2016 14th International Baltic Conference on Atomic Layer Deposition (BALD)最新文献_第2页

On the splitting method for the numerical solution of Boltzmann and lattice Boltzmann equations for gas flows in microsystems 微系统气体流动玻尔兹曼方程和晶格玻尔兹曼方程数值解的分裂方法

2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) Pub Date : 2016-10-01 DOI: 10.1109/BALD.2016.7886538

G. Krivovichev, E. S. Marnopolskaya

引用次数: 1

The holistic method of the surface structure characterization 表面结构表征的整体方法

2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) Pub Date : 2016-10-01 DOI: 10.1109/BALD.2016.7886525

V. N. Petrushin, Y. Rudyak, G. Rytikov

引用次数: 3

Characterization of nonstoichiometric silicon nitride PECVD/ALD films for IR micro-detectors array 用于红外微探测器阵列的非化学计量氮化硅PECVD/ALD薄膜的表征

2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) Pub Date : 2016-10-01 DOI: 10.1109/BALD.2016.7886527

G. Rudakov, A. Sigarev, V. Fedirko, E. A. Fetisov

引用次数: 2

Multilayer nano-structured field emitters for formation of high density electron beams in minituarized devices 用于在小型化装置中形成高密度电子束的多层纳米结构场发射体

2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) Pub Date : 2016-10-01 DOI: 10.1109/BALD.2016.7886539

G. Sominskii, V. Sezonov

引用次数: 4

Modeling of fluctuations for the field electron emission current density 场电子发射电流密度波动的建模

2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) Pub Date : 2016-10-01 DOI: 10.1109/BALD.2016.7886532

A. Y. Antonov, Ya. I. Rusina, M. I. Varayun'

引用次数: 0

I–V curve investigation with regression methods 用回归方法研究I-V曲线

2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) Pub Date : 2016-10-01 DOI: 10.1109/BALD.2016.7886533

A. Y. Antonov, M. I. Varayun'

{"title":"I–V curve investigation with regression methods","authors":"A. Y. Antonov, M. I. Varayun'","doi":"10.1109/BALD.2016.7886533","DOIUrl":"https://doi.org/10.1109/BALD.2016.7886533","url":null,"abstract":"Currently, field electron emission is an indispensable tool for studying advanced materials. Analysis of the current-voltage (I–V ) dependences allows us to derive information about some characteristics of the field-emission cathode (i.e., work function or field enhancement factor values). It is known that in the Fowler—Nordheim coordinates I–V curve is linear. A linear approximation can be constructed with the method of ordinary least squares (OLS). OLS is one of the basic methods of regression analysis used to estimate unknown parameters of regression models. However, reliable confidence intervals for the regression coefficients can only be easily obtained if the model residuals are normally distributed. This is impossible to assume about the log-transformed I–V curve. The scope of this paper is modeling of I–V dependence. The random errors of I measurements are normally distributed. We have constructed estimations of the coefficients in Fowler— Nordheim law (i.e. A and B) using methods of linear and nonlinear regression and shown that those approaches give different results. Errors of determining of the coefficients A and B are presented.","PeriodicalId":328869,"journal":{"name":"2016 14th International Baltic Conference on Atomic Layer Deposition (BALD)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128138907","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Phenomenon of pulsed high-power electron emission from graphene-like structures and carbon nanotubes stimulated by electric field 类石墨烯结构和碳纳米管在电场刺激下的脉冲高功率电子发射现象

2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) Pub Date : 2016-10-01 DOI: 10.1109/BALD.2016.7886535

G. Fursey, M. Polyakov, I. Zakirov

引用次数: 2

Measuring the thickness of ALD-fabricated thin films by small-angle X-ray scattering 小角x射线散射法测量ald薄膜厚度

2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) Pub Date : 2016-10-01 DOI: 10.1109/BALD.2016.7886524

K. Nishchev, M. I. Novopoltsev, Natalia A. Ruzavina, V. S. Khramov, E. N. Lyutova

引用次数: 3

Influence of ALD temperature on thin film conformality: Investigation with microscopic lateral high-aspect-ratio structures ALD温度对薄膜一致性的影响:微观横向高纵横比结构的研究

2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) Pub Date : 2016-10-01 DOI: 10.1109/BALD.2016.7886526

R. Puurunen, F. Gao

{"title":"Influence of ALD temperature on thin film conformality: Investigation with microscopic lateral high-aspect-ratio structures","authors":"R. Puurunen, F. Gao","doi":"10.1109/BALD.2016.7886526","DOIUrl":"https://doi.org/10.1109/BALD.2016.7886526","url":null,"abstract":"Unparallelled conformality is driving the interest to use coatings made by atomic layer deposition (ALD) in a growing number of applications from microelectronics to catalysis to biomedical devices and beyond. Despite the fundamental importance of conformality, dedicated conformality studies of ALD processes have been scarcely reported, as available, easy-to-use conformality test structures have been missing. In earlier work, we have developed silicon-based lateral high-aspect-ratio (LHAR) test structures [J. Vac. Sci. Technol. A, 33, 010601 (2015)], which are used in this work to analyse the influence of ALD temperature on the conformality of aluminium oxide, titanium dioxide and their nanolaminates. With the LHAR structures of a gap height of 500 nm and aspect ratios (AR) up to 10 000:1, films grown at 110 to 300 degrees Celsius are observed enter typically up to an aspect ratio of 100∶1 to 200∶1. The temperature trend of conformality differs for aluminium oxide and titanium dioxide ALD processes: aluminium oxide penetrates deeper in the 3D structures at lower temperatures, while titanium dioxide has a maximum penetration depth at 200 degrees Celsius. An inverse correlation was seen between a decreasing ALD growth per cycle (GPC) and an increasing conformality. Metal reactant consumption along the trench is proposed to explain the correlation. Microscopic LHAR structures expose a new parameter space conformality analysis and are likely to enable novel experimental and theoretical conformality studies in the future in ALD and related fields.","PeriodicalId":328869,"journal":{"name":"2016 14th International Baltic Conference on Atomic Layer Deposition (BALD)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130531584","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 7

The sharp-edged field cathode mathematical modeling 锐边场阴极数学建模

2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) Pub Date : 2016-10-01 DOI: 10.1109/BALD.2016.7886541

E. Vinogradova, N. Egorov, G. Doronin

引用次数: 1