{"title":"Providing technology infrastructure for MEMS","authors":"R. Ribas, D. Veychard, J. Karam, B. Courtois","doi":"10.1117/12.341213","DOIUrl":null,"url":null,"abstract":"CMP has been providing infrastructures for integrated circuits manufacturing since 1981. These infrastructures have been extended to provide services for MEMS manufacturing. These services are available to Universities and Companies.","PeriodicalId":318748,"journal":{"name":"Design, Test, Integration, and Packaging of MEMS/MOEMS","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Design, Test, Integration, and Packaging of MEMS/MOEMS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.341213","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
CMP has been providing infrastructures for integrated circuits manufacturing since 1981. These infrastructures have been extended to provide services for MEMS manufacturing. These services are available to Universities and Companies.
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