{"title":"MEMS components with perfectly protected edges and corners in Si{110} wafers","authors":"P. Pal, Kazuo Sato, H. Hida","doi":"10.1109/MHS.2011.6102158","DOIUrl":"https://doi.org/10.1109/MHS.2011.6102158","url":null,"abstract":"In this paper, we report a fabrication method for the formation of microelectromechanical systems (MEMS) structures with perfectly protected edges and corners in {110}Si wafers using complementary metal oxide semiconductor (CMOS) compatible tetramethyl-ammonium hydroxide (TMAH) solution. Fabrication method includes two-steps wet etching. The second step of etching is carried out after mask inversion from silicon nitride (Si3N4) to silicon dioxide (SiO2) by local oxidation of silicon (LOCOS) followed by nitride etching. Mask design methodology for the various shapes microstructures whose edges aligned along different directions is briefly discussed.","PeriodicalId":286457,"journal":{"name":"2011 International Symposium on Micro-NanoMechatronics and Human Science","volume":"56 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126060381","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Microfluidics and microfabrication technology for highly precise cell manipulation and cultivation","authors":"M. Yamada, M. Seki","doi":"10.1109/MHS.2011.6102178","DOIUrl":"https://doi.org/10.1109/MHS.2011.6102178","url":null,"abstract":"Microfluidic processes are essential techniques not only for manipulating micrometer-size objects like cells, particles, and biomacromolecules, but also for producing micrometer-size objects with highly-controlled morphologies or compositions. First, continuous and rapid separation and accumulation methods for particles or cells using microfluidic devices are introduced. Microfluidic devices have a potential to facilitate rapid and precise particle manipulation, due to accurately fabricated structures close to particle sizes, in micrometer or dimensions. Newly developed methods enable a size- and/or shape-dependent, precise separation of biological cells or soft matters. Next, we present microfluidic devices for preparing functional micrometer-size hydrogel materials having fibrous or particulate morphology. The physical/chemical heterogeneity of the prepared materials allows the incorporated cells to grow differently from the conventional plate cultivation, which is useful for preparing unit structures mimicking the in-vivo tissues. In addition to these materials, here we introduce recently developed several microfluidic/microfabrication techniques, including the preparation processes of microstructured and layered hydrogel plates, micropatterning of ultra-thin hydrogels utilizing local surface modification, micronozzle structures for producing actuating lipid vesicles, and the continuous microfluidic cell processing. These techniques would be useful for rapidly fabricating relatively-large tissue models by assembling the unit materials and/or by employing various conventional/unconventional micromanipulation technologies.","PeriodicalId":286457,"journal":{"name":"2011 International Symposium on Micro-NanoMechatronics and Human Science","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126564473","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Masaaki Murata, Hidekatsu Ito, Teppei Taenaka, S. Kudoh
{"title":"Modification of activity pattern induced by synaptic enhancements in a semi-artificial network of living neurons","authors":"Masaaki Murata, Hidekatsu Ito, Teppei Taenaka, S. Kudoh","doi":"10.1109/MHS.2011.6102187","DOIUrl":"https://doi.org/10.1109/MHS.2011.6102187","url":null,"abstract":"Higher brain function such as memory formation was not performed by activity of a single neuron but performed by functions of a complex network of neuronal cells. The simple small-scaled network of neuronal cells is fully suitable for such interactions between neurons. Dissociated neurons form a network depending on their electrical activity and spontaneous activity frequently observed within a week. We cultured a network of dissociated neurons on a culture dish with 64 planer microelectrodes. We induced synaptic enhancement in cultured neuronal networks by exposing to Mg2+-free condition for 20 min. Mg2+-free condition was achieved by exchanging of normal cell external solution to Mg2+-free recording solution. After the induction of synaptic enhancement, we analyzed activity pattern by an autocorrelogram-based and crosscorrelogram-based method. Autocorrelogram of the neuronal activity centralized, suggesting that the accuracy of the periodicity increased. This drastic change was induced within only 20 minutes. Crosscorrelogram shows those network activity changed to be more synchronously than one before exposure to Mg2+-free condition. These results suggest that functional connections in a semi-artificial neuronal network were changed to ones performing enhanced network activity than before. The modification of the spatiotemporal pattern of activity is thought to be a base of memory in vivo experiments. We performed similar phenomenon in this semi-artificial, autonomously reorganized network of neurons. By elucidation of these modified functional connections in neural network, we can find a cue how to control biological memory formation.","PeriodicalId":286457,"journal":{"name":"2011 International Symposium on Micro-NanoMechatronics and Human Science","volume":"123 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133596708","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
C. Tercero, S. Ikeda, T. Fukuda, F. Arai, M. Negoro, I. Takahashi
{"title":"High sensitivity vasculature models and catheter trajectory reconstruction using a bi-planar vision system","authors":"C. Tercero, S. Ikeda, T. Fukuda, F. Arai, M. Negoro, I. Takahashi","doi":"10.1109/MHS.2011.6102198","DOIUrl":"https://doi.org/10.1109/MHS.2011.6102198","url":null,"abstract":"Simulator based evaluation has been used for medical licensing, intravascular tools evaluation and robotic catheter insertion systems research. However it is need to develop quantitative evaluation methods for the catheter trajectory inside vasculature phantoms. In this study we present two technologies developed for that purpose. First we present models of vasculature made of epoxy resin with higher sensitivity for photoelastic effect than previously used modeling materials. The second contribution for that purpose is a stereovision system for measuring evaluation parameters such as catheter tip motion capture, model deformation and stress within the model at 3fps enabling comparison catheter trajectories and catheter insertion robot control. Models of carotid artery, saccular aneurysm with bleb, aorta arch and giant aneurysm were built using the epoxy resin. And for the robot control using the vision system, from 10 consecutive trials of trajectory reconstruction in a model of carotid artery a success rate of 80% was obtained with feedback control activated.","PeriodicalId":286457,"journal":{"name":"2011 International Symposium on Micro-NanoMechatronics and Human Science","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134110293","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Sasaki, T. Arakawa, Atsushi Nakayama, G. Obinata, M. Yamaguchi
{"title":"Estimation of tongue movement based on suprahyoid muscle activity","authors":"M. Sasaki, T. Arakawa, Atsushi Nakayama, G. Obinata, M. Yamaguchi","doi":"10.1109/MHS.2011.6102222","DOIUrl":"https://doi.org/10.1109/MHS.2011.6102222","url":null,"abstract":"With attention to voluntary tongue motion, which is capable of communicating the intentions of a person with a disability, we estimated the position and contact force of the tongue simultaneously using EMG signals of the underside of the jaw. We affixed a multi-channel electrode with nine electrodes to the underside of the jaw. Then, deriving many EMG signals using monopolar leads, we calculated 36 (= 9C2) channel EMG signals between any two of the nine electrodes. Associating these EMG signals and tongue movement using a neural network, we confirmed our ability to estimate the tongue position and contact force with precision, with a correlation coefficient greater than 0.9 and RMS error less than 10%. Furthermore, building a neural network estimating deglutition, yawning, and mouth opening, which are potential origins of false estimation, and introducing mask processing to reduce estimation error in voluntary tongue movement more than 95%, we suggest precise extraction of only the signal of that movement from EMG signals obtainable from the underside of the jaw.","PeriodicalId":286457,"journal":{"name":"2011 International Symposium on Micro-NanoMechatronics and Human Science","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131600512","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Fabrication of thermoresponsive surface for cell sheet harvest by photopolymerization","authors":"K. Itoga, J. Kobayashi, M. Yamato, T. Okano","doi":"10.1109/MHS.2011.6102179","DOIUrl":"https://doi.org/10.1109/MHS.2011.6102179","url":null,"abstract":"Our laboratory developed “cell sheet engineering”, which has been applied to regenerative medicine. However, the applications are restricted to the transplants of single-, double-, and triple-layered cell sheets, because of the poor supplies of nutrients and oxygen. To fabricate thicker and dense tissues in vitro, multi-layered cell sheets require to have capillary networks. Additionally, individual tissues found in animal body have individual specific micropatterns of cells for expressing their specific functions and characters. Therefore, we focus on micropatterned co-cultured cell sheets as one of the methods to fabricate thicker and more functional tissues. Polymerization of thermoresponsive polymer, poly(N-isopropylacrylamide) (PIPAAm), by electron beam irradiation has been used for fabrication of thermoresponsive surfaces on tissue culture polystyrene dishes. However, it is difficult to fabricate micropatterned surfaces of thermoresponsive polymer by electron beam irradiation. Therefore, we attempted to optimize photopolymerization condition of PIPAAm with a visible light photopolymerization initiator, water-soluble camphorquinone, as the fabrication method of thermoresponsive surface.","PeriodicalId":286457,"journal":{"name":"2011 International Symposium on Micro-NanoMechatronics and Human Science","volume":"84 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"113987105","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Nanotool exchanger system using low-melting metal under environmental SEM","authors":"M. Nakajima, T. Kawamoto, M. Kojima, T. Fukuda","doi":"10.1109/MHS.2011.6102161","DOIUrl":"https://doi.org/10.1109/MHS.2011.6102161","url":null,"abstract":"This paper proposes a new nanotool exchanger system using low-melting metal under Environmental Scanning Electron Microscope (E-SEM). We developed an E-SEM nanorobotic manipulation system for biological specimen analysis in nano-meter scale. The nanomanipulation system has multi-degrees of freedom and multi-units. The “nanotools” proposed to realize flexible and complex nano-scale stiffness measurement, adhesion force measurement, cutting, injection, and so on. In this paper, we develop a nanotool exchanger system, which mainly consists of nanotool adapter, nanotool holder, and nanotool attachment for various types of nanotools. At first, the nanotools are fixed in the nanotool holder with nanotool adapter. The nanotool adapter is designed to hold the various types of nanotools. To apply nanotools to some samples, the nanotool attachment is used to fix the nanotool as an end-effector of nanomanipulator with nanotool adapter. Through the nanotool exchanger system, it is not needed to open the sample chamber to exchange the nanotools and to evacuate the sample chamber pressure.","PeriodicalId":286457,"journal":{"name":"2011 International Symposium on Micro-NanoMechatronics and Human Science","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116125658","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Grasping strategy of two robot arms based on tactile and slippage sensation of optical three-axis tactile sensor system","authors":"H. Yussof, S. C. Abdullah, J. Wada, M. Ohka","doi":"10.1109/MHS.2011.6102221","DOIUrl":"https://doi.org/10.1109/MHS.2011.6102221","url":null,"abstract":"This paper presents a new grasping strategy of two robot arms based on active tactile and slippage sensation using a novel optical three-axis tactile sensor system. The tactile sensors are mounted on the tip of robotic hands of two robot arms. In the robot motion control, a recurrent mechanism was implemented in which the next behavior is induced by the tactile data to make the robot accept intention embedded in the environment. Since this mechanism is based on the tactile data, it is possible to apply it to communication between the hand-arms to obtain the best timing for cooperative work. A slippage distribution analysis was conducted which result shows that slippage occurred according to direction of force applied to the sensing elements. In experiments, the two-hand-arm robot performed object grasping, twisting, transferring and assembling tasks. Experimental results show that the proposed strategy has great potential to improve grasping performance of robot hand because appropriate behavior is induced according to tactile and slippage direction.","PeriodicalId":286457,"journal":{"name":"2011 International Symposium on Micro-NanoMechatronics and Human Science","volume":"124 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127475622","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Micro-rotation flow chamber rapidly forming collagen gel-mediated hetero-spheroids","authors":"H. Ota, T. Kodama, M. Yamato, T. Okano, N. Miki","doi":"10.1109/MHS.2011.6102166","DOIUrl":"https://doi.org/10.1109/MHS.2011.6102166","url":null,"abstract":"Spheroids that are formed from aggregated cells enhance biological function compared to monolayer culture. In particular, hetero-spheroids composed of different types of cells, such as hepatocytes and endothelial cells, express tissue specific functions at a high level, which is advantageous for more precise drug screening and biological research. In this study, we propose rapid formation of three-dimensional hetero-spheroids consisting of hepatocytes and endothelial cells using micro-rotation flow. The hepatocytes are coated with collagen gel layers less than 200 nm thick to increase adhesion strength between hepatocytes and endothelial cells. Gel-coated hepatocytes and endothelial cells are collected in an array by micro-rotational flow and collagen-gel coating, thereby forming hetero-spheroids within 2 min. This array allowed the size of the three-dimensional spheroids to be hydrodynamically controlled by varying the cell density of the medium without altering the device geometry with standard deviations of less than 19%. The proposed microfulidic device, with its capacity of rapidly forming size-controlled hetero-cell aggregates, will offer an efficient experimental platform for heterospheroid study that will contribute to drug screening and regenerative medicine.","PeriodicalId":286457,"journal":{"name":"2011 International Symposium on Micro-NanoMechatronics and Human Science","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121626889","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Daniel McGibney, T. Umeda, K. Sekiyama, Hiro Mukai, T. Fukuda
{"title":"Cooperative distributed object classification for multiple robots with audio features","authors":"Daniel McGibney, T. Umeda, K. Sekiyama, Hiro Mukai, T. Fukuda","doi":"10.1109/MHS.2011.6102174","DOIUrl":"https://doi.org/10.1109/MHS.2011.6102174","url":null,"abstract":"This paper explains the methodology for an object classification system using audio features for the purpose of integrating the audio classifier into a real time visual object tracking system in order to more accurately track and describe objects of interest. Four objects are classified by the sounds they produce using Mel-Frequency Cepstral Coefficients (MFCC). These features are classified using a Dynamic Time Warping (DTW) approach along with a k Nearest Neighbor (kNN) classifier. In particular, this paper improves upon the best method of a survey [2] that uses MFCC and DTW. In this paper we propose a method that builds on using only MFCC and DTW. We suggest that once the costs from MFCC and DTW are computed they be used as feature vectors to be classified by another classification method. The results show a 24% improvement over using only MFCC with DTW. These results prove the usefulness of the joint classification system which can be integrated into a multiple robot system.","PeriodicalId":286457,"journal":{"name":"2011 International Symposium on Micro-NanoMechatronics and Human Science","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128162871","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}