Development of a new type piezoelectric micromotor

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI:10.1109/MEMSYS.1998.659789

K. Tani, M. Suzuki, K. Furuta, T. Sakuhara, T. Ataka

引用次数: 68

Abstract

We designed and fabricated a piezoelectric micromotor which has a new structure suited for miniaturization. The prototype piezoelectric micromotor we fabricated has 2 mm in diameter and 2 mm in height. It consists of a disk-shaped rotor, a cantilever stator and several oscillators with elements made by PZT ceramics. These elements are integrated into the prototype piezoelectric micromotor in a flat configuration. The rotor rotates at 50 to 450 rpm and a drive voltage ranging from 2 to 10 V/sub pp/.

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一种新型压电微电机的研制

设计并制作了一种适于微型化的新型压电微电机。我们制作的原型压电微电机直径为2mm，高度为2mm。它由一个盘形转子、一个悬臂定子和几个由PZT陶瓷制成的元件组成的振荡器组成。这些元件以扁平结构集成到原型压电微电机中。转子以50至450 rpm旋转，驱动电压范围为2至10 V/sub / pp/。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176

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