Micro balloon actuators for aerodynamic control

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI:10.1109/MEMSYS.1998.659748

C. Grosjean, G.B. Lee, W. Hong, Y. Tai, C. Ho

引用次数: 62

Abstract

A robust, large-force, large-deflection micro balloon actuator for aerodynamic (manoeuvring) control of transonic aircraft has been developed. Using a novel process, high yield linear arrays of silicone balloons on a robust silicon substrate have been fabricated that can deflect vertically in excess of one mm. Balloon actuators have been tested under cyclic conditions to assess reliability. The actuators have been characterized in a wind tunnel to assess their suitability as aerodynamic control surfaces and flight-tested on a jet fighter to assess their resistance to varied temperatures and pressures at high velocity.

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用于气动控制的微型气球致动器

研制了一种用于跨声速飞行器气动(机动)控制的鲁棒、大力、大挠度微气球作动器。利用一种新颖的工艺，在坚固的硅衬底上制造了高产量的硅气球线性阵列，可以垂直偏转超过1毫米。气球执行器已经在循环条件下进行了测试，以评估可靠性。执行器已经在风洞中进行了表征，以评估其作为气动控制面的适用性，并在喷气式战斗机上进行了飞行测试，以评估其在高速下对不同温度和压力的抵抗力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176

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