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2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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A betavoltaic microcell based on semiconducting single-walled carbon nanotube arrays/Si heterojunctions 基于半导体单壁碳纳米管阵列/硅异质结的倍他伏打微电池
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051156
M. Li, J. Zhang
{"title":"A betavoltaic microcell based on semiconducting single-walled carbon nanotube arrays/Si heterojunctions","authors":"M. Li, J. Zhang","doi":"10.1109/MEMSYS.2015.7051156","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051156","url":null,"abstract":"In this paper, a novel betavoltaic (BV) microcell based on semiconducting single-walled carbon nanotube (s-SWCNT) arrays/Si heterojunctions are demonstrated for the first time. The aligned arrays of p-type s-SWCNTs were prepared on n-type silicon to form the p-n heterojunctions as energy conversion by the traditional micro-fabrication process and dielectrophoretic (DEP) technology. The s-SWCNT arrays/Si p-n heterojunction displays better rectification characteristics than the SWCNT-based Schottky junctions such as Au/s-SWCNT/Ti and SWCNTs thin film/Si in our previous works. Under 7.8mCi/cm2 63Ni irradiation, the open circuit voltage (VOC) of 62mV, short current density (JSC) of 3.8μA/cm2, fill factor (FF) of 33.4% and energy conversion efficiency (η) of 9.8% were achieved. The results indicated that this s-SWCNT arrays/Si microcell has a huge potential for application in BV microcells.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"65 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125859272","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Ultrafine particle counter using a MEMS-based particle processing chip 采用mems粒子处理芯片的超细粒子计数器
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051016
Hong-Lae Kim, Jangseop Han, Sang-Myun Lee, Hong-Bum Kwon, Jungho Hwang, Yong-Jun Kim
{"title":"Ultrafine particle counter using a MEMS-based particle processing chip","authors":"Hong-Lae Kim, Jangseop Han, Sang-Myun Lee, Hong-Bum Kwon, Jungho Hwang, Yong-Jun Kim","doi":"10.1109/MEMSYS.2015.7051016","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051016","url":null,"abstract":"This paper reports on the full realization of an ultrafine particle monitoring system, including a MEMS-based particle processing chip and signal processing circuits. Unlike a conventional liquid-based microfluidic chip, the proposed particle processing chip handles a mixture of gas and particles. The proposed particle monitoring system is suitable for routine ambient air monitoring due to its small size, ease of use and low cost. The detection performance of the proposed system was evaluated through measurements of particle number concentration and compared with that of commercial instrument.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124994505","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
A study of adhesion forces in thick epitaxial polysilicon under dynamic impact loading 动态冲击载荷下厚外延多晶硅的粘附力研究
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051092
S. Dellea, R. Ardito, B. de Masi, F. Rizzini, A. Tocchio, G. Langfelder
{"title":"A study of adhesion forces in thick epitaxial polysilicon under dynamic impact loading","authors":"S. Dellea, R. Ardito, B. de Masi, F. Rizzini, A. Tocchio, G. Langfelder","doi":"10.1109/MEMSYS.2015.7051092","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051092","url":null,"abstract":"The work presents a structure and a method for the in-line characterization of impacts and adhesion phenomena between MEMS moving and fixed parts: the focus is on the monitoring of an inertial proof mass motion when colliding with a mechanical stopper. Through such measurements, one can evaluate the energy balance during impact events. The work analyzes the adhesion force evolution after a number of impact cycles comparable or larger than shocks in a 5-year operation. Results obtained on two different specimens show growing and then stabilizing adhesion forces of on average 170 nN, under impact cycles with about 500 fJ energy loss. No marked dependence on the specimen area is obtained. The possibility to change and track the impact kinetic energy is also demonstrated.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129414643","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Measuring the propagating teeth vibration of human chewing 测量人类咀嚼时牙齿振动的传播
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051039
Chie Suzuki, Y. Takei, T. Takahata, Kiyoshi Matsumoto, I. Shimoyama
{"title":"Measuring the propagating teeth vibration of human chewing","authors":"Chie Suzuki, Y. Takei, T. Takahata, Kiyoshi Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2015.7051039","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051039","url":null,"abstract":"We measured the propagation waves of teeth's vibrations when chewing food. The objective of this measurement is to find out the difference of perceived texture resulted from the difference of teeth alignment. Human senses teeth's vibrations caused by chewing food with periodontal membranes and regards it as texture. Therefore, measuring the teeth's vibrations will allow us to quantify the food texture which human actually senses. We fabricated an acoustic sensor that is small enough to be attached to teeth. For sensor evaluation, we conducted the rice cracker chewing test with our sensor attached to a real scale 3D jaw model, and propagation waves of around 500 Hz are observed.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"92 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129878389","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
PDMS balloon pump with a microfluidic regulator for the continuous drug supply in low flow rate 带有微流控调节器的 PDMS 球囊泵，可在低流量条件下持续供药
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051045
Y. Mukouyama, Y. Morimoto, S. Habasaki, T. Okitsu, S. Takeuchi
{"title":"PDMS balloon pump with a microfluidic regulator for the continuous drug supply in low flow rate","authors":"Y. Mukouyama, Y. Morimoto, S. Habasaki, T. Okitsu, S. Takeuchi","doi":"10.1109/MEMSYS.2015.7051045","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051045","url":null,"abstract":"This paper describes a small sized balloon pump for providing liquid in low flow rate without a driving source. The balloon pump is composed of a balloon tank and a microfluidic valve. The balloon tank can work as a reservoir to store liquid and an actuator to pump liquid. By connecting the microfluidic valve to the balloon tank, we achieved extremely low flow rates of the liquid. Therefore, our balloon pump will be applicable to implantable pumps for the continuous drug supply in low flow rates without batteries.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129359608","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Ultra sensitive lorentz force MEMS magnetometer with pico-tesla limit of detection 检测极限为皮特斯拉的超灵敏洛伦兹力MEMS磁强计
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7050922
Varun Kumar, M. Mahdavi, Xiaobo Guo, E. Mehdizadeh, S. Pourkamali
{"title":"Ultra sensitive lorentz force MEMS magnetometer with pico-tesla limit of detection","authors":"Varun Kumar, M. Mahdavi, Xiaobo Guo, E. Mehdizadeh, S. Pourkamali","doi":"10.1109/MEMSYS.2015.7050922","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050922","url":null,"abstract":"This work presents ultra-high sensitivities for Lorentz Force resonant MEMS magnetometers enabled by internal thermal-piezoresistive vibration amplification. Up to 2400X increase in sensitivity has been demonstrated by tuning the resonator bias current to maximize its internal amplification factor boosting the effective Quality Factor (Q) from its intrinsic value of 680 to 1.14×106 (1675X amplification). For a bias current of 7.245mA, where the sensitivity of the device is maximum (2.107mV/nT), the noise floor is measured to be as low as 2.8 pT/√Hz. This is by far the most sensitive MEMS Lorentz force magnetometer demonstrated to date.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129736966","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
On-chip pressure sensing by visualizing PDMS deformation using microbeads 利用微珠可视化PDMS变形的片上压力传感
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051059
C. Tsai, M. Kaneko
{"title":"On-chip pressure sensing by visualizing PDMS deformation using microbeads","authors":"C. Tsai, M. Kaneko","doi":"10.1109/MEMSYS.2015.7051059","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051059","url":null,"abstract":"A novel pressure sensing technique based on visualizing Polydimethylsiloxane (PDMS) deformation using microbeads is proposed here for measuring local pressure inside a microfluidic device. By the proposed method, the pressure can be directly “seen” without attaching any wire foils, such as a strain gauge, nor complex fabrication process, such as multilayer design or surface grating. Experimental results are shown and analyzed based on brightness value from captured images of microbeads pattern. The developed sensor is firstly calibrated by a commercial pressure sensor with feedback controlled syringe pump connected externally. According to the experimental results, the proposed sensing method is stable and repeatable in the steady state under dynamic pressure change, and the variation for the same given pressure from time to time is less than 1%. The correlation, R, between the pressure obtained from the proposed method and the reference pressure connected outside is up to 0.9953.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"05 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129973293","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
A graphene accelerometer 石墨烯加速度计
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051096
A. Hurst, Sunwoo Lee, W. Cha, J. Hone
{"title":"A graphene accelerometer","authors":"A. Hurst, Sunwoo Lee, W. Cha, J. Hone","doi":"10.1109/MEMSYS.2015.7051096","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051096","url":null,"abstract":"This work presents an SU-8 clamped graphene nano-electro-mechanical-system (GNEMS) accelerometer. A suspended graphene membrane is circularly clamped by SU-8, with an additional proof mass made of either SU-8 or gold, located at the center of the membrane. This GNEMS accelerometer is approximately three orders of magnitude smaller than state of the art micro-electromechanical (MEMS) accelerometers with the diameter of the suspended graphene membrane being 3-10 μm and the proof mass diameter being 1-5 μm. Here, we present the fabrication, simulation, and experimental aperiodic calibration results of the GNEMS accelerometer, demonstrating a repeatable response to an input acceleration levels of ~1000-3000 g.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130067807","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 17
Mechanical characterization of thin films using a MEMS device inside SEM 在SEM内使用MEMS器件的薄膜力学特性
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7050969
Changhong Cao, Brandon K. Chen, T. Filleter, Yu Sun
{"title":"Mechanical characterization of thin films using a MEMS device inside SEM","authors":"Changhong Cao, Brandon K. Chen, T. Filleter, Yu Sun","doi":"10.1109/MEMSYS.2015.7050969","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050969","url":null,"abstract":"A MEMS device was developedfor mechanical characterization of 2D ultra-thin films. The device utilizes electrothermal actuators to apply uniaxial tension. The robust design makes the device capable of withstanding both dry and wet transfer of 2D ultra-thin film materials onto the suspended structures of the device. Fracture stress of thin graphene oxide (GO) films was measured.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126962495","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Micromechanical ring resonators with a 2D phononic crystal support for mechanical robustness and providing mask misalignment tolerance 微机械环形谐振器与一个二维声子晶体支持机械稳健性和提供掩膜偏差公差
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051134
B. Figeys, B. Nauwelaers, H. Tilmans, X. Rottenberg
{"title":"Micromechanical ring resonators with a 2D phononic crystal support for mechanical robustness and providing mask misalignment tolerance","authors":"B. Figeys, B. Nauwelaers, H. Tilmans, X. Rottenberg","doi":"10.1109/MEMSYS.2015.7051134","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051134","url":null,"abstract":"This paper reports on the design of ring-type electrostatically transduced bulk acoustic wave resonators designed for increased shock and vibration resistance. This was achieved through a 2D Phononic Crystal (PnC) support. The PnC is designed to operate in its bandgap so that it acts as a non-propagating medium, hereby achieving simultaneously a mechanically strong and acoustically well-confined support. We manufactured SiGe-resonators at 137.8MHz with a Q-factor of around 17,000. Another feature of this design is the process tolerance of the Q-factor (within 5%) and the resonance frequency towards mask misalignment (<;7μm) for the center support.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132159792","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
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