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Water-Dispersible MXene Governs Glycolysis for Cancer Synergistic Therapy

IF 13.3 2区材料科学

Small Pub Date : 2025-03-31 DOI: 10.1002/smll.202411768

Jinfeng Liu, Yuwen Gong, Dandan Wang, Shuangli Kang, Shengjian Gong, Hanqing Ma, Peiwei Gong, Biao Kong

{"title":"Water-Dispersible MXene Governs Glycolysis for Cancer Synergistic Therapy","authors":"Jinfeng Liu, Yuwen Gong, Dandan Wang, Shuangli Kang, Shengjian Gong, Hanqing Ma, Peiwei Gong, Biao Kong","doi":"10.1002/smll.202411768","DOIUrl":"https://doi.org/10.1002/smll.202411768","url":null,"abstract":"Targeted delivery of glucose oxidase (GOx) using MXene remains a great challenge due to its poor dispersion and susceptibility to oxidation, and the hypoxia and high glutathione (GSH) contents make the situation even more worrying. Herein, a bovine serum albumin-mediated non-chemical modification strategy is developed, endowing titanium carbide MXene with long-time water-dispersion and further integrating it as a glycolysis-controllable therapy system without any chemotherapeutic agents. The system also constructs an effective O2 cycling and GSH degradation pathway, which fundamentally adjusts the tumor microenvironment and greatly elevates both in vivo and in vitro therapy effects. Reactive oxygen species are also generated and disrupt the balance of oxidative stress. Moreover, the reduced efficiency of mitochondrial energy production significantly inhibits the level of glycolysis and hinders energy supply. The study presents an effective cancer treatment combining starvation/photothermal therapy, which has superior anti-cancer effects due to the dual effects of reducing glucose levels and diminishing cellular energy production capacity.","PeriodicalId":228,"journal":{"name":"Small","volume":"102 1","pages":""},"PeriodicalIF":13.3,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143737119","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

3D Printing of Stiff Photonic Microparticles into Load-Bearing Structures

IF 13.3 2区材料科学

Small Pub Date : 2025-03-31 DOI: 10.1002/smll.202501172

Pauline Pradal, Paul Hardivillé, Jong Bin Kim, Seong Kyeong Nam, Shin-Hyun Kim, Esther Amstad

{"title":"3D Printing of Stiff Photonic Microparticles into Load-Bearing Structures","authors":"Pauline Pradal, Paul Hardivillé, Jong Bin Kim, Seong Kyeong Nam, Shin-Hyun Kim, Esther Amstad","doi":"10.1002/smll.202501172","DOIUrl":"https://doi.org/10.1002/smll.202501172","url":null,"abstract":"Structural colors are bright and possess a remarkable resistance to light exposure, humidity, and temperature such that they constitute an environmentally friendly alternative to chemical pigments. Unfortunately, upscaling the production of photonic structures obtained via conventional colloidal self-assembly is challenging because defects often occur during the assembly of larger structures. Moreover, the processing of materials exhibiting structural colors into intricate 3D structures remains challenging. To address these limitations, rigid photonic microparticles are formulated into an ink that can be 3D printed through direct ink writing (DIW) at room temperature to form intricate macroscopic structures possessing locally varying mechanical and optical properties. This is achieved by adding small amounts of soft microgels to the rigid photonic particles. To rigidify the granular structure, a percolating hydrogel network is formed that covalently connects the microgels. The mechanical properties of the resulting photonic granular materials can be adjusted with the composition and volume fraction of the microgels. The potential of this approach is demonstrated by 3D printing a centimeter-sized photonic butterfly and a temperature-responsive photonic material.","PeriodicalId":228,"journal":{"name":"Small","volume":"40 1","pages":""},"PeriodicalIF":13.3,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143737111","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Unveiling the Cation Effects on Electrocatalytic CO2 Reduction via Operando Surface-enhanced Raman Spectroscopy

IF 13.3 2区材料科学

Small Pub Date : 2025-03-31 DOI: 10.1002/smll.202409569

Dexiang Chen, Yunjia Wei, Zixuan Sun, Xing Zhao, Xiao Tang, Xiangnan Zhu, Guoqun Li, Lei Yao, Shuying Chen, Richen Lin, Jiawei Wang, Qiang Li, Xingce Fan, Teng Qiu, Qi Hao

{"title":"Unveiling the Cation Effects on Electrocatalytic CO2 Reduction via Operando Surface-enhanced Raman Spectroscopy","authors":"Dexiang Chen, Yunjia Wei, Zixuan Sun, Xing Zhao, Xiao Tang, Xiangnan Zhu, Guoqun Li, Lei Yao, Shuying Chen, Richen Lin, Jiawei Wang, Qiang Li, Xingce Fan, Teng Qiu, Qi Hao","doi":"10.1002/smll.202409569","DOIUrl":"https://doi.org/10.1002/smll.202409569","url":null,"abstract":"The electrocatalytic carbon dioxide reduction reaction (CO2RR) can be significantly improved by the presence of alkali metal cations, yet the underlying mechanisms remain unclear. In this study, we developed clean Cu nanoparticles with tailored curvatures to modulate the local concentration of K+ cations and investigate their effects on CO2RR. The adjustment of particle curvature allows for direct control over cation concentrations within the electrochemical double layer, enabling broad-range modulation of cation concentration without concerns regarding solubility limitations or anionic interference. By tuning the plasmonic modes of the Cu particles, we achieved highly sensitive surface-enhanced Raman spectroscopy (SERS) under resonant conditions, facilitating in situ tracking of the short-lived intermediates in CO2RR. Our results revealed that K+ cations not only stabilize *COOH and *CO species and reduce the reaction energy barrier for C─C coupling but also increase the surface coverage of *CO, particularly for bridge *CO configurations. Furthermore, our findings suggest that the interactions between bridge *CO and atop *CO play a crucial role in facilitating the C─C coupling, offering insights for the design of electrocatalysts for CO2RR.","PeriodicalId":228,"journal":{"name":"Small","volume":"11 1","pages":""},"PeriodicalIF":13.3,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143737113","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

IR820 Sensitized Ceria Nanozyme via PDA Bridging for Multifaceted Antibacterial Wound Healing Therapy

IF 13.3 2区材料科学

Small Pub Date : 2025-03-31 DOI: 10.1002/smll.202500382

Akram Nasser Juaim, Jiao Sun, Ran Nie, Wen Li, Lina Ding, Kun Wang, Jing Zhou, Meiqi Li, Minghan Chi, Biao Dong, Manlin Qi, Lin Wang

{"title":"IR820 Sensitized Ceria Nanozyme via PDA Bridging for Multifaceted Antibacterial Wound Healing Therapy","authors":"Akram Nasser Juaim, Jiao Sun, Ran Nie, Wen Li, Lina Ding, Kun Wang, Jing Zhou, Meiqi Li, Minghan Chi, Biao Dong, Manlin Qi, Lin Wang","doi":"10.1002/smll.202500382","DOIUrl":"https://doi.org/10.1002/smll.202500382","url":null,"abstract":"Nanozymes with peroxidase (POD)-like activity hold significant potential for addressing antibiotic-resistant bacterial infections. However, their catalytic efficiency and therapeutic efficacy need further improvement to broaden their clinical applications. A key challenge is achieving efficient energy transfer from photosensitizing molecules to nanozymes, which is critical for enhancing catalytic performance. In this study, a universal strategy is developed to bridge nanozymes and photosensitizing molecules, designing photoactivated nanozymes called IR820/PDA@mCeO2 (IR/P@Ce). By integrating IR820, a photosensitizer, with mesoporous ceria (mCeO2), it facilitates efficient electron transfer through polydopamine (PDA) bridge molecules, resulting in enhanced POD-like catalytic performance and reactive oxygen species production. Additionally, PDA stabilized the nanozyme, improved photothermal therapy, and enhanced photodynamic therapy under near-infrared light exposure, further amplifying bacterial destruction. This multifunctional nanozyme demonstrated strong antibacterial efficacy against both Gram-positive (Staphylococcus aureus) and Gram-negative (Escherichia coli) bacteria. Moreover, its synergistic approach not only facilitated bacterial eradication but also accelerated wound healing in vivo, making it a promising therapeutic alternative for managing bacterial infections and promoting tissue regeneration.","PeriodicalId":228,"journal":{"name":"Small","volume":"88 1","pages":""},"PeriodicalIF":13.3,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143737115","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Synergistically Toughening Non-Neutral Polyampholyte Hydrogels by Ionic and Coordination Bonds at Low Metal-Ion Contents

IF 13.3 2区材料科学

Small Pub Date : 2025-03-31 DOI: 10.1002/smll.202500258

Yiwan Huang, Qin Teng, Sanyu Qian, Tao Liu, Shijun Long, Zhen Li, Jin Tao, Xuefeng Li

{"title":"Synergistically Toughening Non-Neutral Polyampholyte Hydrogels by Ionic and Coordination Bonds at Low Metal-Ion Contents","authors":"Yiwan Huang, Qin Teng, Sanyu Qian, Tao Liu, Shijun Long, Zhen Li, Jin Tao, Xuefeng Li","doi":"10.1002/smll.202500258","DOIUrl":"https://doi.org/10.1002/smll.202500258","url":null,"abstract":"Polyampholyte (PA) hydrogels, composed of charged hydrophilic networks with both positive and negative groups, have attracted great attention due to the unique structure and excellent antifouling properties. Yet, the superhydrophilicity usually makes non-neutral PA (n-PA) gels highly swollen and mechanically very weak in aqueous environments, severely limiting their applications. Herein metal-coordination bonds are designed to introduce to synergistically toughen n-PA hydrogels with ionic bonds via a secondary equilibrium strategy. In the design, as-prepared n-PA gels are dialyzed in metal-ion solutions and deionized water in sequence to achieve the tough gels. Through this strategy, the weak n-PA gels can be significantly toughened by the synergy of ionic and metal-coordination bonds. A systematic study indicates that both the molar ratio of oppositely charged monomers and the metal-ion concentration affect the mechanical enhancements clearly. The universality of the proposed strategy is further proved by selecting different gel systems and multivalent metal ions. Notably, low metal-ion concentrations (≤0.1 m) of dialysis solutions can enable synergistic toughening. Theoretical models are also adopted to disclose the toughening mechanism. This work not only expands the understanding on the fabrication of strong and tough PA hydrogels but also provides some insights for PA gels in electrolyte solutions.","PeriodicalId":228,"journal":{"name":"Small","volume":"40 1","pages":""},"PeriodicalIF":13.3,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143737116","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Self-Powered Broadband Photodetectors Based on WS2-Anchored MoS2 with Enhanced Responsivity and Detectivity

IF 13.3 2区材料科学

Small Pub Date : 2025-03-31 DOI: 10.1002/smll.202502900

Ashok Kumar, Atul G. Chakkar, Chayan Das, Pradeep Kumar, Satyajit Sahu, Michael Saliba, Mahesh Kumar

{"title":"Self-Powered Broadband Photodetectors Based on WS2-Anchored MoS2 with Enhanced Responsivity and Detectivity","authors":"Ashok Kumar, Atul G. Chakkar, Chayan Das, Pradeep Kumar, Satyajit Sahu, Michael Saliba, Mahesh Kumar","doi":"10.1002/smll.202502900","DOIUrl":"https://doi.org/10.1002/smll.202502900","url":null,"abstract":"Self-powered broadband photodetectors utilizing 2D transition metal dichalcogenides (TMDs) are highly promising due to their remarkable light absorption capabilities and high sensitivity, making them suitable for applications such as military surveillance and wireless light detection systems. However, their performance is constrained by inadequate absorption, suboptimal charge carrier separation, and slow response times. In response to these limitations, the study fabricates a self-powered photodetector employing a heterostructure composed of WS2 nanoparticles anchored to CVD-synthesized MoS2, operating within the visible to near-infrared spectrum. The device demonstrates a responsivity of 283 mA W−1 and a detectivity 6.44 × 1012 Jones, alongside an external quantum efficiency of 61% under exposure of 580 nm. In comparison to pristine MoS2, the MoS2-WS2 photodetector exhibited approximately 12-fold and 11-fold enhancements in responsivity and detectivity, respectively, in addition to fast response time of ≈375 µs and 6 ms. Additionally, density functional theory (DFT) calculations are used to analyze the increase in dark current that is observed following WS₂ nanoparticle anchored on MoS₂. This investigation highlights the potential of 2D heterostructures in the development of high-performance broadband photodetectors, which offer improved responsivity, stability, and self-powered operation for advanced optoelectronic applications.","PeriodicalId":228,"journal":{"name":"Small","volume":"72 1","pages":""},"PeriodicalIF":13.3,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143737120","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Accelerating Interface NIR-Induced Charge Transfer Through Cu and Black Phosphorus Modifying G-C3N4 for Rapid Healing of Staphylococcus aureus Infected Diabetic Ulcer Wounds

IF 13.3 2区材料科学

Small Pub Date : 2025-03-30 DOI: 10.1002/smll.202500378

Hongbo Wang, Chaofeng Wang, Shuilin Wu, Danning Yan, Caihui Huang, Congyang Mao, Yufeng Zheng, Hanpeng Liu, Liguo Jin, Shengli Zhu, Zhaoyang Li, Hui Jiang, Xiangmei Liu

{"title":"Accelerating Interface NIR-Induced Charge Transfer Through Cu and Black Phosphorus Modifying G-C3N4 for Rapid Healing of Staphylococcus aureus Infected Diabetic Ulcer Wounds","authors":"Hongbo Wang, Chaofeng Wang, Shuilin Wu, Danning Yan, Caihui Huang, Congyang Mao, Yufeng Zheng, Hanpeng Liu, Liguo Jin, Shengli Zhu, Zhaoyang Li, Hui Jiang, Xiangmei Liu","doi":"10.1002/smll.202500378","DOIUrl":"https://doi.org/10.1002/smll.202500378","url":null,"abstract":"Bacteria-infected diabetic wounds seriously threaten the lives of patients because diabetic ulcer tissues are quite difficult to repair while the bacteria infections deteriorate this course. Clinically used antibiotics cannot fulfil this mission but introduce the risk of bacterial resistance simultaneously. Herein, a near-infrared (NIR) light-responsive composite hydrogel is developed for rapid bacterial eradication and healing of Staphylococcus aureus (S. aureus)-infected diabetic wounds. The hydrogel incorporates copper (Cu)-doped graphitic carbon nitride (g-C3N4) nanosheets combined with black phosphorus (BP) nanosheets through electrostatic bonding and π–π stacking interactions, uniformly dispersed within a chitosan (CS) matrix crosslinked with polyvinyl alcohol (PVA) (Cu-CN/BP@Gel). Under NIR light irradiation, Cu-doping accelerated hot electron flow and improved the photothermal effect. Additionally, the built-in electric field formed by Cu-CN/BP accelerated interfacial electron flow and inhibited the recombination of electron-hole pairs, enhancing reactive oxygen species (ROS) generation. Then, Cu-CN/BP@Gel hydrogel can reach the antibacterial rate of 99.18% against S. aureus. The successful application of the Cu-CN/BP@Gel hydrogel in diabetic wound infection presents a new method for wound healing in a high blood sugar and ROS environment.","PeriodicalId":228,"journal":{"name":"Small","volume":"58 1","pages":""},"PeriodicalIF":13.3,"publicationDate":"2025-03-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143736860","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Enhanced Delivery of Photothermal Gelatin Nanoparticle for Redox Balanced Nanocatalytic Tumor Chemotherapy

IF 13.3 2区材料科学

Small Pub Date : 2025-03-30 DOI: 10.1002/smll.202411018

Jiayi Hu, Xiaoyu Jia, Manlin Li, Guangxin Duan, Kwan Man, Hongliang Dai, Ling Wen, Hongya Geng

{"title":"Enhanced Delivery of Photothermal Gelatin Nanoparticle for Redox Balanced Nanocatalytic Tumor Chemotherapy","authors":"Jiayi Hu, Xiaoyu Jia, Manlin Li, Guangxin Duan, Kwan Man, Hongliang Dai, Ling Wen, Hongya Geng","doi":"10.1002/smll.202411018","DOIUrl":"https://doi.org/10.1002/smll.202411018","url":null,"abstract":"Nanocatalytic platforms are promising in cancer therapeutics via combining multiple treatments, which can be leveraged through the metabolic dysfunction in cancer progression. However, the lack of effective tumor delivery platforms hampers this approach. Here, a gelatin-based platform is designed that is preloaded with gold nanoparticles and photothermal polypyrrole (GNPs@AuNPs-PPy) with an acid-induced doping enhancement. Benefiting from the tumor associated overexpression of H2O2, peroxidase-like Au nanoparticles induce a burst of oxidative reactive oxygen species in the local tumor microenvironment (TME). Subsequent orchestration of redox surroundings recruits immune cells, showcasing an effective antineoplastic pathway. Under near infrared light (NIR) irradiation, nanohybrids exhibit dual pH/NIR enhanced drug release within the TME, while allowing for multimodal imaging-guided theranostics. Leveraging this modality, GNPs@AuNPs-PPy delivers quercetin (a natural antitumor mediator) in TME, boosting anti-tumor therapy. The gelatin-mediated nanomedicine provides an alternative platform for combinatorial dynamic antitumor treatment.","PeriodicalId":228,"journal":{"name":"Small","volume":"36 1","pages":""},"PeriodicalIF":13.3,"publicationDate":"2025-03-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143737188","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Construction of Asymmetric Fe-N3P1 Sites on Freestanding Nitrogen/Phosphorus Co-Doped Carbon Nanofibers for Boosting Oxygen Electrocatalysis and Zinc–Air Batteries

IF 13.3 2区材料科学

Small Pub Date : 2025-03-30 DOI: 10.1002/smll.202501495

Yuanjian Liu, Haocheng Liu, Lina Li, Yan Tang, Yanyan Sun, Jiang Zhou

{"title":"Construction of Asymmetric Fe-N3P1 Sites on Freestanding Nitrogen/Phosphorus Co-Doped Carbon Nanofibers for Boosting Oxygen Electrocatalysis and Zinc–Air Batteries","authors":"Yuanjian Liu, Haocheng Liu, Lina Li, Yan Tang, Yanyan Sun, Jiang Zhou","doi":"10.1002/smll.202501495","DOIUrl":"https://doi.org/10.1002/smll.202501495","url":null,"abstract":"The construction of freestanding carbon nanofiber membrane with single-atomic metal active sites and interconnected microchannels as air electrodes is vital for boosting the performance of zinc–air batteries (ZABs). Herein, single-atomic Fe sites is prepared on freestanding hierarchical nitrogen/phosphorus co-doped carbon nanofibers (Fe SACs@PNCNFs) by loading Fe-doped zeolitic imidazolate framework-8 with leaf-like structures on electrospun polyacrylonitrile (PAN) nanofibers with subsequent multi-step pyrolysis in the presence of sodium monophosphate, which are confirmed to be in the form of Fe-N3P1 by X-ray adsorption spectra. The asymmetric N/P coordinated Fe sites is theoretically demonstrated to boost the ORR performance with a half-wave potential of 0.89 V due to the weakened *O adsorption while stabilizing *OOH adsorption arising from the increased charge density of Fe sites compared to symmetric N coordinated Fe sites with Fe-N4. Moreover, when liquid and quasi-solid ZABs are assembled, excellent battery performance is also achieved with peak power density of 163 and 72 mW cm−2 as well as good stability for more than 190 and 65 h, respectively.","PeriodicalId":228,"journal":{"name":"Small","volume":"58 1","pages":""},"PeriodicalIF":13.3,"publicationDate":"2025-03-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143736859","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Enhanced Ruthenium Removal and Superior Surface Quality via Abrasive-Free Chemical Mechanical Polishing Using Synergistic Catalysis with the H2O2/PDS/FeIII-NTA System

IF 13.3 2区材料科学

Small Pub Date : 2025-03-30 DOI: 10.1002/smll.202410586

Yufei You, Ziwei He, Jianwei Zhou, Yuhang Qi, Chong Luo

{"title":"Enhanced Ruthenium Removal and Superior Surface Quality via Abrasive-Free Chemical Mechanical Polishing Using Synergistic Catalysis with the H2O2/PDS/FeIII-NTA System","authors":"Yufei You, Ziwei He, Jianwei Zhou, Yuhang Qi, Chong Luo","doi":"10.1002/smll.202410586","DOIUrl":"https://doi.org/10.1002/smll.202410586","url":null,"abstract":"As the feature sizes of integrated circuits continue to shrink, the phenomenon of electrical migration in Cu interconnects becomes more severe. Due to the excellent properties of Ru such as short electron mean free path and good resistance to electrical migration, it has the potential to become the next-generation interconnect material. Ru chemical mechanical polishing (CMP) is a crucial step in the fabrication of integrated circuits, with oxidation being the step limiting the Ru removal rate, which affects the efficiency of semiconductor manufacturing. In this study, using the H2O2/PDS/FeIII-NTA system, the removal rate of Ru is improved to 1202 Å min−1 via abrasive-free CMP at pH = 7; the surface roughness is only 0.94 nm, demonstrating superior surface quality at the atomic level. This system features a synergistic catalytic mechanism, producing the active oxidants HO•, SO4•−, and FeIV = O. These active oxidants have strong oxidation capacity and lead to the oxidation of Ru into RuO2 and RuO3 and their subsequent oxidation into soluble RuO4− and RuO42−, which results in the formation of a porous oxide layer on the surface of Ru. The oxidation and mechanical effects reach an equilibrium state and accelerate the removal of Ru.","PeriodicalId":228,"journal":{"name":"Small","volume":"73 1","pages":""},"PeriodicalIF":13.3,"publicationDate":"2025-03-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143737184","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0