在SEM内使用MEMS器件的薄膜力学特性

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI:10.1109/MEMSYS.2015.7050969

Changhong Cao, Brandon K. Chen, T. Filleter, Yu Sun

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引用次数: 8

摘要

研制了一种用于二维超薄膜力学表征的MEMS器件。该装置利用电热致动器施加单轴张力。坚固的设计使该装置能够承受二维超薄薄膜材料在该装置的悬浮结构上的干燥和湿转移。测量了氧化石墨烯薄膜的断裂应力。

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Mechanical characterization of thin films using a MEMS device inside SEM

A MEMS device was developedfor mechanical characterization of 2D ultra-thin films. The device utilizes electrothermal actuators to apply uniaxial tension. The robust design makes the device capable of withstanding both dry and wet transfer of 2D ultra-thin film materials onto the suspended structures of the device. Fracture stress of thin graphene oxide (GO) films was measured.

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2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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