用于在小型化装置中形成高密度电子束的多层纳米结构场发射体

2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) Pub Date : 2016-10-01 DOI:10.1109/BALD.2016.7886539

G. Sominskii, V. Sezonov

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引用次数: 4

摘要

研究了由具有不同功函数的纳米层材料组成的场致发射体在连续模式下的工作情况。计算并实验测量了发射电流与层厚度的关系。从含有40对Yb-C层的阴极中获得电流~ 170 - 180 mkA和电流密度高达10 A/cm。经测试的阴极在技术真空条件下稳定运行。

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Multilayer nano-structured field emitters for formation of high density electron beams in minituarized devices

The operation of the field emitters, consisting of nano-layers of materials with different work function was investigated in continuous mode. Dependence of the emission current on the thickness of the layers was calculated and experimentally measured. There were obtained currents ∼ 170– 180 mkA and current density up to 10 A/cm from the cathods containing 40 pairs of layers Yb-C. Tested cathodes stably operated in technical vacuum conditions.

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来源期刊

2016 14th International Baltic Conference on Atomic Layer Deposition (BALD)

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