Moems at Leti

Abstract

We give a quick overview of MOEMS technologies under development at LETI. We mainly focus on recent developments in relation with the 'Europractice Competence Center Number 3' dedicated to MOEMS whose LETI is the coordinator. MOEMS are optical devices offering simultaneously optical and mechanical functions, and achieved in a collective manner by means of microelectronics like process and machines. Different devices and demonstrators already exist at LETI such as micro-switches for optical fiber networks, vibration sensors, scanning devices for laser or are under development such as tunable Fabry-Perot interferometers. Examples and performances are presented.