采用mems粒子处理芯片的超细粒子计数器

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI:10.1109/MEMSYS.2015.7051016

Hong-Lae Kim, Jangseop Han, Sang-Myun Lee, Hong-Bum Kwon, Jungho Hwang, Yong-Jun Kim

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引用次数: 9

摘要

本文报道了一个超细颗粒监测系统的完整实现，包括基于mems的颗粒处理芯片和信号处理电路。与传统的基于液体的微流控芯片不同，所提出的颗粒处理芯片处理气体和颗粒的混合物。该系统具有体积小、使用方便、成本低等特点，适用于日常环境空气监测。通过测量颗粒数浓度对系统的检测性能进行了评价，并与商用仪器的检测结果进行了比较。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Ultrafine particle counter using a MEMS-based particle processing chip

This paper reports on the full realization of an ultrafine particle monitoring system, including a MEMS-based particle processing chip and signal processing circuits. Unlike a conventional liquid-based microfluidic chip, the proposed particle processing chip handles a mixture of gas and particles. The proposed particle monitoring system is suitable for routine ambient air monitoring due to its small size, ease of use and low cost. The detection performance of the proposed system was evaluated through measurements of particle number concentration and compared with that of commercial instrument.

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来源期刊

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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