friction generated by the high-pressure flow inside.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128498261","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 58

3D micro-structures folded by Lorentz force 由洛伦兹力折叠的三维微观结构

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI: 10.1109/MEMSYS.1998.659723

Isao Shimoyama, Osamu Kano, Hirofumi Miura

引用次数: 29

New and extended possibilities of orientation dependent etching in microtechnics 微技术中取向相关蚀刻的新可能性和扩展可能性

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI: 10.1109/MEMSYS.1998.659760

B. Hannemann, J. Fruhauf

引用次数: 4

A rotary electrostatic micromotor 1/spl times/8 optical switch 一个旋转静电微电机1/spl次/8光开关

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI: 10.1109/MEMSYS.1998.659739

A. A. Yasseen, J. Mitchell, T. Streit, D.A. Smith, M. Mehregany

{"title":"A rotary electrostatic micromotor 1/spl times/8 optical switch","authors":"A. A. Yasseen, J. Mitchell, T. Streit, D.A. Smith, M. Mehregany","doi":"10.1109/MEMSYS.1998.659739","DOIUrl":"https://doi.org/10.1109/MEMSYS.1998.659739","url":null,"abstract":"A 1/spl times/8 rotary electrostatic micromotor optical switch fabricated using deep reactive ion etching technology has been demonstrated. The switches consist of silent-pole micromotors with 1 mm-diameter, 200 /spl mu/m-thick rotors that support either a 200 /spl mu/m or a 500 /spl mu/m-tall, 900 /spl mu/m-wide mirror. After fabrication of the components, switches were assembled and operated for extended periods in room air. Typical switches were actuated at 50 V and found to have a rapid rotation with an average optical switching time between fiber ports of 18.4 ms. Optical testing was performed at 1310 nm in single and multi-mode, and at 850 nm in multi-mode. The optical beam was propagated in free space with minimal divergence through the use of externally-mounted collimating gradient-index (GRIN) lenses. With an aluminum coating, the mirror and external optics exhibited an input to output coupling loss as low as 0.96 dB in multi-mode and 2.32 dB in single-mode. Inter-channel cross talk was less than -45 dB.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117249863","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 44

Strain gauge pressure and volume-flow transducers made by thermoplastic molding and membrane transfer 由热塑性成型和膜转移制成的应变式压力和体积流量传感器

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI: 10.1109/MEMSYS.1998.659783

J. Martin, W. Bacher, O.F. Hagena, W. Schomburg

引用次数: 27

Microfabrication and parallel operation of 5/spl times/5 2D AFM cantilever arrays for data storage and imaging 用于数据存储和成像的5/spl次/5二维AFM悬臂阵列的微加工和并行操作

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI: 10.1109/MEMSYS.1998.659720

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Haeberle, H. Rohrer, H. Rothuizen, P. Vettiger

引用次数: 32