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Multilayer SAW device for flow rate sensing in a microfluidic channel 用于微流体通道中流量传感的多层SAW装置
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688246
H. B. Thu, T. C. Duc
{"title":"Multilayer SAW device for flow rate sensing in a microfluidic channel","authors":"H. B. Thu, T. C. Duc","doi":"10.1109/ICSENS.2013.6688246","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688246","url":null,"abstract":"This paper presents a novel microfluidic flow rate sensor based on surface acoustic wave (SAW) principle and aluminum nitride (AlN) film on silicon substrate. The working principles of this proposed SAW device are velocity decay, delay time as well as insertion losses reported in cases of linear and exponential motion. It utilizes CMOS compatible materials, AlN film on Si substrate, being suitable for inexpensive and reliable systems. AlN thin film layer is deposited on the top of silicon substrate. The microfluidic channel is etched through wafer and perpendicular to the SAW propagation path between the transmitter IDT and receiver IDT. Electrical and mechanical characteristic analysis is performed to accurately determine the relation between flow motion and output signal. Velocity decay constant decreases and achieves the saturated state from -1 dB to -4.5 dB after 60 mm/s for the linear motion. Otherwise, velocity decay constant is inversely proportional to the exponential order of velocity due to the leaky acoustic wave in the microfluidic channel.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"61 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129583053","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Water toxicity detection using cell-based hybrid biosensors 基于细胞的混合生物传感器的水毒性检测
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688374
Fei Liu, I. Voiculescu, A. Nordin, Fang Li
{"title":"Water toxicity detection using cell-based hybrid biosensors","authors":"Fei Liu, I. Voiculescu, A. Nordin, Fang Li","doi":"10.1109/ICSENS.2013.6688374","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688374","url":null,"abstract":"This paper presents a novel cell-based biosensor device that contains a quartz crystal microbalance (QCM), integrated with the electric cell-substrate impedance sensing (ECIS) technique. Bovine aortic endothelial cells (BAECs) are cultivated on the sensors and monitored in parallel by both sensors. When two different sensors monitors the same BAECs monolayer cultures on these sensors the information provided by these sensors is more accurate. Cell culturing microwells were fabricated and glued on this biosensor device for minimizing media and reagent demands and potential automation. The microwells were designed in a manner that can eliminate the fluid shear stress and allow laminar flow for the media and other fluids introduced in the cell-culturing chamber during testing. We demonstrated that BAECS cells could be cultured in these microwells. Resonant frequency and impedance spectroscopy measurements were performed during a time interval. It was demonstrated that this cell-based sensor could be used for toxicity experiments.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128703343","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Net-overhang coupled microcantilevers for sensitive mass detection 用于灵敏质量检测的网状悬挑耦合微悬臂梁
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688214
G. Cai, R. Zhang, Zhiqiang Wang, Lurui Zhao, Wengang Wu
{"title":"Net-overhang coupled microcantilevers for sensitive mass detection","authors":"G. Cai, R. Zhang, Zhiqiang Wang, Lurui Zhao, Wengang Wu","doi":"10.1109/ICSENS.2013.6688214","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688214","url":null,"abstract":"This paper presents a kind of net-overhang coupled microcantilevers for ultrasensitive mass detection. Because of the coupling through the net overhang, each cantilever would resonate in two different modes (in-phase and out-of-phase modes). Mass sensitivity of the structure based on relative changes of amplitude ratio between the two cantilevers' in-phase modes is nearly two orders greater than that based on traditionally used resonant frequency shifts. Furthermore, compared with ambient tests, results under vacuum condition demonstrate improved sensitivity and easier emergence of out-of-phase states. Besides, the amplitude ratios show better stability in comparison with the resonant amplitudes and this would contribute to a better detection resolution.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128555794","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Microsystems for sensing and characterization of bacterial biofilms 细菌生物膜传感与表征的微系统
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688300
R. Ghodssi, M. T. Meyer, Y. W. Kim
{"title":"Microsystems for sensing and characterization of bacterial biofilms","authors":"R. Ghodssi, M. T. Meyer, Y. W. Kim","doi":"10.1109/ICSENS.2013.6688300","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688300","url":null,"abstract":"Bacterial biofilms cause severe infections in clinical fields and contamination problems in environmental facilities due to the complex bacterial composition and extracellular matrix of biofilms. To investigate fundamental mechanisms of biofilm formation, non-invasive characterization is desirable. In addition, biofilm sensing at an early stage of growth is critical for managing biofilm associated problems, such as infectious diseases. Microscale devices have significant advantages for the investigation of biofilms, including low volume requirements, high throughput, sensitive detection, and real time monitoring. In this paper, we summarize microfluidic-based biofilm characterization platforms as well as a microscale sensor for early detection of biofilms using a surface acoustic wave.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129163508","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Impact of gamma radiation on range finding sensor performance 伽马辐射对测距传感器性能的影响
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688625
Z. Diggins, N. Mahadevan, D. Herbison, E. Barth, A. Witulski
{"title":"Impact of gamma radiation on range finding sensor performance","authors":"Z. Diggins, N. Mahadevan, D. Herbison, E. Barth, A. Witulski","doi":"10.1109/ICSENS.2013.6688625","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688625","url":null,"abstract":"The effect of gamma radiation on common sensors in robots intended for nuclear remediation scenarios is examined. Rangefinders are chosen as an exemplar of the impact of gamma radiation on sensors and systems. This work extends previous work by calculating not just sensor failure point but changes in the sensor transfer function of three different types of commercial range-finding sensors (infrared (IR) triangulation using a position sensitive detector, sonar using time of flight, and laser range finder using triangulation and a CMOS camera) in response to gamma total radiation dose. Experimental results show significant changes in the IR sensor's static sensitivity with dose, abrupt failure of the laser range finder at low dose, and degradation and abrupt failure for the sonar detector. The input-output relationship of the IR sensor showed further variation after a period of room-temperature annealing. Significant part-to-part variation in radiation response is shown for both the sonar and IR sensor.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129932028","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Enhancing measurement accuracy of position sensitive detector (PSD) systems using the Kalman filter and distortion rectifying 利用卡尔曼滤波和畸变整流提高位置敏感探测器(PSD)系统的测量精度
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688582
Yudong Luo, Yantao Shen, José Cordero, J. Zaklit
{"title":"Enhancing measurement accuracy of position sensitive detector (PSD) systems using the Kalman filter and distortion rectifying","authors":"Yudong Luo, Yantao Shen, José Cordero, J. Zaklit","doi":"10.1109/ICSENS.2013.6688582","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688582","url":null,"abstract":"Factors affecting measurement accuracy of Position Sensitive Detector (PSD) systems consist of inaccuracies caused by interface circuits, system connection, outside environment change, and the semi-conductive properties of the sensor. The presence of these factors causes noises and distortions that are interpreted as a valid signal by the PSD system. As a result, these inaccuracies heavily degrade the PSD performance and hamper the measurement resolution and accuracy of the PSD system, which greatly limit its applications in micro/nano positioning systems. Our work is to (1) design a Kalman filter for the system that is used to recursively and optimally estimate the laser spot position value of the modeled second-order linear lateral effect PSD sensing system from a series of measurements mixed with these noises and (2) develop a distortion rectifying methodology to collect pincushion-type radial distortion associated with the lateral effect PSD systems, so as to enhance measurement accuracy in a larger active area of the PSD. After implementation, both the developed Kalman filter and distortion rectifying algorithm can greatly improve the measurement accuracy of the PSD systems. It will be very useful in a wide variety of applications that use a PSD embedded system.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124133997","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Multi-sensor data integration for personal navigation 用于个人导航的多传感器数据集成
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688321
T. Mukherjee
{"title":"Multi-sensor data integration for personal navigation","authors":"T. Mukherjee","doi":"10.1109/ICSENS.2013.6688321","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688321","url":null,"abstract":"GPS technology has made outdoor navigation ubiquitous and has led to consumers salivating at the idea of importing this capability indoors. Unfortunately, GPS is not reliable indoors. This presentation will discuss how multiple sensors of different modalities can be combined to achieve precise personal navigation over long periods of time. Our system is built with inertial sensing at its core as navigation signals from such sensors are inherently secure against tampering compared to WiFi or cellular radio fingerprinting. To overcome the accuracy challenges of inertial navigation, we first expand on a well known technique called zero velocity updates during the stance phase of walking with a pseudo-measurement that detects small, non-zero velocities from statistical analysis of the stance phase. While this reduces the time dependence of computed position error from cubic to linear, it is not effective in reducing heading gyro drift. So, secondly, we introduce the measurements of range between shoes using both ultrasonic and radio frequency sensors to enable observability of the heading gyro biases. Integrating the data from the velocity sensing, range sensing and inertial sensing leads to positioning accuracy of less than 3 m after 2 hours of a combination of sitting and walking.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123420141","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
The effect of true human synovial fluid on the functionality of an in vivo pressure sensor element 真实人体滑液对体内压力传感器元件功能的影响
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688571
I. Clausen, L. Tvedt, S. Moe, A. Vogl
{"title":"The effect of true human synovial fluid on the functionality of an in vivo pressure sensor element","authors":"I. Clausen, L. Tvedt, S. Moe, A. Vogl","doi":"10.1109/ICSENS.2013.6688571","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688571","url":null,"abstract":"This paper presents a study on the feasibility of packaging a sensor element by a thin biocompatible coating. The goal of the work was twofold; Firstly to investigate the possible impact of the coating on sensor element performance; Secondly to examine the sensor element functionality after soaking into true human synovial fluid for more than 30 days. Sensor elements with two different structures of TiO2, the amorphous and the anatase, were examined and compared to uncoated elements. The device under test was a piezoresistive pressure sensor element designed for in vivo applications. Pressure characteristics were measured before and after Atomic Layer Deposition of the TiO2 coatings. Sensor signals were examined and visual inspection of the sensor element surfaces were done after more than 30 days soaking in true human synovial fluid. Throughout the soaking period the shift in output signal was higher and varied more for uncoated elements than for coated ones. Our results indicate that a 20 nm thick TiO2 coating can provide good protection towards the harsh synovial fluid.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121392946","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
A differential resonant barometric pressure sensor using SOI-MEMS technology 采用SOI-MEMS技术的差分谐振式气压传感器
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688394
Z. Luo, Deyong Chen, Junbo Wang, Jing Chen
{"title":"A differential resonant barometric pressure sensor using SOI-MEMS technology","authors":"Z. Luo, Deyong Chen, Junbo Wang, Jing Chen","doi":"10.1109/ICSENS.2013.6688394","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688394","url":null,"abstract":"This paper presents a resonant barometric pressure sensor based on SOI-MEMS technology. In this device, pressure under measurement causes a deflection of a pressure-sensitive silicon square diaphragm, which is further translated to stress build up in “H” type doubly-clamped micro beams, leading to resonant frequency shift. In device fabrication, SOI-MEMS fabrication processes were utilized, where a new modified buffered hydrofluoric acid (BHF) solution was used to remove the buried oxide layer and release the suspended resonant beams. Experimental results recorded a device resolution of 10Pa, with the nonlinearity of 0.03%, and the temperature coefficient of -0.04% F.S/°C in the range of -40°C to 30°C. The long-term stability error of the proposed device was quantified as 0.05% F.S over the past 3 months.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114220343","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Large area all-elastomer capacitive tactile arrays 大面积全弹性体电容触觉阵列
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688345
P. Block, S. Bergbreiter
{"title":"Large area all-elastomer capacitive tactile arrays","authors":"P. Block, S. Bergbreiter","doi":"10.1109/ICSENS.2013.6688345","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688345","url":null,"abstract":"This work demonstrates the first low cost, allelastomer capacitive tactile arrays compatible with roll-to-roll manufacturing. A new manufacturing process has been developed in which elastomer sheets are covered with a stencil, spray coated with conductive elastomer on one or both sides, and stacked to create the sensor array. These arrays are highly flexible and can withstand large strains. Sensor costs are below $0.05/sensor in small quantities. The fabrication process results in a slightly curved sensor so the change in capacitance is highly nonlinear at low pressures, but approaches theoretical sensitivities of approximately 5 fF/kPa at higher pressures. Sensor resolution was measured to be less than 20 Pa and data taken from an array of sensors demonstrates the detection of multiple force contact points.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"113965969","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
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