{"title":"CMOS ESD protection structures-characteristics and performance comparison","authors":"R. Fried, Y. Blecher, S. Friedman","doi":"10.1109/IPFA.1995.487605","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487605","url":null,"abstract":"The performance of ESD protection structures is highly dependent on process parameters, circuit and layout effects, and the structure's area and geometry. The goal of the work reported here was to produce the best ESD protection structure in a standard 0.8 /spl mu/m N-well CMOS LDD non-silicided process, under the constraint of a given area that is dictated by the pad's pitch (132 /spl mu/m/spl times/65 /spl mu/m), and without adding steps to the process. Basic building blocks of CMOS ESD protection structures are reviewed. Layout and circuit effects are discussed. Several ESD protection structures were tested and their performance was compared. DC characteristics and ESD zapping results are reported. 10 kV HBM ESD protection structures are disclosed.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129214465","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A new interlayer dielectric (ILD) cracking mechanism in ceramic packaged multilayered CMOS devices","authors":"Yeoh Eng Hong, Chong Aik Kean, R. Tay","doi":"10.1109/IPFA.1995.487610","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487610","url":null,"abstract":"A new interlayer dielectric (ILD) cracking mechanism was uncovered in a multilayered CMOS technology. This new mechanism was found in ceramic packaged ICs and differs from the well known thermal cycling induced thin-film cracking (TFC) found in plastic packaged ICs. It is shown that the driving force for this new mechanism is a combination of wire bonding stress and wide metal bus layout. A new TFC design specification was developed to prevent the recurrence of the same mechanism on subsequent hermetic packaged products. The reliability impact of this cracking mechanism is reported and investigated in this paper.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"365 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132791549","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A study of the microcracks on the alumina of the thin-film head","authors":"A. Chekanov, T. S. Low, S. Alli","doi":"10.1109/IPFA.1995.487619","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487619","url":null,"abstract":"A study of the microcracks found in the alumina of a magnetic thin film head is presented. The initiation and growth of the cracks was simulated. Thermal expansion of the energized wires was found to produce high stress at the pole tip area resulting in the cracks being attracted to the pole tips. Damages on the alumina act as crack initiation sites. The presence of a crack through the head gap also affects the recording performance of the head.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115253425","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Guard ring diodes for suppression of substrate noise and improved reliability in mixed-mode CMOS circuits","authors":"L. Forbes, W.T. Lim, K. T. Yan","doi":"10.1109/IPFA.1995.487613","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487613","url":null,"abstract":"Forward biased n/sup +/ guard ring diodes are used to generate a relatively large on-chip capacitance. This variable capacitance is resonated with the normal substrate lead inductance to form a very low impedance path to ground. In this manner, substrate noise in mixed signal CMOS integrated circuits can be suppressed resulting in less noise and improved reliability in analog portions of the mixed mode circuits.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134293942","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
L.T.S. Quah, W. K. Wong, J. Phang, D.S.H. Chan, P.Y.S. Ho
{"title":"A study of integrated circuit I-V characteristics using a fault localization system [FLS]","authors":"L.T.S. Quah, W. K. Wong, J. Phang, D.S.H. Chan, P.Y.S. Ho","doi":"10.1109/IPFA.1995.487599","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487599","url":null,"abstract":"A computer-controlled Fault Localization System [FLS] is used to investigate the variations of the I-V characteristics for different devices in terms of various criteria such as the area under the I-V characteristics, the area error and range error between a test device and a golden device. The use of the FLS in locating is also discussed.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133480372","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"The effect of some geometric and packaging process parameters on die metallization failure","authors":"A. Tay, S. H. Ong, Y. K. Lim","doi":"10.1109/IPFA.1995.487590","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487590","url":null,"abstract":"This paper describes an experimental and finite element study of the effect of some geometric and packaging process parameters on die metallization failure during temperature cycling. The geometric parameters studied include die size, die offset, voided die attach and metal-line width, while process parameters include molding temperature, molding pressure and moisture preconditioning. A test chip designed to detect passivation and interlayer dielectric cracking was used to determine the locations on the die where metallization failures occurred. Three-dimensional finite element analyses were performed to determine the stress distribution within the package during temperature cycling. A good correlation between areas of high stress and occurrence of metallization failures was obtained.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"305 ","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134506451","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A study of the influence of inter-metal dielectrics on electromigration performance","authors":"S. Foley, A. Ryan, D. Martin, A. Mathewson","doi":"10.1109/IPFA.1995.487615","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487615","url":null,"abstract":"The relative electromigration performance of test structures with a common Ti/TiN-Al-1%Cu-TiN metallization scheme and with three different inter-metal-dielectric (IMD) layers above an interconnect test line are compared. Differences in lifetimes are observed which are attributable to the influences of the different IMD layers. The IMD layers in question are (A) Polyimide, (B) a flexible inorganic dielectric layer and (C) a rigid inorganic dielectric layer. A matrix of conventional electromigration tests have been carried out. The possible influence of stress migration is investigated and an explanation for the relative behaviour is proposed.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115487868","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Gladstone, R. S. Scott, E. Runnion, T. W. Hughes, D. Dumin, J.C. Mitros, L. Lie
{"title":"Thickness dependence of low-level leakages in thin oxides","authors":"S. Gladstone, R. S. Scott, E. Runnion, T. W. Hughes, D. Dumin, J.C. Mitros, L. Lie","doi":"10.1109/IPFA.1995.487608","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487608","url":null,"abstract":"The wearout of 4 nm to 13 nm thick oxides fabricated on n-type and p-type substrates was measured. The interface trap densities, flatband voltage shifts, bulk trap densities and low-level leakage currents were measured before and after high-voltage stressing. In oxides that had been stressed at the equivalent electric fields for constant times, the measured flatband voltage shifts, interface trap densities, and bulk trap densities dropped as the oxide thicknesses dropped and were negligible for oxides thinner than 6 nm, while the low-level pre-tunneling leakage currents increased. Both an AC and a DC component to the stress-induced low-level leakages were measured. The DC component to this leakage current increased as the oxide thicknesses decreased. A model based on uniform trap generation throughout the oxide during the high-voltage stresses and tunnel charge/discharge of the traps within approximately 3 nm of either interface after the stresses were removed, has been used to explain and accurately fit all of the thickness dependences of the trap generation and leakage current measurements. The thickness dependent leakage currents will limit oxides to thicknesses greater than about 10 nm for non-volatile memory applications.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122529792","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Focused ion beam sample preparation for high spatial resolution X-ray microanalysis","authors":"K. Pey, A. Leslie","doi":"10.1109/IPFA.1995.487593","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487593","url":null,"abstract":"Thin slices of Si integrated circuit samples of about 100 nm to a couple of hundred nanometers containing process related defects have been prepared by focused ion beam (FIB) for high spatial resolution X-ray microanalysis. The X-ray signals from the bulk are minimised to enhance the signal-to-background ratio of the defects which are in the sub-micron range. The experimental results were also compared to those by a Monte Carlo simulation.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123512310","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Finite element analysis of hygrothermally induced stresses in plastic IC packages","authors":"S. Yi, Jing Sua Goh, Ji Cheng Yang","doi":"10.1109/IPFA.1995.487592","DOIUrl":"https://doi.org/10.1109/IPFA.1995.487592","url":null,"abstract":"In the present study, the moisture and temperature distributions and residual stresses inside plastic encapsulated IC packages are evaluated in order to asses product reliability. Numerical procedures based on finite element analyses are presented to calculate the hygro-thermally induced deformations and stresses in plastic IC packages during the surface mounting process preceded by the moisture soaking test. For example residual stresses in thin LOC (Lead-On-Chip) TSOP packages during the reflow soldering process preceded by the 168 hours 85/spl deg/C/85% RH moisture soaking test have been studied. Numerical results show that when TSOP packages undergo the reflow soldering process substantially high tensile /spl sigma//sub 2/ stresses arose in the silicon chip while high compressive stresses were in the encapsulant below the chip. Such high compressive and tensile stress development in the silicon chip and encapsulant below the chip is responsible for the delamination and popcorn crack. The results also show that the magnitudes of residual stresses in IC packages may depend not only on the magnitude of loading but also on the loading history due to the hygro-thermo-viscoelastic behavior of plastic mold compound materials.","PeriodicalId":216880,"journal":{"name":"Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129353906","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}