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Nano-precision force and displacement measurements using MEMS resonant structures 利用MEMS谐振结构进行纳米精密力和位移测量
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688240
E. Mehdizadeh, Xiaobo Guo, S. Pourkamali, A. Hajjam, A. Rahafrooz
{"title":"Nano-precision force and displacement measurements using MEMS resonant structures","authors":"E. Mehdizadeh, Xiaobo Guo, S. Pourkamali, A. Hajjam, A. Rahafrooz","doi":"10.1109/ICSENS.2013.6688240","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688240","url":null,"abstract":"This work presents a new approach for measuring sub-nano-Newton forces and sub-picometer displacements using MEMS resonators. Different versions of thermally actuated dual plate micromechanical resonators coupled to electrostatic actuators are utilized as highly sensitive force/displacement sensors. The force generated by the actuator strains the associated resonator changing its resonant frequency. Upon thorough characterization, this approach can be used as a reliable and accurate solution for force and displacement measurements in micro and nano-electromechancial systems. Frequency-force and displacement sensitivities as high as 17Hz/nN and 540 Hz/pm have been measured for the presented structures, respectively, showing the potential of such devices for sub-nanoscale force and displacement measurement resolutions.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"80 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124087505","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Experimental and theoretical evaluation of the achievable accuracies of resonating viscosity and mass density sensors 共振粘度和质量密度传感器可实现精度的实验和理论评价
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688490
M. Heinisch, T. Voglhuber-Brunnmaier, E. Reichel, B. Jakoby
{"title":"Experimental and theoretical evaluation of the achievable accuracies of resonating viscosity and mass density sensors","authors":"M. Heinisch, T. Voglhuber-Brunnmaier, E. Reichel, B. Jakoby","doi":"10.1109/ICSENS.2013.6688490","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688490","url":null,"abstract":"Electrodynamically driven resonators upon immersion in a sample liquid which can be used as viscosity and mass density sensors are presented. The most promising concepts for such resonant sensors include devices which are fabricated in technologies involving clamped wire and plate structures. In this contribution, achievable accuracies for these types of resonating sensors are considered and investigated by means of long term measurement series. As a suitable reference for such devices, a steel tuning fork is used, which serves as a frequency standard in low frequency applications (440 Hz). Such tuning forks can serve as viscosity and density sensors themselves if they are immersed in a liquid. In order to make their frequency response electronically accessible, an electromagnetic driving and readout setup has been devised to compare their performance to the wire-and plate-based sensors.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126367122","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Impact of mechanical stress on bipolar transistor current gain and Early voltage 机械应力对双极晶体管电流增益和早期电压的影响
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688466
R. Jaeger, S. Hussain, J. Suhling, P. Gnanachchelvi, B. Wilamowski, M. Hamilton
{"title":"Impact of mechanical stress on bipolar transistor current gain and Early voltage","authors":"R. Jaeger, S. Hussain, J. Suhling, P. Gnanachchelvi, B. Wilamowski, M. Hamilton","doi":"10.1109/ICSENS.2013.6688466","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688466","url":null,"abstract":"Fundamental results for the stress dependence of the current gain and Early voltage of vertical npn and pnp bipolar junction transistors (BJTs) on (100) and (111) silicon are presented with experimental verification. These results demonstrate the direct relationship between current gain and piezoresistive coefficients and show that Early voltage is independent of stress. This information completes the data necessary for modeling the impact of stress on bipolar devices and circuits, and the modeling will facilitate simulation of the impact of process and packaging induced stress on precision analog circuits and sensors. A sample circuit simulation using the model is provided.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128112044","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
In-situ soot particle sensing in an aero-engine exhaust plume 航空发动机排气羽流烟尘颗粒的原位检测
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688442
D. Mccormick, K. Ozanyan, J. Black, Yutong Feng
{"title":"In-situ soot particle sensing in an aero-engine exhaust plume","authors":"D. Mccormick, K. Ozanyan, J. Black, Yutong Feng","doi":"10.1109/ICSENS.2013.6688442","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688442","url":null,"abstract":"This paper reports the use of a fiber-laser to produce spatially resolved images of the distribution of absorbing particles in the exhaust plume of a modified helicopter gas turbine engine. In-situ sensing of soot particles by Laser-Induced Incandescence (LII) is demonstrated using fiber-lasers with higher power, longer pulse duration, and higher pulse repetition rates than conventional LII. The sensitivity of the method is illustrated by the detection of ambient absorbing particles prior to engine running. With a running engine images are obtained in 0.01s. The demonstration of LII using fiberlasers is a first step in the development of a new model for long-pulsed LII.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121739064","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Energy-efficient, 0.1 nJ/conversion temperature sensor with time-to-digital converter and 1 °C accuracy in −6 to 64 °C range 节能，0.1 nJ/转换温度传感器与时间到数字转换器和1°C的精度在−6至64°C范围内
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688542
O. Nizhnik, K. Higuchi, K. Maenaka, T. Bartley
{"title":"Energy-efficient, 0.1 nJ/conversion temperature sensor with time-to-digital converter and 1 °C accuracy in −6 to 64 °C range","authors":"O. Nizhnik, K. Higuchi, K. Maenaka, T. Bartley","doi":"10.1109/ICSENS.2013.6688542","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688542","url":null,"abstract":"The proposed time-to-digital converter is based on a Schmitt trigger monostable multivibrator and an external thermistor with a negative temperature coefficient. It is used to implement an ultra-low-power (105 pJ/conversion measured) temperature sensor. The sensor has significantly lower power (1/250) than state of the art diode/ADC temperature sensors. The proposed temperature sensor also dissipates 1/3 of the power of state of the art frequency-to-digital converter (ring oscillator) based temperature sensors. Furthermore, the proposed circuit is robust to process and power supply variation due to the ratiometric nature of the Schmitt trigger threshold levels. Two precision analog components, an on-chip MIM capacitor and an external thermistor, are used to set the gain of the sensor. All other circuitry in the proposed temperature sensor is digital, and the output is the measured temperature in a 2's complement, 8-bit digital code with the LSB representing 0.5°C.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115802675","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Palmtop waveguide-mode sensor: Comparison of sensitivity and subtyping of influenza viruses with SPR, ELISA and Immunochromatography 掌上波导型传感器:与SPR、ELISA和免疫层析法比较流感病毒的敏感性和亚型
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688224
K. Awazu, M. Fujimaki, S. Gopinath
{"title":"Palmtop waveguide-mode sensor: Comparison of sensitivity and subtyping of influenza viruses with SPR, ELISA and Immunochromatography","authors":"K. Awazu, M. Fujimaki, S. Gopinath","doi":"10.1109/ICSENS.2013.6688224","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688224","url":null,"abstract":"We developed a highly sensitive waveguide-mode sensor of size 5 cm×10 cm×15 cm (Fig.1). The first topic discussed in this paper is that the discrimination of the H3N2 and H5N1 strains of influenza viruses has been clearly achieved with the waveguide-mode sensor. We found that glycan-based detection using the waveguide sensor system analysis is very useful to distinguish between H3N2 and H5N1 viruses. The second topic concerns sensitivity comparison among the waveguide-mode sensor, immuno-chromatography, enzyme-linked immunosorbent assay (ELISA), and surface plasmon resonance (SPR). The highest sensitivity for H1N1 and H3N2 viruses was found in ELISA and the waveguide-mode sensor.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132537912","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Nanomachined pyroelectric detector with low thermal conductance — Design and concepts 低导热的纳米热释电探测器。设计和概念
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688403
Md Muztoba, N. Melikechi, M. Rana, D. Butler
{"title":"Nanomachined pyroelectric detector with low thermal conductance — Design and concepts","authors":"Md Muztoba, N. Melikechi, M. Rana, D. Butler","doi":"10.1109/ICSENS.2013.6688403","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688403","url":null,"abstract":"We report the design of an uncooled pyroelectric detector utilizing a nanometer sized mesh to support the micromachined detector. The design had been optimized by using different geometry and electrodes. The thickness, width and dimension of each layer were changed to achieve the lowest thermal conductance. Ca-modified lead titanate (PCT) was employed as the thermometer in the detector. The design and performance of pyroelectric detectors has been conducted by simulating the structure with Intellisuite™. The simulated detector had spider web-like structure with each of the struts (ring) of spider web 100 nm wide. The pyroelectric detectors utilized a NiCr absorber, PCT sensing layer, Ti electrodes, Al2O3 structural layer to obtained lower thermal conductivity between the detector and substrate. The thermal conductance between the sensor and the substrate was found to be as low as 4.57 × 10-9 W/K.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130225728","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Mobile application based sustainable irrigation water usage decision support system: An intelligent sensor CLOUD approach 基于移动应用的可持续灌溉用水决策支持系统:一种智能传感器云方法
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688523
Cecil Li, R. Dutta, C. Kloppers, C. D'Este, Ahsan Morshed, A. Almeida, Aruneema Das, J. Aryal
{"title":"Mobile application based sustainable irrigation water usage decision support system: An intelligent sensor CLOUD approach","authors":"Cecil Li, R. Dutta, C. Kloppers, C. D'Este, Ahsan Morshed, A. Almeida, Aruneema Das, J. Aryal","doi":"10.1109/ICSENS.2013.6688523","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688523","url":null,"abstract":"In this paper a novel data integration approach based on three environmental Sensors - Model Networks (including the Bureau of Meteorology-SILO database, Australian Cosmic Ray Sensor Network database (CosmOz), and Australian Water Availability Project (AWAP) database) has been proposed to estimate ground water balance and average water availability. An unsupervised machine learning based clustering technique (Dynamic Linear Discriminant Analysis (D-LDA)) has been applied for extracting knowledge from the large integrated database. The Commonwealth Scientific and Industrial Research Organisation (CSIRO) Sensor CLOUD computing infrastructure has been used extensively to process big data integration and the machine learning based decision support system. An analytical outcome from the Sensor CLOUD is presented as dynamic web based knowledge recommendation service using JSON file format. An intelligent ANDROID based mobile application has been developed, capable of automatically communicating with the Sensor CLOUD to get the most recent daily irrigation, water requirement for a chosen location and display the status in a user friendly traffic light system. This recommendation could be used directly by the farmers to make the final decision whether to buy extra water for irrigation or not on a particular day.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134230860","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Development of suspended planar two port micro transformer for RF wireless application 用于射频无线应用的悬挂式平面双端口微型变压器的研制
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688559
I. Huang, Wen-Hui Huang, C. Sun
{"title":"Development of suspended planar two port micro transformer for RF wireless application","authors":"I. Huang, Wen-Hui Huang, C. Sun","doi":"10.1109/ICSENS.2013.6688559","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688559","url":null,"abstract":"In order to improve the quality-factor and magnetic coupling factor of micro transformer at high operating frequency, this paper presents two-port micro transformer utilizing micro-electro-mechanical systems (MEMS) technology are featured with very small chip size (0.7 mm×0.7 mm×0.5 mm) and constructed of a 0.32 μm-thick TaN/Ta/Cu bottom electrode, 10 μm-height supporting copper via, and a 6 μm-thick suspended spiral copper conducting layer with 10 μm air gap. Measurement results show the implemented two-port micro transformer demonstrates very high magnetic coupling factor (0.78) and quality-factor (17.2) at 5.2 GHz operating frequency.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133865213","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Quantifying spatial distribution of soil moisture using a cosmic ray and capacitance sensor network 利用宇宙射线和电容传感器网络定量土壤水分的空间分布
2013 IEEE SENSORS Pub Date : 2013-12-19 DOI: 10.1109/ICSENS.2013.6688468
A. Almeida, Craig Baillie, D. Worledge, P. Smethurst, R. Dutta, A. Terhorst, T. Franz
{"title":"Quantifying spatial distribution of soil moisture using a cosmic ray and capacitance sensor network","authors":"A. Almeida, Craig Baillie, D. Worledge, P. Smethurst, R. Dutta, A. Terhorst, T. Franz","doi":"10.1109/ICSENS.2013.6688468","DOIUrl":"https://doi.org/10.1109/ICSENS.2013.6688468","url":null,"abstract":"This study combines soil moisture capacitance probes and cosmic-ray neutron probe with a Fuzzy Inference System to estimate variability of soil moisture in a ~28 ha circle over time. The technique demonstrates that the cosmic-ray neutron probe's average neutron count and a network of capacitance probes may be useful for estimating spatial and temporal variability in soil moisture patterns within the probe's footprint.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130800627","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
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