Modeling and simulating optical MEMS using Chatoyant

Abstract

The use of MEMS technology has enabled the fabrication of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended our opto-electronic system DAD tool, Chatoyant, to attempt to meet the needs to optical MEMS designers. This paper present new component models and analysis techniques which extend our tool to support optical MEMS design. We demonstrate these extensions with the analysis of a micro-optical high speed FT engine and a 1 by 2 optical MEM interferometer switch.