Design, Test, Integration, and Packaging of MEMS/MOEMS最新文献_第10页

Characterization of porous silicon for solar cell application by atomic force microscopy 太阳能电池用多孔硅的原子力显微镜表征

Design, Test, Integration, and Packaging of MEMS/MOEMS Pub Date : 1999-03-10 DOI: 10.1117/12.341190

I. Šimkienė, V. Snitka, K. Naudzius, V. Pačebutas, M. Rackaitis

引用次数: 0

High-precision positioning stage for microassembly purposes 用于微装配的高精度定位台

Design, Test, Integration, and Packaging of MEMS/MOEMS Pub Date : 1999-03-10 DOI: 10.1117/12.341267

M. Weck, B. Petersen

引用次数: 3

Moems at Leti Moems at Leti

Design, Test, Integration, and Packaging of MEMS/MOEMS Pub Date : 1999-03-10 DOI: 10.1117/12.341258

P. Mottier, E. Ollier, P. Pouteau, Karine Petroz, Sylvie Jarjayes

引用次数: 0

Microfabrication technique for thick structure of metals and PZT 金属和压电陶瓷厚结构微细加工技术

Design, Test, Integration, and Packaging of MEMS/MOEMS Pub Date : 1999-03-10 DOI: 10.1117/12.341236

Toru Shimizu, Y. Murakoshi, Z. Wang, R. Maeda, T. Sano

{"title":"Microfabrication technique for thick structure of metals and PZT","authors":"Toru Shimizu, Y. Murakoshi, Z. Wang, R. Maeda, T. Sano","doi":"10.1117/12.341236","DOIUrl":"https://doi.org/10.1117/12.341236","url":null,"abstract":"Micro fabrication techniques for thick structure are developed. One method is a micro fabrication method using injection molding. And another method is the coating method using hydro gel. First method is almost same technique which is named MIM or CIM. In the process, the powder is mixed with the binder and mixture is injection molded. the molded parts are extracted the binder using supercritical carbon dioxide, and sintered. Employing this process, micro pattern which has aspect ratio more than 5 can be molded by metal powder and PZT. In this method, a micro pattern made by laser ablation is used as a die. As compared with other micro fabrication techniques, this method can utilize the molding die repeatedly. Consequently, the producing cost of micro parts can be decreased by this method on actual production process. Second method is a technique which uses the PVA hydrogel. The powder is mixed with water which contains the PVA from 3 to 15 percent. The mixed compound is sandwiched with PE films.It is froze and a gel sheet which has thickness from 40 to 100 micrometers is obtained. Using the sheet, the ceramic and metal are coated on the Silicon wafer, and thick structure is fabricated.","PeriodicalId":318748,"journal":{"name":"Design, Test, Integration, and Packaging of MEMS/MOEMS","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134462790","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 7

Construction and manufacturing of a microgearhead with 1.9-mm outer diameter for universal application 外径1.9毫米的通用微型齿轮箱的构造和制造

Design, Test, Integration, and Packaging of MEMS/MOEMS Pub Date : 1999-03-10 DOI: 10.1117/12.341242

C. Thuerigen, U. Beckord, R. Bessey

{"title":"Construction and manufacturing of a microgearhead with 1.9-mm outer diameter for universal application","authors":"C. Thuerigen, U. Beckord, R. Bessey","doi":"10.1117/12.341242","DOIUrl":"https://doi.org/10.1117/12.341242","url":null,"abstract":"Many new applications in medicine, telecommunication, automation systems etc. require powerful microdrives. Speeds up to 100.000 rpm and output torques in the (mu) Nm-range are typical characteristics of electromagnetic micromotors with diameters of a few millimeters. To accomplish a powerful microdrive, these micromotors have to be combined with micro gearheads of the same outer diameter. For such a micro gearhead with toothed wheels manufactured by use of the LIGA process a multi-stage planetary gear has many advantages. Many stages with different gear ratios can be combined to achieve a great number of different transmission, but manufacturing tolerances and a clearance for assembly must be respected. Therefore besides the selection of a reliable gearhead type and a suitable manufacturing process the optimization of the tooth profile is the key to the implementation of powerful micro gear systems with high output torques and efficiencies. The involute profile is the most suitable toothing, but many calculations and simulations are required to find the right modulus, total depth of teeth, profile offset etc. In a joint project Dr. Fritz Faulhaber GmbH and Co. KG and the Institut fuer Mikrotechnik Mainz GmbH developed a powerful microdevice with an outer diameter of only 1.9 mm.","PeriodicalId":318748,"journal":{"name":"Design, Test, Integration, and Packaging of MEMS/MOEMS","volume":"25 4","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114133430","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

Modeling and simulating optical MEMS using Chatoyant 基于Chatoyant的光学MEMS建模与仿真

Design, Test, Integration, and Packaging of MEMS/MOEMS Pub Date : 1999-03-10 DOI: 10.1117/12.341207

T. Kurzweg, S. Levitan, P. Marchand, J. A. Martínez, K. R. Prough, D. Chiarulli

引用次数: 5

Design, fabrication, and thrust prediction of solid propellant microthrusters for space application 空间固体推进剂微推力器的设计、制造和推力预测

Design, Test, Integration, and Packaging of MEMS/MOEMS Pub Date : 1999-03-10 DOI: 10.1117/12.341157

C. Rossi, N. Fabre, V. Conedera, D. Estève

引用次数: 3

Integrated CAD tools for top-down design of MEMS/MOEMS systems 集成CAD工具，用于自顶向下设计MEMS/MOEMS系统

Design, Test, Integration, and Packaging of MEMS/MOEMS Pub Date : 1999-03-10 DOI: 10.1117/12.341200

B. Romanowicz, S. Bart, J. Gilbert

引用次数: 2

Providing technology infrastructure for MEMS

Design, Test, Integration, and Packaging of MEMS/MOEMS Pub Date : 1999-03-10 DOI: 10.1117/12.341213

R. Ribas, D. Veychard, J. Karam, B. Courtois

引用次数: 1

Fabrication of MEMS using liquid jet dispensing technique 利用液体喷射点胶技术制造MEMS

Design, Test, Integration, and Packaging of MEMS/MOEMS Pub Date : 1999-03-10 DOI: 10.1117/12.341278

S. Sarkisov, A. Darwish, H. Abdeldayem, G. Adamovsky, M. Kulishov, C. Banks, JaChing Wang

{"title":"Fabrication of MEMS using liquid jet dispensing technique","authors":"S. Sarkisov, A. Darwish, H. Abdeldayem, G. Adamovsky, M. Kulishov, C. Banks, JaChing Wang","doi":"10.1117/12.341278","DOIUrl":"https://doi.org/10.1117/12.341278","url":null,"abstract":"We describe a simple yet efficient technique of delineation of various polymer MEMS structures using computer driven liquid jet dispenser. A syringe-type dispenser with a replaceable needle is filled with a polymer solution and mounted on a vertical translation stage. The substrate is mounted on two-coordinate horizontal translation stage. Additional vertical translation arm is connected to the plunger of the syringe. Vertical translation provides positioning of the needle at a certain height over the substrate. Delineation is accomplished when the syringe plunger, being pushed down by the vertical translation arm, dispenses the liquid on the substrate at a programmable flow rate simultaneously with horizontal motion of the substrate with respect to the needle. Horizontal motion is done along a programmable trajectory at a programmable sped. Comparing to conventional methods, the proposed device consumes three order of magnitude less amount of material for the fabrication of similar MEMS structures. In addition, we describe a supplement to the liquid delineation system in the form of a microscope objective head connected to a noncoherent UV source with a multimode optical fiber. The head can serve as a tool for UV curing of the polymer material deposited with the jet dispenser as well as a separate UV writing tool. In conclusion, we describe the calculation technique for the distribution of the electric field in electrically or optically controlled ferroelectric polymer MEMS fabricated by the proposed technique.","PeriodicalId":318748,"journal":{"name":"Design, Test, Integration, and Packaging of MEMS/MOEMS","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128633692","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1