Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176

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Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 - 最新文献

Pub Date : 1998-01-25 DOI: 10.1109/MEMSYS.1998.659724 L. Fan, R.T. Chen, A. Nespola, M. Wu

Pub Date : 1998-01-25 DOI: 10.1109/MEMSYS.1998.659784 J. Kaienburg, M. Lutz, B. Maihofer, R. Schellin

Pub Date : 1998-01-25 DOI: 10.1109/MEMSYS.1998.659761 T. Muller, T. Feichtinger, G. Breitenbach, M. Brandl, O. Brand, H. Baltes

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